US4790258A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetically coupled wafer lift pins
Assignee: Motorola Solutions Inc
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Filing: 1987-04-03
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Granted: 1988-12-13
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Expires: 2007-04-03
Abstract
Abstract An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin.
Inventors
- 👤 David J. Drage
- 👤 Roger B. Lachenbruch
- 👤 Herbert G. Drake, Jr.
- 👤 Jerris H. Peavey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:45
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7612; Y; Y10; Y10S; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
95 words
In a plasma reactor having a platelike member for receiving an article to be treated, a pin lift mechanism connected with said plate comprising: a non-magnetic sleeve having a first end which is closed and a second end located within a bore in said member; a magnetic slug located in said sleeve near said closed end; a pin located in said sleeve; wherein said slug and said pin are freely moveable within said sleeve; and means, outside said sleeve and magnetically coupled to said slug, for moving said slug and said pin within said sleeve.
Claim 2
Dependent Claim
95 words
In a plasma reactor having a platelike member for receiving an article to be treated, a pin lift mechanism connected with said plate comprising: a non-magnetic sleeve having a first end which is closed and a second end located within a bore in said member; a magnetic slug located in said sleeve near said closed end; a pin located in said sleeve; wherein said slug and said pin are freely moveable within said sleeve; and means, outside said sleeve and magnetically coupled to said slug, for moving said slug and said pin within said sleeve.
Claim 3
Dependent Claim
13 words
The apparatus as set forth in claim 1 wherein said pin comprises quartz.
Claim 4
Dependent Claim
14 words
The apparatus as set forth in claim 2 wherein said pin comprises a conductor.
Claim 5
Dependent Claim
19 words
The apparatus as set forth in claim 1 and further comprising means for sealing said sleeve within said bore.
Claim 6
Dependent Claim
24 words
The apparatus as set forth in claim 4 wherein said sealing means comprises an O-ring and an O-ring compression screw threaded into said member.
References Cited (Backward Citations)
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-12-13 | 1992-06-13 | 1992-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-12-13 | 1996-06-13 | 1996-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-12-13 | 2000-06-13 | 2000-12-13 | $7700.00 | Window Closed / Lapsed |