← Back to Patent Explorer
US5677547A Expired / Lapsed US ⏱️ 0.0 years remaining

Thin film transistor and display device including same

Assignee: Seiko Epson Corp
•
Filing: 1995-06-05
•
Granted: 1997-10-14
•
Expires: 2015-06-05
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract Improved thin film transistors resistant to static electricity induced line faults are provided. The thin film transistors formed in accordance with the invention are particularly well suited for use in an active matrix substrate for a liquid crystal display panel. The liquid crystal display panels include an additional layer formed between crossing source lines and gate lines to provide a higher breakdown voltage between the source lines and gate lines than at the gate insulating layer of the thin film transistors or at a display capacitor.

Inventors

  • 👤 Toshimoto Kodaira
  • 👤 Hiroyuki Oshima
  • 👤 Toshihiko Mano

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 21:46
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1345; G02F1/13454; G02F1/136; G02F1/1362; G02F1/136209; G02F1/136213; G02F1/1368; H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/6704; H10D30/6723; H10D30/6729; H10D30/6737; H10D30/674; H10D30/6741; H10D30/6743; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/65; G02F1/1335; G02F1/133509; G02F1/133512; G02F1/136227; G02F2202/00; G02F2202/10; G02F2202/104

Claims Analysis

Total Claims: 56
Claim 1
Independent Claim 159 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 2
Dependent Claim 159 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 3
Dependent Claim 22 words
The liquid crystal device of claim 1, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 4
Dependent Claim 54 words
The liquid crystal device of claim 1, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 5
Dependent Claim 27 words
The liquid crystal device of claim 1, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 6
Dependent Claim 16 words
The liquid crystal device of claim 1, wherein the plurality of layers include two non-conductive layers.
Claim 7
Dependent Claim 28 words
The liquid crystal device of claim 1, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 8
Dependent Claim 27 words
The liquid crystal device of claim 1, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 9
Dependent Claim 157 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 10
Dependent Claim 157 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of the insulating film of each of the capacitors.
Claim 11
Dependent Claim 22 words
The liquid crystal device of claim 8, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 12
Dependent Claim 54 words
The liquid crystal device of claim 8, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 13
Dependent Claim 27 words
The liquid crystal device of claim 8, wherein one of the plurality of layers is at least one of a non-doped. semiconductor and an impurity-doped semiconductor film.
Claim 14
Dependent Claim 16 words
The liquid crystal device of claim 8, wherein the plurality of layers include two non-conductive layers.
Claim 15
Dependent Claim 28 words
The liquid crystal device of claim 8, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 16
Dependent Claim 27 words
The liquid crystal device of claim 8, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 17
Dependent Claim 145 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 18
Dependent Claim 145 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 19
Dependent Claim 21 words
The liquid crystal device of claim 15, wherein the source and gate lines are completely separated by the plurality of layers.
Claim 20
Dependent Claim 41 words
The liquid crystal device of claim 15, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors.
Claim 21
Dependent Claim 27 words
The liquid crystal device of claim 15, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 22
Dependent Claim 28 words
The liquid crystal device of claim 15, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 23
Dependent Claim 27 words
The liquid crystal device of claim 15, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 24
Dependent Claim 22 words
The liquid crystal device of claim 15, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 25
Dependent Claim 149 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 26
Dependent Claim 149 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and the plurality of layers comprise two non-conductive layers.
Claim 27
Dependent Claim 27 words
The liquid crystal device of claim 22, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 28
Dependent Claim 22 words
The liquid crystal device of claim 22, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 29
Dependent Claim 28 words
The liquid crystal device of claim 22, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 30
Dependent Claim 27 words
The liquid crystal device of claim 22, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 31
Dependent Claim 33 words
The liquid crystal device of claim 8, wherein the one of the plurality of layers at the cross-over locations being the insulating film extends from the cross-over locations to the plurality of capacitors.
Claim 32
Dependent Claim 158 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 33
Dependent Claim 158 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the plurality of layers having non-coextensive edges near the cross-over locations; a plurality of switching elements coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film extending from the cross-over locations to the plurality of capacitors, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 34
