EP0745656A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Abrasive particles, method for producing the same, and use of the same
Assignee: Sumitomo Chemical Co Ltd
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Filing: 1996-05-22
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Granted: —
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Expires: 2016-05-22
Abstract
Abstract Abrasive particles having an average particle size of not more than 2 µm and comprising 100 parts by weight of aluminum oxide and/or silicon oxide and 5 to 25 parts by weight of cerium in the form of cerium oxide may be used for planarizing an insulating film on a semiconductor substrate.
Inventors
- 👤 Kazumasa Ueda
- 👤 Yoshiaki Takeuchi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 14:05
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/01; C04B35/10; C04B35/111; C04B35/1115; C09; C09K; C09K3/00; C09K3/14; C09K3/1409; C09K3/1418; C09K3/1436; C09K3/1454; C09K3/1463
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
64 words
Abrasive particles which have an average particle size of 2 µm or less, each of which comprises (a) at least one oxide selected from aluminum oxide and silicon oxide and (b) cerium in the form of cerium oxide, the amount of cerium in each particle being from 5 to 25 parts by weight per 100 parts by weight of aluminum oxide and silicon oxide.
Claim 2
Dependent Claim
21 words
Abrasive particles according to claim 1, which have a BET specific surface area of from 40 to 150 m 2 /g.
Claim 3
Dependent Claim
15 words
Abrasive particles according to claim 1 or 2, wherein the oxide (a) is transition alumina.
Claim 4
Dependent Claim
23 words
Abrasive particles according to any one of claims 1 to 3, wherein the content of Na and K is 50 ppm or less.
Claim 5
Independent Claim
214 words
A method for producing abrasive particles, which comprises suspending in a solvent at least one compound selected from aluminum oxide having an average particle size of 2 µm or less in an amount of 100 parts by weight, silicon oxide having an average particle size of 2 µm or less in an amount of 100 parts by weight, and a precursor of aluminum or silicon oxide which is able to be converted by calcining to aluminum oxide or silicon oxide having an average particle size of 2 µm or less in an amount of 100 parts by weight, to form a suspension; mixing into the suspension a cerium compound in an amount of 5 to 25 parts by weight in terms of cerium, wherein the cerium compound is able to be converted to cerium oxide by calcining, to form a mixture; drying the mixture; and calcining the dried mixture to obtain abrasive particles having an average particle size of 2 µm or less, each of which comprises (a) at least one oxide selected from aluminum oxide and silicon oxide and (b) cerium in the form of cerium oxide, the amount of cerium in each particle being from 5 to 25 parts by weight per 100 parts by weight of aluminum oxide and silicon oxide.
Claim 6
Dependent Claim
36 words
A method according to claim 5, wherein the cerium compound is at least one compound selected from cerium nitrate, cerium acetate, cerium sulfate, cerium chloride, cerium oxalate, cerium carbonate, ammonium cerium sulfate and ammonium cerium nitrate.
Claim 7
Dependent Claim
20 words
A method according to claim 5 or 6, wherein aluminum oxide is obtained by hydrolysis of an organic aluminum compound.
Claim 8
Dependent Claim
25 words
A method according to claim 5 or 6, wherein the precursor of aluminum oxide is aluminum hydroxide obtained by hydrolysis of an organic aluminum compound.
Claim 9
Dependent Claim
17 words
A method according to claim 7 or 8, wherein the organic aluminum compound is an aluminum alkoxide.
Claim 10
Independent Claim
27 words
A method according to any one of claims 5 to 9, wherein the drying step is carried out using a flash drier or a pneumatic conveying drier.
Claim 11
Dependent Claim
74 words
Use of abrasive particles having an average particle size of 2 µm or less, each of which comprises (a) at least one oxide selected from aluminum oxide and silicon oxide and (b) cerium in the form of cerium oxide, the amount of cerium in each particle being from 5 to 25 parts by weight per 100 parts by weight of aluminum oxide and silicon oxide, for planarizing an insulating film on a semiconductor substrate.
References Cited (Backward Citations)
DE1519396A1
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DE2737358A1
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US5114437A
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JPH059463A
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WO1993022103A1
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WO1994007970A1
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