US5669977A
Expired / Lapsed
US
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Shape memory alloy lift pins for semiconductor processing equipment
Assignee: Lam Research Corp
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Filing: 1995-12-22
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Granted: 1997-09-23
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Expires: 2015-12-22
Abstract
Abstract A lift pin arrangement for use in semiconductor processing apparatus wherein the lift pins are of a shape memory alloy. The lift pins exhibit superelasticity and/or shape memory effects which allows the lift pins to withstand substantial bending forces without permanent deformation thereof, and in the case where the lift pins become deformed it is possible to restraighten the lift pins simply by heating the lift pins to an appropriate temperature.
Inventors
- 👤 Paul Kevin Shufflebotham
- 👤 Christopher Griffin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:23
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7612; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70708; Y; Y10; Y10S; Y10S156/00; Y10S156/914
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
27 words
A lift pin of a lift pin mechanism of a substrate processing apparatus, the lift pin consisting essentially of a shape memory alloy having a memorized configuration.
Claim 2
Dependent Claim
27 words
A lift pin of a lift pin mechanism of a substrate processing apparatus, the lift pin consisting essentially of a shape memory alloy having a memorized configuration.
Claim 3
Dependent Claim
53 words
The lift pin of claim 1, wherein the shape memory alloy is transformable from a martensitic state to an austenitic state, the lift pin being restorable from a deformed configuration to the memorized configuration by heating the lift pin to a temperature at which the shape memory alloy transforms to the austenitic state.
Claim 4
Dependent Claim
23 words
The lift pin of claim 1, wherein the shape memory alloy is a nickel titanium alloy having a martensite-to-austenite transformation temperature below ambient.
Claim 5
Dependent Claim
86 words
The lift pin of claim 1, wherein the lift pin is supported on a lifter forming part of a substrate holder of a substrate processing chamber, the lifter being movable in a vertical direction between upper and lower positions, the lift pin having an upper surface located above a substrate support surface of the substrate holder when the lifter is in the upper position and the upper surface of the lift pin being below the substrate support surface when the lifter is in the lower position.
Claim 6
Dependent Claim
34 words
The lift pin of claim 4, wherein part of the lift pin passes through a lift pin hole in the substrate holder when the lifter moves from the lower position to the upper position.
Claim 7
Dependent Claim
24 words
The lift pin of claim 5, wherein the lift pin has a cross section which fills 55 to 75% of the lift pin hole.
Claim 8
Dependent Claim
28 words
The lift pin of claim 1, wherein the lift pin is supported on a lifter of a substrate processing apparatus, the lifter being movable in a vertical direction.
Claim 9
Dependent Claim
26 words
The lift pin of claim 1, wherein the lift pin is a rectilinearly extending cylindrical pin press fitted in a lifter of a lift pin mechanism.
Claim 10
Dependent Claim
16 words
The lift pin of claim 8, wherein the lifter is of plastic, ceramic or metal material.
Claim 11
Dependent Claim
114 words
A process of treating a substrate in a substrate processing chamber, comprising: moving a substrate to be processed to a process position in a substrate processing chamber; raising a lifter having a plurality of lift pins to an upper position at which the substrate is supported on upper ends of the lift pins, each of the lift pins consisting essentially of a shape memory alloy having a memorized configuration; lowering the lifter to a lower position at which the substrate is supported on a substrate holder in the substrate processing chamber; treating the substrate with the process; raising the lifter to the upper position; and transferring the substrate out of the substrate processing chamber.
Claim 12
Dependent Claim
114 words
A process of treating a substrate in a substrate processing chamber, comprising: moving a substrate to be processed to a process position in a substrate processing chamber; raising a lifter having a plurality of lift pins to an upper position at which the substrate is supported on upper ends of the lift pins, each of the lift pins consisting essentially of a shape memory alloy having a memorized configuration; lowering the lifter to a lower position at which the substrate is supported on a substrate holder in the substrate processing chamber; treating the substrate with the process; raising the lifter to the upper position; and transferring the substrate out of the substrate processing chamber.
