US5661503A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polycrystalline silicon-based substrate for liquid jet recording head, process for producing said substrate, liquid jet recording head in which said substrate is used, and liquid jet recording apparatus in which said substrate is used
Assignee: Canon Inc
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Filing: 1992-11-06
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Granted: 1997-08-26
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Expires: 2012-11-06
Abstract
Abstract A substrate for liquid jet recording head including an electrothermal converting body comprising a heat generating resistor capable of generating thermal energy and a pair of wirings electrically connected to said heat generating resistor, characterized in that said substrate includes a base member constituted by a polycrystalline material such as a polycrystalline silicon material or the like, a process for producing this substrate, a liquid jet recording head in which said substrate, and a liquid jet recording apparatus in which said recording head is used. A desirable recording head which is free of a warpage or a curved portion and which provides a high quality recorded image can be produced by using said base member. Further, a desirable recording apparatus which enables to record a high quality image at a high recording speed. In the process of producing said substrate, the surface of the polycrystalline base member is thermally oxidized to provide a surface excelling in flatness.
Inventors
- 👤 Haruhiko Terai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:07
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1621; B41J2/164; B41J2/1646; B41J2/1601; B41J2/1604; B41J2/1626; B41J2/1628; B41J2/1631; B41J2/1632; B41J2/1637; B41J2/1642; B41J2202/00; B41J2202/01; B41J2202/03
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
111 words
A process for producing a substrate for a liquid jet recording head having an electrothermal converting body comprising a heat generating resistor for generating thermal energy and a pair of wirings electrically connected to said heat generating resistor formed on a base member, said process comprising the steps of: (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 2
Dependent Claim
111 words
A process for producing a substrate for a liquid jet recording head having an electrothermal converting body comprising a heat generating resistor for generating thermal energy and a pair of wirings electrically connected to said heat generating resistor formed on a base member, said process comprising the steps of: (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 3
Dependent Claim
26 words
A process for producing a substrate for a liquid jet recording head according to claim 1, wherein the base member is a polycrystalline silicon base member.
Claim 4
Dependent Claim
23 words
The process according to claim 1 further comprising a step of removing the barrier layer after the formation of the thermal oxide layer.
Claim 5
Dependent Claim
18 words
The process according to claim 1, wherein the inorganic oxide is titanium oxide, cobalt oxide, or silicon oxide.
Claim 6
Dependent Claim
24 words
The process according to claim 1, wherein in step (c), the polycrystalline base member is heated at a temperature of 1000° C. or more.
Claim 7
Dependent Claim
18 words
The process according to claim 1, wherein the barrier layer has a thickness of 0.04 to 10 μm.
Claim 8
Dependent Claim
105 words
A substrate for a liquid jet recording head including an electrothermal converting body comprising a heat generating resistor for generating thermal energy and a pair of wirings electrically connected to said heat generating resistor formed on a base member, which is formed by (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 9
Dependent Claim
105 words
A substrate for a liquid jet recording head including an electrothermal converting body comprising a heat generating resistor for generating thermal energy and a pair of wirings electrically connected to said heat generating resistor formed on a base member, which is formed by (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 10
Dependent Claim
20 words
A substrate according to claim 7, wherein the barrier layer is removed after the formation of the thermal oxide layer.
Claim 11
Dependent Claim
18 words
A substrate according to claim 7, wherein the inorganic oxide is titanium oxide, cobalt oxide, or silicon oxide.
Claim 12
Dependent Claim
24 words
A substrate according to claim 7, wherein in step (c), the polycrystalline base member is heated at a temperature of 1000° C. or more.
Claim 13
Dependent Claim
18 words
A substrate according to claim 7, wherein the barrier layer has a thickness of 0.04 to 10 μm.
