US5685968A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ceramic substrate with thin-film capacitor and method of producing the same
Assignee: Niterra Co Ltd
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Filing: 1995-10-11
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Granted: 1997-11-11
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Expires: 2015-10-11
Abstract
Abstract In a ceramic substrate with a thin-film capacitor, having a ceramic substrate a lower electrode layer formed on the ceramic substrate, a dielectric layer formed on the lower electrode layer and made of an oxide of a material constituting the lower electrode layer, and an upper electrode layer formed on the dielectric layer, a plating layer is provided between the ceramic base and the lower electrode layer to serve as a basis for the lower electrode layer.
Inventors
- 👤 Toshitaka Hayakawa
- 👤 Shinobu Yoshida
- 👤 Toshikatsu Takada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:05
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/33; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K1/16; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
73 words
A ceramic substrate with a thin-film capacitor, comprising: a ceramic substrate; a lower electrode base layer which is a metallic electroplating or electroless plating layer, formed on said ceramic substrate; a lower electrode layer formed on said lower electrode base layer; a dielectric layer formed on said lower electrode layer and made of an oxide of a material constituting said lower electrode layer; and an upper electrode layer formed on said dielectric layer.
Claim 2
Dependent Claim
73 words
A ceramic substrate with a thin-film capacitor, comprising: a ceramic substrate; a lower electrode base layer which is a metallic electroplating or electroless plating layer, formed on said ceramic substrate; a lower electrode layer formed on said lower electrode base layer; a dielectric layer formed on said lower electrode layer and made of an oxide of a material constituting said lower electrode layer; and an upper electrode layer formed on said dielectric layer.
Claim 3
Dependent Claim
26 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein said lower electrode base layer is made of a material consisting essentially of copper.
Claim 4
Dependent Claim
26 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein said lower electrode base layer is made of a material consisting essentially of nickel.
Claim 5
Dependent Claim
41 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein said lower electrode base layer includes a layer section made of a material consisting essentially of copper and a layer section made of a material consisting essentially of nickel.
Claim 6
Dependent Claim
34 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein said lower electrode layer is made of one or more of metals selected from the group consisting of tantalum, titanium and aluminum.
Claim 7
Dependent Claim
30 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein said lower electrode layer is made of tantalum nitride and said dielectric layer is made of tantalum oxynitride.
Claim 8
Dependent Claim
33 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein the lower electrode base layer is made of a material comprising nickel and one or more of cobalt, phosphorus, and boron.
Claim 9
Dependent Claim
22 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein the lower electrode base layer comprises a surface smoothing agent.
Claim 10
Dependent Claim
25 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein the lower electrode base layer has a thickness of at least 1 μm.
Claim 11
Dependent Claim
43 words
A ceramic substrate with a thin-film capacitor according to claim 1, further comprising one or more of a connecting layer between the dielectric layer and the upper electrode layer or a connecting layer between the ceramic substrate and the lower electrode base layer.
Claim 12
Dependent Claim
15 words
A ceramic substrate with a thin-film capacitor according to claim 1, further comprising a resistor.
Claim 13
Dependent Claim
23 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein the lower electrode base layer is plated by an electroplating process.
Claim 14
Dependent Claim
24 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein the lower electrode base layer is plated by an electroless plating process.
Claim 15
Dependent Claim
17 words
A ceramic substrate with a thin-film capacitor according to claim 1, wherein the ceramic substrate is unglazed.
Claim 16
Independent Claim
82 words
A method of producing a ceramic substrate with a thin-film capacitor, comprising the steps of: forming by metallic electroplating or electroless plating a lower electrode base layer on a ceramic substrate; forming a thin-film on said lower electrode base layer; processing a surface portion of said thin-film by an oxidizing process to form a dielectric layer whilst allowing a remaining portion of said thin-film to be formed into a lower electrode layer; and forming an upper electrode layer on said dielectric layer.
Claim 17
Independent Claim
82 words
A method of producing a ceramic substrate with a thin-film capacitor, comprising the steps of: forming by metallic electroplating or electroless plating a lower electrode base layer on a ceramic substrate; forming a thin-film on said lower electrode base layer; processing a surface portion of said thin-film by an oxidizing process to form a dielectric layer whilst allowing a remaining portion of said thin-film to be formed into a lower electrode layer; and forming an upper electrode layer on said dielectric layer.
Claim 18
Dependent Claim
22 words
A method of producing a ceramic substrate with a thin-film capacitor according to claim 15, wherein said metallic plating is copper plating.
Claim 19
Dependent Claim
22 words
A method of producing a ceramic substrate with a thin-film capacitor according to claim 15, wherein said metallic plating is nickel plating.
Claim 20
Dependent Claim
27 words
A method of producing a ceramic substrate with a thin-film capacitor according to claim 15, wherein said metallic plating includes copper plating, and nickel plating performed thereafter.
Claim 21
Dependent Claim
24 words
A method of producing a ceramic substrate with a thin-film capacitor according to claim 15, wherein said oxidizing process is an anode forming process.
Claim 22
Dependent Claim
64 words
A ceramic substrate with a thin-film capacitor comprising: a ceramic substrate; a lower electrode base layer which is a metallic electroplating or electroless plating layer, formed on said ceramic substrate; a lower electrode layer formed on said lower electrode base layer; said lower electrode layer having an oxidized surface section constituting a dielectric layer; and an upper electrode layer formed on said dielectric layer.
Claim 23
Dependent Claim
64 words
A ceramic substrate with a thin-film capacitor comprising: a ceramic substrate; a lower electrode base layer which is a metallic electroplating or electroless plating layer, formed on said ceramic substrate; a lower electrode layer formed on said lower electrode base layer; said lower electrode layer having an oxidized surface section constituting a dielectric layer; and an upper electrode layer formed on said dielectric layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-10 | 2001-05-12 | 2001-11-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-10 | 2005-05-12 | 2005-11-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-10 | 2009-05-12 | 2009-11-11 | $7700.00 | Window Closed / Lapsed |