Claim 13
Dependent Claim
58 words
The process of claim 10, wherein the shape memory alloy is a nickel titanium alloy which is transformable from a martensitic state to an austenitic state, the lift pin being restorable from a deformed configuration to the memorized configuration by heating the lift pin to a temperature at which the shape memory alloy transforms to the austenitic state.
Claim 14
Dependent Claim
46 words
The process of claim 11, further comprising restoring at least one of the lift pins from the deformed configuration to the memorized condition by heating the lift pin to a temperature at which the shape memory alloy transforms from the martensitic state to the austenitic state.
Claim 15
Dependent Claim
23 words
The process of claim 10, wherein the step of processing the substrate is carried out at a temperature no greater than 0° C.
Claim 16
Dependent Claim
23 words
The process of claim 10, wherein the step of processing the substrate is carried out at a temperature no lower than 0° C.
Claim 17
Dependent Claim
31 words
The process of claim 10, wherein each of the lift pins passes through a hole in the substrate holder when the lifter moves from the lower position to the upper position.
Claim 18
Dependent Claim
29 words
The process of claim 15, wherein each of the lift pins has a cross section which is at least 55% as large as the cross section of the hole.
Claim 19
Dependent Claim
27 words
The process of claim 16, wherein the cross section of each of the lift pins is no greater than 75% of the cross section of the hole.
Claim 20
Dependent Claim
36 words
The process of claim 10, wherein the lift pins extend through holes in the substrate holder, at least part of the lift pins being in the holes when the lifter is lowered to the lower position.
Claim 21
Dependent Claim
21 words
The process of claim 10, wherein the shape memory alloy has a martensite-to-austenite transformation temperature of no less than 25° C.
Claim 22
Dependent Claim
20 words
The process of claim 10, wherein the shape memory alloy has a martensite-to-austenite transformation temperature of greater than 25° C.
Claim 23
Dependent Claim
101 words
A process of transporting a substrate in a substrate processing apparatus, comprising: moving a substrate to be processed to a first process position in a first part of the substrate processing apparatus; raising a lifter having a plurality of lift pins to an upper position at which the substrate is supported on upper ends of the lift pins, each of the lift pins consisting essentially of a shape memory alloy having a memorized configuration; and moving the substrate to a second process position by lowering the lifter to a lower position at which the substrate is supported on a support surface.
Claim 24
Dependent Claim
101 words
A process of transporting a substrate in a substrate processing apparatus, comprising: moving a substrate to be processed to a first process position in a first part of the substrate processing apparatus; raising a lifter having a plurality of lift pins to an upper position at which the substrate is supported on upper ends of the lift pins, each of the lift pins consisting essentially of a shape memory alloy having a memorized configuration; and moving the substrate to a second process position by lowering the lifter to a lower position at which the substrate is supported on a support surface.
Claim 25
Dependent Claim
58 words
The process of claim 21, wherein the shape memory alloy is a nickel titanium alloy which is transformable from a martensitic state to an austenitic state, the lift pin being restorable from a deformed configuration to the memorized configuration by heating the lift pin to a temperature at which the shape memory alloy transforms to the austenitic state.
Claim 26
Dependent Claim
21 words
The process of claim 21, wherein the shape memory alloy has a martensite-to-austenite transformation temperature of no less than 25° C.
Claim 27
Dependent Claim
20 words
The process of claim 21, wherein the shape memory alloy has a martensite-to-austenite transformation temperature of greater than 25° C.
Claim 28
Dependent Claim
18 words
The process of claim 21, wherein the support surface is an upper surface of a movable robotic arm.
References Cited (Backward Citations)
US4340462A
Cited
US4431473A
Cited
US4665906A
Cited
US4554611A
Cited
US4704306A
Cited
JPS61271863A
Cited
US4615755A
Cited
US4733632A
Cited
US4743079A
Cited
US4842683A
Cited
US5215619A
Cited
US4894100A
Cited
US4790258A
Cited
US5197720A
Cited
US4948458A
Cited
US5200232A
Cited
US5380396A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-22 | 2001-03-24 | 2001-09-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-22 | 2005-03-24 | 2005-09-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-22 | 2009-03-24 | 2009-09-23 | $7700.00 | Window Closed / Lapsed |