Claim 14
Dependent Claim
159 words
A liquid jet recording head including a liquid discharging outlet; a substrate for the liquid jet recording head including an electrothermal converting body comprising a heat generating resistor for generating thermal energy for discharging liquid from said discharging outlet, a pair of wirings electrically connected to said heat generating resistor so that said pair of wirings supply an electric signal for generating said thermal energy to said heat generating resistor; and a liquid supplying pathway aligned with said electrothermal converting body of said substrate, wherein said substrate comprises a substrate for a liquid jet head formed by (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 15
Dependent Claim
159 words
A liquid jet recording head including a liquid discharging outlet; a substrate for the liquid jet recording head including an electrothermal converting body comprising a heat generating resistor for generating thermal energy for discharging liquid from said discharging outlet, a pair of wirings electrically connected to said heat generating resistor so that said pair of wirings supply an electric signal for generating said thermal energy to said heat generating resistor; and a liquid supplying pathway aligned with said electrothermal converting body of said substrate, wherein said substrate comprises a substrate for a liquid jet head formed by (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 16
Dependent Claim
23 words
A liquid jet recording head according to claim 12, wherein the barrier layer is removed after the formation of the thermal oxide layer.
Claim 17
Dependent Claim
21 words
A liquid jet recording head according to claim 12, wherein the inorganic oxide is titanium oxide, cobalt oxide, or silicon oxide.
Claim 18
Dependent Claim
27 words
A liquid jet recording head according to claim 12, wherein in step (c), the polycrystalline base member is heated at a temperature of 1000° C. or more.
Claim 19
Dependent Claim
21 words
A liquid jet recording head according to claim 12, wherein the barrier layer has a thickness of 0.04 to 10 μm.
Claim 20
Dependent Claim
185 words
A liquid jet recording apparatus comprising: a liquid jet recording head including a liquid discharging outlet; a substrate for the liquid jet recording head including an electrothermal converting body comprising a heat generating resistor for generating thermal energy for discharging liquid from said discharging outlet, a pair of wirings electrically connected to said heat generating resistor so that said pair of wirings supply an electric signal for generating said thermal energy to said heat generating resistor; and a liquid supplying pathway aligned with said electrothermal converting body of said substrate; and an electric signal supplying means for supplying an electric signal to said heat generating resistor of said recording head, wherein said substrate comprises a substrate for a liquid jet head formed by (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 21
Dependent Claim
185 words
A liquid jet recording apparatus comprising: a liquid jet recording head including a liquid discharging outlet; a substrate for the liquid jet recording head including an electrothermal converting body comprising a heat generating resistor for generating thermal energy for discharging liquid from said discharging outlet, a pair of wirings electrically connected to said heat generating resistor so that said pair of wirings supply an electric signal for generating said thermal energy to said heat generating resistor; and a liquid supplying pathway aligned with said electrothermal converting body of said substrate; and an electric signal supplying means for supplying an electric signal to said heat generating resistor of said recording head, wherein said substrate comprises a substrate for a liquid jet head formed by (a) providing a base member constituted by a non-amorphous polycrystalline material, (b) forming a barrier layer comprising an inorganic oxide for controlling the diffusion speed of oxygen gas on a surface of said polycrystalline base member, and (c) thermally oxidizing the surface of said polycrystalline base member through said barrier layer to form a thermal oxide layer on said polycrystalline base member.
Claim 22
Dependent Claim
23 words
A liquid jet recording apparatus according to claim 17, wherein the barrier layer is removed after the formation of the thermal oxide layer.
Claim 23
Dependent Claim
21 words
A liquid jet recording head according to claim 17, wherein the inorganic oxide is titanium oxide, cobalt oxide, or silicon oxide.
Claim 24
Dependent Claim
27 words
A liquid jet recording apparatus according to claim 17, wherein in step (c), the polycrystalline base member is heated at a temperature of 1000° C. or more.
Claim 25
Dependent Claim
21 words
A liquid jet recording apparatus according to claim 14, wherein the barrier layer has a thickness of 0.04 to 10 μm.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-08-25 | 2001-02-24 | 2001-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-25 | 2005-02-24 | 2005-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-25 | 2009-02-24 | 2009-08-26 | $7700.00 | Window Closed / Lapsed |