US5692873A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for holding a piece of semiconductor
Assignee: NXP USA Inc
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Filing: 1996-09-04
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Granted: 1997-12-02
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Expires: 2016-09-04
Abstract
Abstract An apparatus for and method of holding a semiconductor wafer (11) during a manufacturing process supports the semiconductor wafer (11) in a substantially planar form (15) with a two-platform wafer chuck (19). The two-platform wafer chuck (19) is compatible with handling warped and unwarped wafers, wafer transferring and handling techniques which maintain wafer flatness, and semiconductor manufacturing processes such as photolithography and auto-probing which require semiconductor wafers to be held in a flat configuration.
Inventors
- 👤 Anthony R. Weeks
- 👤 Todd R. Beasley
- 👤 Craig D. Gordy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/141
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
192 words
An apparatus for holding a piece of semiconductor during a manufacturing process, the apparatus comprising: a first wafer platform to support, in a substantially planar form, a first area on a side of the piece of semiconductor; a stage coupled to the first wafer platform to support the first wafer platform; a second wafer platform to substantially maintain the substantially planar form of the piece of semiconductor whereby the second wafer platform supports a second area on the side of the piece of semiconductor while the first wafer platform supports the first area of the piece of semiconductor, and whereby the first wafer platform and the second wafer platform support the piece of semiconductor during the manufacturing process; and a guide connected to the first and second wafer platforms wherein the guide maintains a fixed relative orientation between the first and second wafer platforms while the first and second wafer platforms both support the piece of semiconductor and wherein the guide does not maintain the fixed relative orientation between the first and second wafer platforms while only the first wafer platform or only the second wafer platform supports the piece of semiconductor.
Claim 2
Independent Claim
192 words
An apparatus for holding a piece of semiconductor during a manufacturing process, the apparatus comprising: a first wafer platform to support, in a substantially planar form, a first area on a side of the piece of semiconductor; a stage coupled to the first wafer platform to support the first wafer platform; a second wafer platform to substantially maintain the substantially planar form of the piece of semiconductor whereby the second wafer platform supports a second area on the side of the piece of semiconductor while the first wafer platform supports the first area of the piece of semiconductor, and whereby the first wafer platform and the second wafer platform support the piece of semiconductor during the manufacturing process; and a guide connected to the first and second wafer platforms wherein the guide maintains a fixed relative orientation between the first and second wafer platforms while the first and second wafer platforms both support the piece of semiconductor and wherein the guide does not maintain the fixed relative orientation between the first and second wafer platforms while only the first wafer platform or only the second wafer platform supports the piece of semiconductor.
Claim 3
Dependent Claim
36 words
The apparatus of claim 1, further comprising a moving device adjacent to the second wafer platform to transport the second wafer platform toward and away from the piece of semiconductor supported by the first wafer platform.
Claim 4
Dependent Claim
16 words
The apparatus of claim 1 wherein the first and second wafer platforms are concentric plate-like objects.
Claim 5
Dependent Claim
17 words
The apparatus of claim 3 wherein the second wafer platform is larger than the first wafer platform.
Claim 6
Dependent Claim
37 words
The apparatus of claim 1 further comprising a first vacuum device connected to the first wafer platform whereby the first vacuum device forces the piece of semiconductor in the substantially planar form against the first wafer platform.
Claim 7
Dependent Claim
37 words
The apparatus of claim 5 further comprising a second vacuum device connected to the second wafer platform whereby the second vacuum device forces the piece of semiconductor in the substantially planar form against the second wafer platform.
Claim 8
Independent Claim
69 words
An apparatus for holding a piece of semiconductor, the apparatus comprising: a first platform having a protrusion, the first platform supporting a portion of the piece of semiconductor; and a second platform having a surface to support a different portion of the piece of semiconductor wherein the surface has a recess and a notch, the recess shaped to contain the first platform, the notch shaped to contain the protrusion.
Claim 9
Independent Claim
69 words
An apparatus for holding a piece of semiconductor, the apparatus comprising: a first platform having a protrusion, the first platform supporting a portion of the piece of semiconductor; and a second platform having a surface to support a different portion of the piece of semiconductor wherein the surface has a recess and a notch, the recess shaped to contain the first platform, the notch shaped to contain the protrusion.
Claim 10
Dependent Claim
15 words
The apparatus according to claim 7, wherein the notch and the protrusion are complementarily shaped.
Claim 11
Dependent Claim
16 words
The apparatus according to claim 7, wherein the recess and the first platform are complementarily shaped.
Claim 12
Dependent Claim
77 words
The apparatus according to claim 7, further comprising: a stage having a slot, the stage supporting the first platform; and a pin coupled to the second platform and partially located in the slot, wherein the pin and the slot maintain a first relative orientation between the second platform and the stage and wherein the notch and the protrusion maintain a relative orientation between the first and second platforms when the first platform is seated in the recess.
Claim 13
Dependent Claim
16 words
The apparatus according to claim 7 wherein the first and second platforms are concentric plate-like objects.
Claim 14
Dependent Claim
14 words
The apparatus according to claim 7, wherein the recess is connected to the notch.
Claim 15
Dependent Claim
24 words
The apparatus according to claim 7, further comprising a first attraction device, wherein the recess has a hole coupled to the first attraction device.
Claim 16
Dependent Claim
58 words
The apparatus according to claim 13, further comprising: a second attraction device, wherein the first platform has a first surface to support the portion of the piece of semiconductor, the first surface having a hole coupled to the second attraction device; and wherein the surface of the second platform has a hole coupled to the first attraction device.
Claim 17
Dependent Claim
35 words
The apparatus according to claim 14, wherein the first surface and the surface of the second platform form a substantially planar surface when the first platform is seated in the recess of the second platform.
Claim 18
Independent Claim
53 words
An apparatus for holding a piece of semiconductor, the apparatus comprising: a first platform having a first surface, the first surface having a recess, the recess having a hole; a second platform having a second surface, the second platform configured to fit in the recess; and an attraction device coupled to the hole.
Claim 19
Independent Claim
53 words
An apparatus for holding a piece of semiconductor, the apparatus comprising: a first platform having a first surface, the first surface having a recess, the recess having a hole; a second platform having a second surface, the second platform configured to fit in the recess; and an attraction device coupled to the hole.
Claim 20
Dependent Claim
25 words
The apparatus according to claim 16, wherein the first and second surfaces form a substantially planar surface when the second platform is in the recess.
Claim 21
Dependent Claim
30 words
The apparatus according to claim 16, further comprising: a pin coupled to the first platform; and a stage supporting the second platform, the stage having a slot containing the pin.
Claim 22
Dependent Claim
28 words
The apparatus according to claim 16, further comprising a guide coupled to the first and second platforms to maintain a relative orientation between the first and second platforms.
Claim 23
Dependent Claim
36 words
The apparatus according to claim 19, wherein the first platform has a notch, wherein the second platform has a protrusion configured to fit in the notch, and wherein the notch and the protrusion form the guide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-01 | 2001-06-02 | 2001-12-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-01 | 2005-06-02 | 2005-12-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-01 | 2009-06-02 | 2009-12-02 | $7700.00 | Window Closed / Lapsed |