US4099041A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Susceptor for heating semiconductor substrates
Assignee: RCA Corp
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Filing: 1977-04-11
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Granted: 1978-07-04
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Expires: 1997-04-11
Abstract
Abstract An integral graphite susceptor of the type comprising a hollow polyhedron, adapted to support a semiconductor substrate on an outer planar surface of a wall thereof, has a recessed cavity adjacent the inner surface of the wall and shaped so that the floor of the cavity is parallel to the outer planar surface. The cavity may comprise an oblong-shaped slot machined into the wall of the susceptor, which is typically a hollow truncated pyramid.
Inventors
- 👤 Samuel Berkman
- 👤 Donald Bertram Irish
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 19:08
CPC Classifications
H; H05; H05B; H05B6/00; H05B6/02; H05B6/10; H05B6/105
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
62 words
In a susceptor of the type comprising a hollow polyhedron adapted to support a substrate on an outer planar surface of a wall thereof, said wall having corner portions thereof thicker than the central portions thereof, the improvement comprising said wall having a recessed cavity adjacent the inner surface thereof, said cavity having the floor thereof parallel to said outer planar surface.
Claim 2
Dependent Claim
62 words
In a susceptor of the type comprising a hollow polyhedron adapted to support a substrate on an outer planar surface of a wall thereof, said wall having corner portions thereof thicker than the central portions thereof, the improvement comprising said wall having a recessed cavity adjacent the inner surface thereof, said cavity having the floor thereof parallel to said outer planar surface.
Claim 3
Dependent Claim
14 words
A susceptor as defined in claim 1 wherein said susceptor is a truncated pyramid.
Claim 4
Dependent Claim
18 words
A susceptor as defined in claim 2 wherein said cavity comprises an oblong-shaped slot machined into said wall.
Claim 5
Dependent Claim
18 words
A susceptor as defined in claim 2 wherein said cavity comprises a circular recess machined into said wall.
Claim 6
Dependent Claim
29 words
A susceptor as defined in claim 1 wherein the width of said planar surface is approximately equal to the diameter of the substrate to be supported by said susceptor.
Claim 7
Dependent Claim
17 words
A susceptor as defined in claim 1 wherein said susceptor comprises an integral piece of conventional graphite.
Claim 8
Dependent Claim
39 words
A susceptor as defined in claim 6 wherein a heat shield of pyrolytic graphite is disposed within said cavity, said heat shield having a lower heat conductivity than that of said wall along a direction transverse to said wall.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-07-03 | 1982-01-02 | 1982-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-07-03 | 1986-01-02 | 1986-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-07-03 | 1990-01-02 | 1990-07-04 | $7700.00 | Window Closed / Lapsed |