Image farming and microdevice manufacturing method and exposure apparatus in which a light source includes four quadrants of predetermined intensity

Claim 2

An exposure apparatus for forming an image of a fine pattern having linear features extending in orthogonal first and second directions, said apparatus comprising: an illumination optical system for illuminating the pattern, said illumination optical system comprising means for forming a secondary light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the first and second directions, respectively; and a projection optical system for projecting, on an image plane, an image of the pattern illuminated with light from said secondary light source, wherein said light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, wherein an image of said light source is projected onto a pupil of said projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 3

An apparatus according to claim 1, wherein each of said sections has a radius q, and 0.15<q<0.3.

Claim 4

An apparatus according to claim 1, wherein each of the intensities of the decreased intensity portions is substantially zero.

Claim 5

A projection exposure apparatus for projecting an image of a pattern of an original on a workpiece, said apparatus comprising: an X-Y stage for supporting thereon the workpiece and being movable along X and Y directions in an X-Y coordinate system defined in said apparatus; means for forming a secondary light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the X and Y directions, respectively; a condensing optical system for illuminating the pattern of the original with light from said secondary light source; and a projection optical system for projecting on the workpiece an image of the pattern illuminated with the light from said secondary light source, wherein said secondary light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, and wherein an image of the secondary light source is projected onto a pupil of said projection optical light intensity and being distributed in four quadrants defined by the center and the first and second axes, wherein an image of the light source is projected onto a pupil of a projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 6

A projection exposure apparatus for projecting an image of a pattern of an original on a workpiece, said apparatus comprising: an X-Y stage for supporting thereon the workpiece and being movable along X and Y directions in an X-Y coordinate system defined in said apparatus; means for forming a secondary light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the X and Y directions, respectively; a condensing optical system for illuminating the pattern of the original with light from said secondary light source; and a projection optical system for projecting on the workpiece an image of the pattern illuminated with the light from said secondary light source, wherein said secondary light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, and wherein an image of the secondary light source is projected onto a pupil of said projection optical light intensity and being distributed in four quadrants defined by the center and the first and second axes, wherein an image of the light source is projected onto a pupil of a projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 7

An apparatus according to claim 4, wherein each of the sections has a radius q, and 0.15<q<0.3.

Claim 8

An apparatus according to claim 4, wherein each of the intensities of the decreased intensity portions is substantially zero.

Claim 9

A projection exposure apparatus for projecting an image of a pattern of an original onto a workpiece, said apparatus comprising: an X-Y stage for supporting thereon the workpiece and being movable along X and Y directions in an X-Y coordinate system defined in said apparatus; means for forming a light source having an intensity distribution such that the portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the X and Y directions, respectively, are decreased in comparison with the portions of said light source other than said center portion and the portions along the first and second axes; a condensing optical system for illuminating the pattern of the original with light from said light source; and a projection optical system for projecting on the workpiece an image of the pattern illuminated with the light from said light source, wherein said light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, and wherein an image of said light source is projected onto a pupil of said projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 10

A projection exposure apparatus for projecting an image of a pattern of an original onto a workpiece, said apparatus comprising: an X-Y stage for supporting thereon the workpiece and being movable along X and Y directions in an X-Y coordinate system defined in said apparatus; means for forming a light source having an intensity distribution such that the portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the X and Y directions, respectively, are decreased in comparison with the portions of said light source other than said center portion and the portions along the first and second axes; a condensing optical system for illuminating the pattern of the original with light from said light source; and a projection optical system for projecting on the workpiece an image of the pattern illuminated with the light from said light source, wherein said light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, and wherein an image of said light source is projected onto a pupil of said projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 11

An apparatus according to claim 7, wherein each of the sections has a radius q, and 0.15<q<0.3.

Claim 12

An apparatus according to claim 7, wherein the intensities of the center portion and the portions along the first and second axes are zero.

