US5663108A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optimized metal pillar via process
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-06-13
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Granted: 1997-09-02
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Expires: 2016-06-13
Abstract
Abstract A new approach for creating metal pillar via structures, for multilevel metallization structures, used in the fabrication of MOSFET devices, has been developed. Consecutive metal depositions are performed, followed by a RIE procedure, used to create the desired first level metallization shape in the metallizations. Another RIE procedure than selectively forms the metal pillar via structure on the underlying first level metallization structure. Composite dielectric material, including a spin on glass layer, is used to fill the spaces between metal structures. Chemical mechanical polishing is used to create the desired planarity, followed by the construction of a second level metallization structure, contacting the underlying first level metallization structure by use of the metal pillar via structure.
Inventors
- 👤 Yung-Fa Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 02:48
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/063; H10W20/40; H10W20/41; H10W20/42; H10W20/44; H10W20/4403; H10W20/4437; H10W20/4441
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
440 words
A method of fabricating a MOSFET device, on a semiconductor substrate, using a metal pillar via structure for electrical contact between multilevel interconnect metallizations, comprising the steps of: providing an element of said MOSFET device; deposition of a first insulator layer on said semiconductor substrate, including deposition on said element of said MOSFET device; opening a contact hole in said first insulator layer, to said element of said MOSFET device; deposition of a first metallization layer on said first insulator layer, and on exposed top surface of said element, of said MOSFET device, in said contact hole; deposition of a second metallization layer on said first metallization layer; patterning of said second metallization layer and underlying, said first metallization layer, to create a composite, metal interconnect structure, providing contact to underlying, said element of said MOSFET device; deposition of a second insulator layer on said composite, metal interconnect structure, and on said first insulator layer, not covered by said composite, metal interconnect structure; anisotropic etching of said second insulator layer, to create an insulator sidewall spacer, on sides of said composite, metal interconnect structure; patterning of said second metallization layer, of said composite, metal interconnect structure, to create a metal pillar via structure, while leaving said first metallization layer, of said composite, metal interconnect structure, unetched, creating an underlying first level interconnect structure; deposition of a first plasma insulator layer on said metal pillar via structures, on said first level interconnect structure, on said insulator sidewall spacers, and on said first insulator layer, not covered by said first level interconnect structure, or said insulator sidewall spacer; application of a spin on glass layer on said first plasma insulator layer, filling spaces between said metal pillar via structures, and filling spaces between said first level interconnect structures; baking of said spin on glass layer; curing of said spin on glass layer; deposition of a second plasma insulator layer, on said spin on glass layer; chemical mechanical polishing to expose top surface of said metal pillar via structure by removal of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, from top surface of said metal pillar via structure; deposition of a third metallization layer on exposed top surface of said metal pillar via structure, and on surfaces of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, in spaces between said metal pillar via structures, and in spaces between said first level interconnect structures; and patterning of said third metallization layer to create second level interconnect structure, contacting underlying metal pillar via structure.
Claim 2
Independent Claim
440 words
A method of fabricating a MOSFET device, on a semiconductor substrate, using a metal pillar via structure for electrical contact between multilevel interconnect metallizations, comprising the steps of: providing an element of said MOSFET device; deposition of a first insulator layer on said semiconductor substrate, including deposition on said element of said MOSFET device; opening a contact hole in said first insulator layer, to said element of said MOSFET device; deposition of a first metallization layer on said first insulator layer, and on exposed top surface of said element, of said MOSFET device, in said contact hole; deposition of a second metallization layer on said first metallization layer; patterning of said second metallization layer and underlying, said first metallization layer, to create a composite, metal interconnect structure, providing contact to underlying, said element of said MOSFET device; deposition of a second insulator layer on said composite, metal interconnect structure, and on said first insulator layer, not covered by said composite, metal interconnect structure; anisotropic etching of said second insulator layer, to create an insulator sidewall spacer, on sides of said composite, metal interconnect structure; patterning of said second metallization layer, of said composite, metal interconnect structure, to create a metal pillar via structure, while leaving said first metallization layer, of said composite, metal interconnect structure, unetched, creating an underlying first level interconnect structure; deposition of a first plasma insulator layer on said metal pillar via structures, on said first level interconnect structure, on said insulator sidewall spacers, and on said first insulator layer, not covered by said first level interconnect structure, or said insulator sidewall spacer; application of a spin on glass layer on said first plasma insulator layer, filling spaces between said metal pillar via structures, and filling spaces between said first level interconnect structures; baking of said spin on glass layer; curing of said spin on glass layer; deposition of a second plasma insulator layer, on said spin on glass layer; chemical mechanical polishing to expose top surface of said metal pillar via structure by removal of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, from top surface of said metal pillar via structure; deposition of a third metallization layer on exposed top surface of said metal pillar via structure, and on surfaces of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, in spaces between said metal pillar via structures, and in spaces between said first level interconnect structures; and patterning of said third metallization layer to create second level interconnect structure, contacting underlying metal pillar via structure.
