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US5685906A
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US
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Method and apparatus for configuring an epitaxial reactor for reduced set-up time and improved layer quality
Assignee: SEH America Inc
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Filing: 1995-03-23
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Granted: 1997-11-11
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Expires: 2015-03-23
Abstract
Abstract A set (10) of susceptors (12) having essentially equal outer diameters (14) and different depression diameters (20) is used in a horizontal flow semiconductor epitaxial reactor. The susceptors receiving smaller diameter wafers (24) have an increased surface area (84) that preheats the process gases and leads to reduced resistivity variation in the epitaxial layers. The susceptors fit interchangeably onto a susceptor support (32) and into a susceptor ring (38), thereby allowing wafers of different diameters to be processed by changing only the susceptor and not the susceptor support, the susceptor ring, and other associated hardware. Set-up time is greatly reduced, thereby allowing more flexibility in scheduling wafers to be processed and improving reactor utilization. Inventory of reactor components can be reduced because it is no longer necessary to stock susceptor rings and other hardware for wafers of different diameters.
Inventors
- 👤 Gerald R. Dietze
- 👤 Erik D. Holman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:51
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/12; Y; Y10; Y10S; Y10S117/00; Y10S117/914
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
190 words
A method of improving epitaxial layer quality by promoting heat transfer from a susceptor to a process gas in an epitaxial reactor, the method comprising: providing a set of susceptors; supporting a substrate on a susceptor that is one of said set of susceptors, each susceptor of the set including an outer edge having an outer diameter which is essentially equal to that of other susceptors of the set and having a depression with a lesser diameter than that of the susceptor and with such lesser diameter differently from such diameter in another susceptor to accommodate substrates, the annular surface between the depression and the outer edge of the susceptor defining a heat transfer surface, the area of which depends upon the depression diameter of the susceptor, the heat transfer surface defined by the largest depression diameter of the set defining a minimum heat transfer surface area; heating the susceptor; passing the process gas over the susceptor and substrate, so that heat is transferred to the process gas as it flows over a heat transfer region having an area at least as large as the minimum heat transfer surface area.
Claim 2
Independent Claim
190 words
A method of improving epitaxial layer quality by promoting heat transfer from a susceptor to a process gas in an epitaxial reactor, the method comprising: providing a set of susceptors; supporting a substrate on a susceptor that is one of said set of susceptors, each susceptor of the set including an outer edge having an outer diameter which is essentially equal to that of other susceptors of the set and having a depression with a lesser diameter than that of the susceptor and with such lesser diameter differently from such diameter in another susceptor to accommodate substrates, the annular surface between the depression and the outer edge of the susceptor defining a heat transfer surface, the area of which depends upon the depression diameter of the susceptor, the heat transfer surface defined by the largest depression diameter of the set defining a minimum heat transfer surface area; heating the susceptor; passing the process gas over the susceptor and substrate, so that heat is transferred to the process gas as it flows over a heat transfer region having an area at least as large as the minimum heat transfer surface area.
Claim 3
Dependent Claim
14 words
The method of claim 1 in which the reactor is of the single-wafer type.
Claim 4
Dependent Claim
18 words
The method of claim 1 in which the reactor is of the horizontal flow, single-wafer, atmospheric pressure type.
Claim 5
Dependent Claim
17 words
The method of claim 1 in which the largest depression diameter accommodates a 200 mm semiconductor wafer.
Claim 6
Dependent Claim
17 words
The method of claim 1 in which the largest depression diameter accommodates a 300 mm semiconductor wafer.
Claim 7
Independent Claim
59 words
A method for configuring a semiconductor epitaxial deposition reactor to process wafers of a specific diameter, comprising: removing a flat susceptor having an outer diameter and a first depression diameter; and inserting a second flat susceptor having an outer diameter essentially equal to that of the first susceptor but a second depression diameter different from the first depression diameter.
Claim 8
Independent Claim
59 words
A method for configuring a semiconductor epitaxial deposition reactor to process wafers of a specific diameter, comprising: removing a flat susceptor having an outer diameter and a first depression diameter; and inserting a second flat susceptor having an outer diameter essentially equal to that of the first susceptor but a second depression diameter different from the first depression diameter.
Claim 9
Dependent Claim
15 words
The method of claim 6 in which the reactor is of the horizontal flow type.
Claim 10
Dependent Claim
14 words
The method of claim 6 in which the reactor is of the single-wafer type.
Claim 11
Dependent Claim
16 words
The method of claim 6 in which the reactor is of the horizontal flow, single-wafer type.
Claim 12
Dependent Claim
78 words
A set of susceptors, each having an outer diameter and depression diameter, for use in a semiconductor wafer epitaxial reactor, the set comprising plural susceptors having essentially equal outer diameters and unequal depression diameters, the outer diameter being of a size that allows susceptors in the set to fit interchangeably on a susceptor support within a process chamber of the reactor and the unequal depression diameters allowing different susceptors in the set to accommodate wafers of different diameters.
Claim 13
Dependent Claim
78 words
A set of susceptors, each having an outer diameter and depression diameter, for use in a semiconductor wafer epitaxial reactor, the set comprising plural susceptors having essentially equal outer diameters and unequal depression diameters, the outer diameter being of a size that allows susceptors in the set to fit interchangeably on a susceptor support within a process chamber of the reactor and the unequal depression diameters allowing different susceptors in the set to accommodate wafers of different diameters.
Claim 14
Dependent Claim
23 words
The set of susceptors of claim 10 in which different susceptors of the set have depression diameters of 150 mm and 200 mm.
Claim 15
Dependent Claim
23 words
The set of susceptors of claim 10 in which different susceptors of the set have depression diameters of 200 mm and 300 mm.
Claim 16
Dependent Claim
21 words
The set of susceptors of claim 10 in which the susceptors are adapted to fit in a horizontal flow, single-wafer reactor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-10 | 2001-05-12 | 2001-11-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-10 | 2005-05-12 | 2005-11-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-10 | 2009-05-12 | 2009-11-11 | $7700.00 | Window Closed / Lapsed |