System for locating probe tips on an integrated circuit probe card and method therefor

Claim 1

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the location of its tip (70) measured with respect to said plane, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing said measured location of the plane that each of said plurality of tips is found in, means (520, 530) for measuring the X, Y position of at least one probe tip, said measuring means including: an insulating substrate (710), a resistive film (720) deposited on said insulating substrate in a predetermined pattern, conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip; means (M x , M y , M z ) for moving said measuring means, and means (500) connected to said moving means and to said first and second storing means for activating said moving means to move said measuring means until said at least one of said plurality of probe tips at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means engages said measuring means, said measuring means determining the measured X, Y positions of said at least one of said plurality of probe tips when engaged.

Claim 2

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the location of its tip (70) measured with respect to said plane, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing said measured location of the plane that each of said plurality of tips is found in, means (520, 530) for measuring the X, Y position of at least one probe tip, said measuring means including: an insulating substrate (710), a resistive film (720) deposited on said insulating substrate in a predetermined pattern, conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip; means (M x , M y , M z ) for moving said measuring means, and means (500) connected to said moving means and to said first and second storing means for activating said moving means to move said measuring means until said at least one of said plurality of probe tips at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means engages said measuring means, said measuring means determining the measured X, Y positions of said at least one of said plurality of probe tips when engaged.

Claim 5

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing the measured location of the plane that each of said plurality of tips is found in, a sensor (520, 530) for measuring the X, Y position of at least one probe tip, said sensor comprising: an insulating substrate (710), a resistive film (720) deposited on said insulating substrate in a predetermined pattern, conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip; means (M x , M y , M z ) for moving said sensor, a computer (500) connected to said moving means and to said first and second storing means for activating said moving means to move said sensor under said at least one of said plurality of probe tips at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said computer being connected to said sensor for receiving the measured X, Y positions of said at least one of said plurality of probe tips, a monitor, and said computer being connected to said monitor (580) for producing a first display (582) showing which of said plurality of probe tips had a measured X, Y position exceeding said assigned X, Y position by a predetermined window (160) thereby indicating all probe tips which need adjustment, said computer producing a second display (584) indicating both said measured plane location from said second storing means and said measured X, Y position of a selected one of said probe tips which need adjustment.

Claim 6

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing the measured location of the plane that each of said plurality of tips is found in, a sensor (520, 530) for measuring the X, Y position of at least one probe tip, said sensor comprising: an insulating substrate (710), a resistive film (720) deposited on said insulating substrate in a predetermined pattern, conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip; means (M x , M y , M z ) for moving said sensor, a computer (500) connected to said moving means and to said first and second storing means for activating said moving means to move said sensor under said at least one of said plurality of probe tips at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said computer being connected to said sensor for receiving the measured X, Y positions of said at least one of said plurality of probe tips, a monitor, and said computer being connected to said monitor (580) for producing a first display (582) showing which of said plurality of probe tips had a measured X, Y position exceeding said assigned X, Y position by a predetermined window (160) thereby indicating all probe tips which need adjustment, said computer producing a second display (584) indicating both said measured plane location from said second storing means and said measured X, Y position of a selected one of said probe tips which need adjustment.

Claim 9

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip from said probe card, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing the measured location of the plane that each of said plurality of tips is found in, a sensor (520, 530) for measuring the X, Y position of said probe tips, said sensor comprises: an insulating substrate (710), a resistive film (720) deposited on said insulating substrate in a predetermined pattern, conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip; means (M x , M y , M z ) for moving said sensor, a computer (500) connected to said moving means and to said first and second storing means for activating said moving means to move said sensor under said probe tips at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said computer being connected to said sensor for receiving the measured X, Y positions of said probe tips, a monitor, and said computer being connected to said monitor (580) for producing a display (582) showing which of said plurality of probe tips had a measured X, Y position exceeding said assigned X, Y position by a predetermined window (160) thereby indicating all probe tips which need adjustment.

Claim 10

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip from said probe card, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing the measured location of the plane that each of said plurality of tips is found in, a sensor (520, 530) for measuring the X, Y position of said probe tips, said sensor comprises: an insulating substrate (710), a resistive film (720) deposited on said insulating substrate in a predetermined pattern, conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip; means (M x , M y , M z ) for moving said sensor, a computer (500) connected to said moving means and to said first and second storing means for activating said moving means to move said sensor under said probe tips at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said computer being connected to said sensor for receiving the measured X, Y positions of said probe tips, a monitor, and said computer being connected to said monitor (580) for producing a display (582) showing which of said plurality of probe tips had a measured X, Y position exceeding said assigned X, Y position by a predetermined window (160) thereby indicating all probe tips which need adjustment.