Claim 3
Dependent Claim
17 words
The method of claim 1, wherein said element, of said MOSFET device, is a polysilicon gate structure.
Claim 4
Dependent Claim
40 words
The method of claim 1, wherein said first metallization layer is aluminum, containing between about 1 to 3% copper, and containing between about 1 to 2% silicon, deposited using r.f. sputtering, to a thickness between about 5000 to 6000 Angstroms.
Claim 5
Dependent Claim
25 words
The method of claim 1, wherein said second metallization layer is tungsten, deposited using r.f. sputtering to a thickness between about 5000 to 6000 Angstroms.
Claim 6
Dependent Claim
40 words
The method of claim 1, wherein said second metallization layer is tungsten, deposited using LPCVD processing, at a temperature between about 200° to 600° C., to a thickness between about 5000 to 6000 Angstroms, using tungsten hexafluoride as a source.
Claim 7
Dependent Claim
42 words
The method of claim 1, wherein said second insulator layer, used to create said insulator sidewall spacer, is silicon oxide, deposited using PECVD processing, at a temperature between about 400° to 600° C., to a thickness between about 1000 to 2000 Angstroms.
Claim 8
Dependent Claim
27 words
The method of claim 1, wherein said metal pillar via structure is formed by RIE processing of said second metallization layer, using NF 3 as an etchant.
Claim 9
Dependent Claim
36 words
The method of claim 1, wherein said first plasma insulator layer is silicon oxide, deposited using PECVD processing, at a temperature between about 400° to 600° C., to a thickness between about 1000 to 2000 Angstroms.
Claim 10
Dependent Claim
27 words
The method of claim 1, wherein said spin on glass layer is applied to a thickness between about 6000 to 8000 Angstroms, using siloxane as a source.
Claim 11
Dependent Claim
33 words
The method of claim 1, wherein said spin on glass layer is baked at a temperature between about 200° to 300° C., and cured at a temperature between about 300° to 400° C.
Claim 12
Dependent Claim
34 words
The method of claim 1, wherein said second plasma insulator layer is deposited using PECVD processing, at a temperature between about 400° to 600° C., to a thickness between about 600 to 8000 Angstroms.
Claim 13
Dependent Claim
28 words
The method of claim 1, wherein said chemical mechanical polishing is performed to a level in which the top surface of said metal pillar via structure is exposed.
Claim 14
Dependent Claim
32 words
The method of claim 1, wherein said third metallization layer is aluminum, containing between about 1 to 3% copper, deposited using r.f. sputtering, to a thickness between about 5000 to 10000 Angstroms.
Claim 15
Independent Claim
459 words
A method of fabricating a MOSFET device, on a semiconductor substrate, using a tungsten pillar via structure to electrically connect underlying and overlying aluminum based, interconnect metallizations, comprising the steps of: providing a polysilicon gate structure, of said MOSFET device; deposition of a first insulator layer on said semiconductor substrate, including on said polysilicon gate structure, of said MOSFET device; opening a contact hole in said first insulator layer, to expose top surface of said polysilicon gate structure; deposition of a first aluminum based metallization layer, on said first insulator layer, and on exposed top surface of said polysilicon gate structure, in said contact hole; deposition of a tungsten layer on underlying, said first aluminum based metallization layer; patterning of said tungsten layer, and of underlying, said first aluminum based metallization layer, to create a composite, metal interconnect structure; deposition of a second insulator layer on said composite, metal interconnect structure, and on said first insulator layer, not covered by said composite, metal interconnect structure; anisotropic etching of said second insulator layer, to create an insulator sidewall spacer, on sides of said composite, metal interconnect structure; patterning of said tungsten layer, of said composite, metal interconnect structure, to create said tungsten pillar via structure, while leaving underlying first aluminum based metallization layer, of said composite, metal interconnect structure, unetched, creating a first level, aluminum based, interconnect structure; deposition of a first plasma insulator on said tungsten pillar via structure, on said first level, aluminum based, interconnect structure, on said insulator sidewall spacers, and on said first insulator layer, not covered by said first level, aluminum based, interconnect structure or said insulator sidewall spacer; application of a spin on glass layer on said first plasma insulator layer, filling spaces between said tungsten pillar via structures, and filling spaces between said first level, aluminum based, interconnect structure; baking of said spin on glass layer; curing of said spin on glass layer; deposition of a second plasma insulator layer on said spin in glass layer; chemical mechanical polishing to expose top surface of said tungsten pillar via structure, by removal of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, from top surface of said tungsten pillar via structure; deposition of a second aluminum based metallization layer on exposed top surface of said tungsten pillar via structure, and on top surfaces of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, in spaces between said tungsten pillar via structures, and in spaces between said first level, aluminum based, interconnect structures; and patterning of said second aluminum based metallization layer to create a second level, aluminum based, interconnect structure, contacting underlying tungsten pillar via structure.