Claim 13

An apparatus according to claim 7, wherein said light source forming means comprises (i) an optical integrator having a light receiving surface and a light emitting surface, for receiving with said light receiving surface light from a primary light source and dividing the received light to provide a plurality of light beams from said light emitting surface, and (ii) stop means having four apertures disposed adjacent to one of said light receiving surface and said light emitting surface of said optical integrator to define the four sections of said light source.

Claim 14

An apparatus according to claim 7, wherein said light source forming means comprises (i) an optical integrator having a light receiving surface and a light emitting surface, for receiving with said light receiving surface light from a primary light source and dividing the received light to provide a plurality of light beams from said light emitting surface, and (ii) stop means for cross-like shape disposed adjacent to one of said light receiving surface and said light emitting surface of said optical integrator to define the four sections of said light source.

Claim 15

An apparatus according to claim 7, further comprising means for detecting the intensities in said four sections, and a member for adjusting a ratio of the intensities of said four sections.

Claim 16

An apparatus according to claim 12, wherein said intensity detecting means comprises a first intensity distribution sensor mounted to said illumination optical system.

Claim 17

An apparatus according to claim 13, wherein said intensity detecting means comprises a second intensity distribution sensor adjacent the image plane of said projection optical system, wherein the intensities of said four sections are detected by said first and second intensity distribution sensors, and a result of sensing of said second intensity distribution sensor is corrected on the basis of said sensing of said second intensity distribution sensor.

Claim 18

An apparatus according to claim 12, wherein said intensity detecting means comprises a second intensity distribution sensor disposed adjacent the image plane of said projection optical system.

Claim 19

An apparatus according to claim 7, wherein said light source forming means comprises a lamp, an elliptical mirror for reflecting light from the lamp and an optical integrator illuminated by the light reflected by said elliptical mirror.

Claim 20

An apparatus according to claim 7, wherein said light source forming means comprises a primary light source and a first optical integrator illuminated by light from said primary light source, and a second optical integrator illuminated by light from said first optical integrator.

Claim 21

An apparatus according to claim 7, wherein said light source forming means comprises a first light source, light splitting means for splitting light from said first light source into four beams, and an optical integrator illuminated by the four beams.

Claim 22

An apparatus according to claim 18, wherein said light splitting means comprise a bundle of fibers integrated at a side receiving the light and divided at a side from which the light emits.

Claim 23

An apparatus according to claim 18, wherein said light splitting means comprises a pyramid-shaped prism.

Claim 24

An apparatus according to claim 18, wherein said primary light source is a laser, and said light splitting means comprises means for making the four beams incoherent.

Claim 25

An apparatus according to claim 21, wherein said laser is an excimer laser.

Claim 26

An apparatus according to claim 18, wherein said optical integrator has four separately disposed from each other.

Claim 27

An apparatus according to claim 7, wherein said light source forming means forms the four sections sequentially.

Claim 28

An apparatus according to claim 7, wherein said light source forming means comprises a plurality of primary light sources and an optical integrator illuminated by beams from the primary light sources.

Claim 29

An apparatus according to claim 25, wherein said light source forming means comprises four primary light sources.

Claim 30

An apparatus according to claim 25, wherein said optical integrator has four sections separately disposed from each other.

Claim 31

An apparatus according to claim 7, wherein said light source forming means comprises an optical integrator including an array of lenses and an aperture stop disposed adjacent the optical integrator and having four apertures corresponding to four sections of the light source, and wherein an edge of the aperture extends along a cross section of the lens of said lens array.

Claim 32

An apparatus according to claim 7, wherein said light source forming means comprises means for switching the light source having the four sections to another light source having an intensity distribution different from that of said light source.

Claim 33

An apparatus according to claim 29, wherein said light source forming means comprises a mechanism for selectively inserting across the optical path first and second aperture stops having openings corresponding to the intensity distributions of the light sources.

Claim 34

An apparatus according to claim 30, wherein said light source forming means comprises an optical integrator including an array of lenses, and said first and second aperture stops are inserted across the optical path adjacent the optical integrator, and the edges of the first and second apertures are extended along a lens cross section of the lens array.