Claim 11

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the location of its tip (70) measured with respect to said plane, said system comprising: means (520, 530) for measuring the X, Y position of each said probe tip, said measuring means comprising: (a) an insulating substrate (710), (b) a resistive film (720) deposited on said insulating substrate in a predetermined pattern, (c) conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, (d) a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by each said probe tip, (e) a voltage source (1030) for generating a predetermined voltage, (f) means (T x1 , T x2 , T y1 , T y2 ) connected to said voltage source and to said conductive pads for selectively applying said predetermined voltage to said X direction conductive path and to said Y direction conductive path, (g) means (1000) for selectively contacting each said probe tip when each said probe tip engages said resistive film in said measurement area, (h) means (1010) connected to said contacting means for sensing the voltage from each said probe tip, means (M x , M y , M z ) for moving said measuring means, and means (500) connected to said moving means and to said first and second storing means for activating said moving means to move said measuring means into said engagement with each said probe tip at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said measuring means determining the measured X, Y positions of each said probe tip when engaged.

Claim 12

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the location of its tip (70) measured with respect to said plane, said system comprising: means (520, 530) for measuring the X, Y position of each said probe tip, said measuring means comprising: (a) an insulating substrate (710), (b) a resistive film (720) deposited on said insulating substrate in a predetermined pattern, (c) conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, (d) a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by each said probe tip, (e) a voltage source (1030) for generating a predetermined voltage, (f) means (T x1 , T x2 , T y1 , T y2 ) connected to said voltage source and to said conductive pads for selectively applying said predetermined voltage to said X direction conductive path and to said Y direction conductive path, (g) means (1000) for selectively contacting each said probe tip when each said probe tip engages said resistive film in said measurement area, (h) means (1010) connected to said contacting means for sensing the voltage from each said probe tip, means (M x , M y , M z ) for moving said measuring means, and means (500) connected to said moving means and to said first and second storing means for activating said moving means to move said measuring means into said engagement with each said probe tip at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said measuring means determining the measured X, Y positions of each said probe tip when engaged.

Claim 13

A method for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each of said plurality of probes having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said method comprising the steps of: holding the probe card in a fixed position, determining the location of the plane in which each probe tip exists; moving a sensor to a predetermined location under each probe tip to engage the probe tip, said predetermined location being the assigned X, Y position and the measured location of the plane, measuring the actual location of each probe tip as the probe tip engages the sensor at the predetermined location, displaying the identity of all probes whose tips have a measured location exceeding, by a predetermined window, the assigned X, Y position for the tip, thereby indicating which tips require adjustment, selecting one tip requiring adjustment in response to said step of displaying, and displaying the measured position of the selected probe tip in relation to the predetermined window of the assigned X, Y position for the selected tip thereby indicating in which X, Y direction the selected tip is to be adjusted.

Claim 14

A method for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each of said plurality of probes having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said method comprising the steps of: holding the probe card in a fixed position, determining the location of the plane in which each probe tip exists; moving a sensor to a predetermined location under each probe tip to engage the probe tip, said predetermined location being the assigned X, Y position and the measured location of the plane, measuring the actual location of each probe tip as the probe tip engages the sensor at the predetermined location, displaying the identity of all probes whose tips have a measured location exceeding, by a predetermined window, the assigned X, Y position for the tip, thereby indicating which tips require adjustment, selecting one tip requiring adjustment in response to said step of displaying, and displaying the measured position of the selected probe tip in relation to the predetermined window of the assigned X, Y position for the selected tip thereby indicating in which X, Y direction the selected tip is to be adjusted.

Claim 16

A method for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each of said plurality of probes having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said method comprising the steps of: holding the probe card in a fixed position, moving a sensor to a predetermined location under each probe tip to engage the probe tip, said predetermined location being the assigned X, Y position, measuring the actual location of each probe tip as the probe tip engages the sensor at the predetermined location, displaying the identity of all probes whose tips have a measured location exceeding, by a predetermined window, the assigned X, Y position for the tip, thereby indicating which tips require adjustment, selecting one tip requiring adjustment in response to said step of displaying, and displaying the measured position of the selected probe tip in relation to the predetermined window of the assigned X, Y position for the selected tip thereby indicating in which X, Y direction the selected tip is to be adjusted.