Claim 16
Independent Claim
459 words
A method of fabricating a MOSFET device, on a semiconductor substrate, using a tungsten pillar via structure to electrically connect underlying and overlying aluminum based, interconnect metallizations, comprising the steps of: providing a polysilicon gate structure, of said MOSFET device; deposition of a first insulator layer on said semiconductor substrate, including on said polysilicon gate structure, of said MOSFET device; opening a contact hole in said first insulator layer, to expose top surface of said polysilicon gate structure; deposition of a first aluminum based metallization layer, on said first insulator layer, and on exposed top surface of said polysilicon gate structure, in said contact hole; deposition of a tungsten layer on underlying, said first aluminum based metallization layer; patterning of said tungsten layer, and of underlying, said first aluminum based metallization layer, to create a composite, metal interconnect structure; deposition of a second insulator layer on said composite, metal interconnect structure, and on said first insulator layer, not covered by said composite, metal interconnect structure; anisotropic etching of said second insulator layer, to create an insulator sidewall spacer, on sides of said composite, metal interconnect structure; patterning of said tungsten layer, of said composite, metal interconnect structure, to create said tungsten pillar via structure, while leaving underlying first aluminum based metallization layer, of said composite, metal interconnect structure, unetched, creating a first level, aluminum based, interconnect structure; deposition of a first plasma insulator on said tungsten pillar via structure, on said first level, aluminum based, interconnect structure, on said insulator sidewall spacers, and on said first insulator layer, not covered by said first level, aluminum based, interconnect structure or said insulator sidewall spacer; application of a spin on glass layer on said first plasma insulator layer, filling spaces between said tungsten pillar via structures, and filling spaces between said first level, aluminum based, interconnect structure; baking of said spin on glass layer; curing of said spin on glass layer; deposition of a second plasma insulator layer on said spin in glass layer; chemical mechanical polishing to expose top surface of said tungsten pillar via structure, by removal of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, from top surface of said tungsten pillar via structure; deposition of a second aluminum based metallization layer on exposed top surface of said tungsten pillar via structure, and on top surfaces of said second plasma insulator layer, of said spin on glass layer, and of said first plasma insulator layer, in spaces between said tungsten pillar via structures, and in spaces between said first level, aluminum based, interconnect structures; and patterning of said second aluminum based metallization layer to create a second level, aluminum based, interconnect structure, contacting underlying tungsten pillar via structure.
Claim 17
Dependent Claim
39 words
The method of claim 14, wherein said first aluminum based metallization layer is aluminum, containing between 1 to 3% copper, and between 1 to 2% silicon, deposited using r.f. sputtering, to a thickness between about 5000 to 10000 Angstroms.
Claim 18
Dependent Claim
23 words
The method of claim 14, wherein said tungsten layer is deposited using r.f. sputtering, to a thickness between about 5000 to 6000 Angstroms.
Claim 19
Dependent Claim
38 words
The method of claim 14, wherein said tungsten layer is deposited using LPCVD processing, at a temperature between about 200° to 600° C., to a thickness between about 5000 to 6000 Angstroms, using tungsten hexafluoride as a source.
Claim 20
Dependent Claim
41 words
The method of claim 14, wherein said second insulator, used to create said insulator sidewall spacer, is silicon oxide, deposited using PECVD processing, at a temperature between about 400° to 600° C., to a thickness between about 1000 to 2000 Angstroms.
Claim 21
Dependent Claim
22 words
The method of claim 14, wherein said tungsten pillar via structure is formed by RIE processing, using NF 3 as an etchant.
Claim 22
Dependent Claim
36 words
The method of claim 14, wherein said first plasma insulator layer is silicon oxide, deposited using PECVD processing, at a temperature between about 400° to 600° C., to a thickness between about 1000 to 2000 Angstroms.
Claim 23
Dependent Claim
27 words
The method of claim 14, wherein said spin on glass layer is applied to a thickness between about 6000 to 8000 Angstroms, using siloxane as a source.
Claim 24
Dependent Claim
33 words
The method of claim 14, wherein said spin on glass layer is baked at a temperature between about 200° to 300° C., and cured at a temperature between about 300° to 400° C.
Claim 25
Dependent Claim
36 words
The method of claim 14, wherein said second plasma insulator layer is silicon oxide, deposited using PECVD processing, at a temperature between about 400° to 600° C., to a thickness between about 6000 to 8000 Angstroms.
Claim 26
Dependent Claim
28 words
The method of claim 14, wherein said chemical mechanical polishing is performed to a level in which the top surface of said metal pillar via structure is exposed.
Claim 27
Dependent Claim
33 words
The method of claim 14, wherein said second aluminum based metallization layer is aluminum, containing between 1 to 3% copper, deposited using r.f. sputtering, to a thickness between about 5000 to 10000 Angstroms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-01 | 2001-03-03 | 2001-09-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-01 | 2005-03-03 | 2005-09-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-01 | 2009-03-03 | 2009-09-02 | $7700.00 | Window Closed / Lapsed |