Dependent Claim 22 words
The liquid crystal device of claim 28, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 35
Dependent Claim 54 words
The liquid crystal device of claim 28, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting, of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 36
Dependent Claim 27 words
The liquid crystal device of claim 28, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 37
Dependent Claim 16 words
The liquid crystal device of claim 28, wherein the plurality of layers include two non-conductive layers.
Claim 38
Dependent Claim 28 words
The liquid crystal device of claim 28, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 39
Dependent Claim 27 words
The liquid crystal device of claim 28, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 40
Dependent Claim 156 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 41
Dependent Claim 156 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations, the source and gate lines being completely separated by the plurality of layers; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors including an insulating film which functions as a dielectric material of the capacitors, one of the plurality of layers of the cross-over locations being the insulating film, wherein a total thickness of the plurality of layers at each of the cross-over locations is greater than a thickness of the insulating film of each of the capacitors.
Claim 42
Dependent Claim 33 words
The liquid crystal device of claim 35, wherein the one of the plurality of layers at the cross-over locations being the insulating film extends from the cross-over locations to the plurality of capacitors.
Claim 43
Dependent Claim 22 words
The liquid crystal device of claim 35, wherein one of the plurality of layers is one of polycrystalline silicon and amorphous silicon.
Claim 44
Dependent Claim 54 words
The liquid crystal device of claim 35, wherein one of the plurality of layers includes at least one non-conductive material selected from the group consisting of a film of SiN, a film of SiO 2 , a film of TaOx, a film formed by anodic oxidation of Cr, Ta, Mo, Al and alloys thereof.
Claim 45
Dependent Claim 27 words
The liquid crystal device of claim 35, wherein one of the plurality of layers is at least one of a non-doped semiconductor and an impurity-doped semiconductor film.
Claim 46
Dependent Claim 16 words
The liquid crystal device of claim 35, wherein the plurality of layers include two non-conductive layers.
Claim 47
Dependent Claim 28 words
The liquid crystal device of claim 35, wherein the insulating film of the capacitors includes at least one of a silicon nitride layer and a silicon oxide layer.
Claim 48
Dependent Claim 27 words
The liquid crystal device of claim 35, wherein the insulating film of the capacitors includes at least one of a TaOx layer and a silicon nitride layer.
Claim 49
Dependent Claim 148 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers have non-coextensive edges near the cross-over locations.
Claim 50
Dependent Claim 148 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and the plurality of layers have non-coextensive edges near the cross-over locations.
Claim 51
Dependent Claim 150 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers is the insulating film of the capacitors.
Claim 52
Dependent Claim 150 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers is the insulating film of the capacitors.
Claim 53
Dependent Claim 161 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.
Claim 54
Dependent Claim 161 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between each of the source lines and each of the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a breakdown voltage of the plurality of layers at each of the cross-over locations is greater than a breakdown voltage of each of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.
Claim 55
Dependent Claim 165 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.
Claim 56
Dependent Claim 165 words
A liquid crystal device, comprising: a pair of opposed and spaced apart insulating substrates; a plurality of source lines and a plurality of gate lines disposed on one of the substrates, the source lines intersecting the gate lines at cross-over locations; a plurality of layers located between the source lines and the gate lines at the cross-over locations; a plurality of switching elements arranged near the cross-over locations and coupled to the source lines and the gate lines; and a plurality of capacitors electrically coupled to the switching elements, each of the capacitors including an insulating film which functions as a dielectric material of the capacitors, wherein a total thickness of the plurality of layers located between the source lines and the gate lines at the cross-over locations is greater than a thickness of the insulating film of the capacitors and one of the plurality of layers at the cross-over locations is the insulating film extending from the cross-over locations to the plurality of capacitors.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2000-10-13 2001-04-14 2001-10-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2004-10-13 2005-04-14 2005-10-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2008-10-13 2009-04-14 2009-10-14 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag