US5677547A
Expired / Lapsed
US
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Thin film transistor and display device including same
Assignee: Seiko Epson Corp
•
Filing: 1995-06-05
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Granted: 1997-10-14
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Expires: 2015-06-05
Abstract
Abstract Improved thin film transistors resistant to static electricity induced line faults are provided. The thin film transistors formed in accordance with the invention are particularly well suited for use in an active matrix substrate for a liquid crystal display panel. The liquid crystal display panels include an additional layer formed between crossing source lines and gate lines to provide a higher breakdown voltage between the source lines and gate lines than at the gate insulating layer of the thin film transistors or at a display capacitor.
Inventors
- 👤 Toshimoto Kodaira
- 👤 Hiroyuki Oshima
- 👤 Toshihiko Mano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:46
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1345; G02F1/13454; G02F1/136; G02F1/1362; G02F1/136209; G02F1/136213; G02F1/1368; H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/6704; H10D30/6723; H10D30/6729; H10D30/6737; H10D30/674; H10D30/6741; H10D30/6743; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/65; G02F1/1335; G02F1/133509; G02F1/133512; G02F1/136227; G02F2202/00; G02F2202/10; G02F2202/104
Claims Analysis
Total Claims: 56
Claim 1
Independent Claim
159 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 2
Dependent Claim
159 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 3
Dependent Claim
22 words
The liquid crystal device of claim 1, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 4
Dependent Claim
54 words
The liquid crystal device of claim 1, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 5
Dependent Claim
27 words
The liquid crystal device of claim 1, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 6
Dependent Claim
16 words
The liquid crystal device of claim 1, wherein the plurality of layers include two non-conductive layers.
Claim 7
Dependent Claim
28 words
The liquid crystal device of claim 1, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 8
Dependent Claim
27 words
The liquid crystal device of claim 1, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 9
Dependent Claim
157 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 10
Dependent Claim
157 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 11
Dependent Claim
22 words
The liquid crystal device of claim 8, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 12
Dependent Claim
54 words
The liquid crystal device of claim 8, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 13
Dependent Claim
27 words
The liquid crystal device of claim 8, wherein one of the plurality of layers is at least one of a non-doped. semiconductor and an impurity-doped semiconductor film.
Claim 14
Dependent Claim
16 words
The liquid crystal device of claim 8, wherein the plurality of layers include two non-conductive layers.
Claim 15
Dependent Claim
28 words
The liquid crystal device of claim 8, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 16
Dependent Claim
27 words
The liquid crystal device of claim 8, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 17
Dependent Claim
145 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 18
Dependent Claim
145 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 19
Dependent Claim
21 words
The liquid crystal device of claim 15, wherein the source and gate lines are completely separated by the plurality of layers.
Claim 20
Dependent Claim
41 words
The liquid crystal device of claim 15, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors.
Claim 21
Dependent Claim
27 words
The liquid crystal device of claim 15, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 22
Dependent Claim
28 words
The liquid crystal device of claim 15, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 23
Dependent Claim
27 words
The liquid crystal device of claim 15, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 24
Dependent Claim
22 words
The liquid crystal device of claim 15, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 25
Dependent Claim
149 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 26
Dependent Claim
149 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 27
Dependent Claim
27 words
The liquid crystal device of claim 22, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 28
Dependent Claim
22 words
The liquid crystal device of claim 22, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 29
Dependent Claim
28 words
The liquid crystal device of claim 22, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 30
Dependent Claim
27 words
The liquid crystal device of claim 22, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 31
Dependent Claim
33 words
The liquid crystal device of claim 8, wherein the one of the plurality of layers at the cross-over locations being the insulating film extends from the cross-over locations to the plurality of capacitors.
Claim 32
Dependent Claim
158 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 33
Dependent Claim
158 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 34
Dependent Claim
22 words
The liquid crystal device of claim 28, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 35
Dependent Claim
54 words
The liquid crystal device of claim 28, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting, of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 36
Dependent Claim
27 words
The liquid crystal device of claim 28, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 37
Dependent Claim
16 words
The liquid crystal device of claim 28, wherein the plurality of layers include two non-conductive layers.
Claim 38
Dependent Claim
28 words
The liquid crystal device of claim 28, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 39
Dependent Claim
27 words
The liquid crystal device of claim 28, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 40
Dependent Claim
156 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 41
Dependent Claim
156 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 42
Dependent Claim
33 words
The liquid crystal device of claim 35, wherein the one of the plurality of layers at the cross-over locations being the insulating film extends from the cross-over locations to the plurality of capacitors.
Claim 43
Dependent Claim
22 words
The liquid crystal device of claim 35, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 44
Dependent Claim
54 words
The liquid crystal device of claim 35, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 45
Dependent Claim
27 words
The liquid crystal device of claim 35, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 46
Dependent Claim
16 words
The liquid crystal device of claim 35, wherein the plurality of layers include two non-conductive layers.
Claim 47
Dependent Claim
28 words
The liquid crystal device of claim 35, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 48
Dependent Claim
27 words
The liquid crystal device of claim 35, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 49
Dependent Claim
148 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers have non-coextensive edges near the cross-over locations.
Claim 50
Dependent Claim
148 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers have non-coextensive edges near the cross-over locations.
Claim 51
Dependent Claim
150 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers is the insulating film of the capacitors.
Claim 52
Dependent Claim
150 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers is the insulating film of the capacitors.
Claim 53
Dependent Claim
161 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.
Claim 54
Dependent Claim
161 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.
Claim 55
Dependent Claim
165 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.
Claim 56
Dependent Claim
165 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-10-13 | 2001-04-14 | 2001-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-13 | 2005-04-14 | 2005-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-13 | 2009-04-14 | 2009-10-14 | $7700.00 | Window Closed / Lapsed |