Claim 35

An apparatus according to claim 30, wherein said light source forming means comprises a primary light source and a zoom lens illuminating an optical integrator with light from said primary light source, and wherein said first and second aperture stops are inserted across the optical path adjacent the optical integrator.

Claim 36

An apparatus according to claim 30, wherein said light source forming means comprises a primary light source and a pyramid-like prism, insertable across the optical path, for splitting light from said primary light source into four beams.

Claim 37

An apparatus according to claim 33, wherein said light source forming means comprises two lens systems inserted across the optical path alternately in interrelation with the pyramid-shaped prism.

Claim 38

An apparatus according to claim 30, wherein said light source forming means comprises a primary light source, and light splitting means for splitting light from said first light source into four beams, and said light splitting means comprises four fiber bundles which are united at a light receiving side, and separated at a light emitting side.

Claim 39

An apparatus according to claim 30, further comprising means for correcting illuminance non-uniformity occurring when the light source having four sections is switched to another light source having a different intensity distribution.

Claim 40

An apparatus according to claim 36, wherein said correcting means comprises a lens movable along the optical path.

Claim 41

An apparatus according to claim 37, wherein said light source forming means comprises a primary light source, an optical integrator illuminated by light from said primary light source, and said movable lens in an optical path of the light from the optical integrator.

Claim 42

An apparatus according to claim 29, wherein said light source forming means comprises an optical integrator including an array of lenses, and said first and second aperture stops are inserted across the optical path adjacent the optical integrator, and the edges of the first and second apertures are extended along a lens cross section of the lens array.

Claim 43

An apparatus according to claim 29, wherein said light source forming means comprises a primary light source and a zoom lens illuminating an optical integrator with light from said primary light source, and wherein said first and second aperture stops are inserted across the optical path adjacent the optical integrator.

Claim 44

An apparatus according to claim 29, wherein said light source forming means comprises a primary light source and a pyramid-like prism, insertable across the optical path, for splitting light from said primary light source into four beams.

Claim 45

An apparatus according to claim 41, wherein said light source forming means comprises two lens systems inserted across the optical path alternately in interrelation with the pyramid-shaped prism.

Claim 46

An apparatus according to claim 29, wherein said light source forming means comprises a primary light source, and light splitting means for splitting light from said first light source into four beams, and said light splitting means comprises four fiber bundles which are united at a light receiving side, and separated at a light emitting side.

Claim 47

An apparatus according to claim 29, further comprising means for correcting illuminance non-uniformity occurring when the light source having four sections is switched to another light source having a different intensity distribution.

Claim 48

An apparatus according to claim 44, wherein said correcting means comprises a lens movable along the optical path.

Claim 49

An apparatus according to claim 45, wherein said light source forming means comprises a primary light source, an optical integrator illuminated by light from said primary light source, and said movable lens in an optical path of the light from the optical integrator.

Claim 53

A method according to claim 48, wherein each of the sections has a radius q, and 0.15<q<0.3.

Claim 54

A method according to claim 48, wherein the intensities of the center portion and the portions along the first and second axes are zero.

Claim 55

A method according to claim 48, wherein said light source forming means comprises (i) an optical integrator having a light receiving surface and a light emitting surface, for receiving with said light receiving surface light from a primary light source and dividing the received light to provide a plurality of light beams from said light emitting surface, and (ii) stop means having four system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 56

A method according to claim 48, wherein said light source forming means comprises (i) an optical integrator having a light receiving surface and a light emitting surface, for receiving with said light receiving surface light from a primary light source and dividing the received light to provide a plurality of light beams from said light emitting surface, and (ii) stop means for cross-like shape disposed adjacent to one of said light receiving surface and said light emitting surface of said optical integrator to define the four sections of said light source.

Claim 57

A microdevice manufacturing method comprising a step of printing a device pattern on a workpiece using an apparatus as defined in any one of claims 7 through 46.

Claim 58

A microdevice provided by printing a device pattern on a workpiece using an apparatus as defined in any one of claims 7 through 46.