Claim 17

A method for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each of said plurality of probes having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said method comprising the steps of: holding the probe card in a fixed position, moving a sensor to a predetermined location under each probe tip to engage the probe tip, said predetermined location being the assigned X, Y position, measuring the actual location of each probe tip as the probe tip engages the sensor at the predetermined location, displaying the identity of all probes whose tips have a measured location exceeding, by a predetermined window, the assigned X, Y position for the tip, thereby indicating which tips require adjustment, selecting one tip requiring adjustment in response to said step of displaying, and displaying the measured position of the selected probe tip in relation to the predetermined window of the assigned X, Y position for the selected tip thereby indicating in which X, Y direction the selected tip is to be adjusted.

Claim 19

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the location of its tip (70) measured with respect to said plane, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing said measured location of the plane that each of said plurality of tips is found in, means (520, 530) for selectively measuring the X, Y position of a discrete probe tip, said measuring means comprises: (a) an insulating substrate (710), (b) a resistive film (720) deposited on said insulating substrate in a predetermined pattern, (c) conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path Y1-Y2) through said resistive film, and (d) a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (76) for the selective engagement by one probe tip, means (M x , M y , M z ) for moving said measuring means, means (500) connected to said moving means and to said first and second storing means for activating said moving means to move said measuring means until said discrete probe tip at said measured plane locations from said second storing means and at the assigned X, Y positions from said first sorting means engages said measuring means, said measuring means determining the measured X, Y positions of said discrete probe tip when engaged.

Claim 20

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the location of its tip (70) measured with respect to said plane, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing said measured location of the plane that each of said plurality of tips is found in, means (520, 530) for selectively measuring the X, Y position of a discrete probe tip, said measuring means comprises: (a) an insulating substrate (710), (b) a resistive film (720) deposited on said insulating substrate in a predetermined pattern, (c) conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path Y1-Y2) through said resistive film, and (d) a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (76) for the selective engagement by one probe tip, means (M x , M y , M z ) for moving said measuring means, means (500) connected to said moving means and to said first and second storing means for activating said moving means to move said measuring means until said discrete probe tip at said measured plane locations from said second storing means and at the assigned X, Y positions from said first sorting means engages said measuring means, said measuring means determining the measured X, Y positions of said discrete probe tip when engaged.

Claim 23

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing the measured location of the plane that each of said plurality of tips is found in, a second (520, 530) for selectively measuring the X, Y position of a discrete probe tip, wherein said sensor comprises (a) an insulating substrate (710), (b) a resistive film (720) deposited on said insulating substrate in a predetermined pattern, (c) conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and (d) a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip, means (M x , M y , M z ) for moving said sensor, a computer (500) connected to said moving means and to said first and second storing means for activating said moving means to move said sensor under said discrete probe tip at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said computer being connected to said sensor for receiving the measured X, Y position of said discrete probe tip, a monitor, and said computer being connected to said monitor (580) for producing a first display (582) showing which of said plurality of probe tips had a measured X, Y position exceeding said assigned X, Y position by a predetermined window (160) thereby indicating all probe tips which need adjustment, said computer producing a second display (584) indicating both said measured plane location from said second storing means and said measured X, Y position of a selected one of said probe tips which need adjustment.

Claim 24

A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing the measured location of the plane that each of said plurality of tips is found in, a second (520, 530) for selectively measuring the X, Y position of a discrete probe tip, wherein said sensor comprises (a) an insulating substrate (710), (b) a resistive film (720) deposited on said insulating substrate in a predetermined pattern, (c) conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and (d) a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip, means (M x , M y , M z ) for moving said sensor, a computer (500) connected to said moving means and to said first and second storing means for activating said moving means to move said sensor under said discrete probe tip at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means, said computer being connected to said sensor for receiving the measured X, Y position of said discrete probe tip, a monitor, and said computer being connected to said monitor (580) for producing a first display (582) showing which of said plurality of probe tips had a measured X, Y position exceeding said assigned X, Y position by a predetermined window (160) thereby indicating all probe tips which need adjustment, said computer producing a second display (584) indicating both said measured plane location from said second storing means and said measured X, Y position of a selected one of said probe tips which need adjustment.