Patent US5676866A successfully refreshed from Google Patents.
US5676866A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for laser machining with a plurality of beams
Assignee: Lambda Physik AG
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Filing: 1995-04-14
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Granted: 1997-10-14
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Expires: 2015-04-14
Abstract
Abstract An apparatus for laser machining by creating a plurality of discrete and separate beams which are sent to a deflecting device including a support and a plurality of individual elements that act independently and are individually controlled to machine different points on the workpiece simultaneously.
Inventors
- 👤 Joachim Schulte in den Baumen
- 👤 Robert Grub
- 👤 Herbert Gross
- 👤 Jurgen Schweizer
- 👤 Hans-Jurgen Kahlert
- 👤 Siegfrid Dippon
- 👤 Wilhelm Tamm
- 👤 Si-Ty Lam
- 👤 Heinrich Endert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:26
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/067; B23K26/0673; B23K26/04; B23K26/0604; B23K26/70; B23K26/702; H05K3/04; H05K3/045; H05K3/10; H05K3/107; H05K3/18; H05K3/188; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/0353; H05K1/036; H05K2201/00; H05K2201/03; H05K2201/032; H05K2201/0329; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2201/0364; H05K2201/0376; H05K2201/09; H05K2201/09009; H05K2201/09036; H05K2203/00; H05K2203/02; H05K2203/025; H05K2203/10; H05K2203/107; H05K3/0011; H05K3/0017; H05K3/0023; H05K3/0026; H05K3/0032; H05K3/105; H05K3/108; H05K3/38; H05K3/388; H05K3/40; H05K3/42; H05K3/425; H05K3/426
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
114 words
A material machining arrangement for machining a surface of a workpiece, the arrangement comprising: supply means for supplying a plurality of discrete machining beams which are separate from each other; a deflecting device including a support and a plurality of individual elements mounted on said support for deflecting corresponding ones of said machining beams; each of said individual elements being mounted on said support so as to be changeable in position independently of each other; and, control means for controlling said individual elements to discretely change the respective positions thereof in at least one coordinate direction to simultaneously machine different points on said surface of said workpiece with corresponding ones of said machining beams.
Claim 2
Dependent Claim
114 words
A material machining arrangement for machining a surface of a workpiece, the arrangement comprising: supply means for supplying a plurality of discrete machining beams which are separate from each other; a deflecting device including a support and a plurality of individual elements mounted on said support for deflecting corresponding ones of said machining beams; each of said individual elements being mounted on said support so as to be changeable in position independently of each other; and, control means for controlling said individual elements to discretely change the respective positions thereof in at least one coordinate direction to simultaneously machine different points on said surface of said workpiece with corresponding ones of said machining beams.
Claim 3
Dependent Claim
30 words
The material machining arrangement of claim 1, said supply means including means for arranging said machining beams so as to be parallel to each other forward of said deflecting device.
Claim 4
Dependent Claim
28 words
The material machining arrangement of claim 1, said individual elements being mounted on said support so as to define respective rotation points all arranged on an arcuate plane.
Claim 5
Dependent Claim
42 words
The material machining arrangement of claim 1, said supply means including a source for supplying a main beam defining an axis; and, said machining beams, which are incident upon said individual elements of said deflecting device, are axis-parallel to said main beam.
Claim 6
Dependent Claim
30 words
The material machining arrangement of claim 1, said machining beams, which come from said individual elements of said deflecting device, are each parallel to the axis of said main beam.
Claim 7
Dependent Claim
13 words
The material machining arrangement of claim 1, said individual elements being diffracting elements.
Claim 8
Dependent Claim
16 words
The material machining arrangement of claim 6, said individual elements being a plurality of respective segments.
Claim 9
Dependent Claim
20 words
The material machining arrangement of claim 7, said segments being individually movable in or about at least one coordinate axis.
Claim 10
Dependent Claim
17 words
The material machining arrangement of claim 7, said segments being movable in or about two coordinate axes.
Claim 11
Dependent Claim
18 words
The material machining arrangement of claim 1, said individual elements of said deflecting device being respective reflecting elements.
Claim 12
Dependent Claim
16 words
The material machining arrangement of claim 10, said reflecting elements being a plurality of respective mirrors.
Claim 13
Dependent Claim
14 words
The material machining arrangement of claim 10, each of said reflecting elements being planar.
Claim 14
Dependent Claim
18 words
The material machining arrangement of claim 1, further comprising an imaging optic mounted downstream of said deflecting device.
Claim 15
Dependent Claim
24 words
The material machining arrangement of claim 1, said supply means including a laser light source thereby defining said machining beams as laser light beams.
Claim 16
Dependent Claim
19 words
The material machining arrangement of claim 14, further comprising a beam homogenizer arranged downstream of said laser light source.
Claim 17
Dependent Claim
17 words
The material machining arrangement of claim 14, said laser light source being a pulsed laser light source.
Claim 18
Dependent Claim
28 words
The material machining arrangement of claim 14, wherein the intensity of a laser flash is so selected that only a portion of material is removed from said workpiece.
Claim 19
Dependent Claim
46 words
The material machining arrangement of claim 1, said supply means including a light source for supplying a machining beam; a beam divider device for dividing said machining beam into several discrete machining component beams; and, said beam divider device being mounted upstream of said deflecting device.
Claim 20
Dependent Claim
25 words
The material machining arrangement of claim 18, said beam divider device including a plurality of lenses corresponding to respective ones of said machining component beams.
Claim 21
Dependent Claim
33 words
The material machining arrangement of claim 18, said beam divider device including two arrays for ensuring that said machining beams have a specific spacing to each other downstream of the beam divider device.
Claim 22
Dependent Claim
22 words
The material machining arrangement of claim 18, said beam divider device including an array which generates a two-dimensional distribution of component beams.
Claim 23
Dependent Claim
20 words
The material machining arrangement of claim 18, further comprising an optical magnification system mounted downstream of said beam divider device.
Claim 24
Dependent Claim
15 words
The material machining arrangement of claim 1, wherein said workpiece is a printed circuit board.
Claim 25
Dependent Claim
25 words
The material machining arrangement of claim 1, wherein said component beams define a telecentric trace forward of said surface of said workpiece to be machined.
Claim 26
Dependent Claim
38 words
The material machining arrangement of claim 1, wherein said component beams are incident upon the portion of said workpiece to be machined at an angle α which is as small as possible and is preferably less than 5°.
Claim 27
Dependent Claim
13 words
The material machining arrangement of claim 1, said individual elements being reflecting elements.
Claim 28
Dependent Claim
15 words
The material machining arrangement of claim 1, said individual elements being diffracting and reflecting elements.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-13 | 2001-04-14 | 2001-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-13 | 2005-04-14 | 2005-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-13 | 2009-04-14 | 2009-10-14 | $7700.00 | Window Closed / Lapsed |