Patent US5658833A successfully refreshed from Google Patents.
US5658833A
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Method and dummy disc for uniformly depositing silicon nitride
Assignee: United Microelectronics Corp
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Filing: 1996-01-30
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Granted: 1997-08-19
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Expires: 2016-01-30
Abstract
Abstract In a process of fabricating an integrated circuit, a method for uniformly depositing silicon nitride by disposing a plurality of dummy discs beside the production wafers. The dummy discs are made of quartz or silicon carbide. Since the dummy discs can be used longer before been recycled, plenty dummy discs can be saved from disuse. Furthermore, the cost of the management and treatment of the dummy discs is great reduced in this way.
Inventors
- 👤 Shih-Ching Chen
- 👤 Edward Houn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 15:05
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45587; C23C16/45591; C23C16/22; C23C16/30; C23C16/34; C23C16/345; C23C16/4401
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
85 words
In a process of fabricating an integrated circuit, a method for uniformly depositing silicon nitride, comprising the following steps of: disposing a plurality of production wafers in a row having two ends on a paddle; disposing a plurality of dummy discs at said ends of said row of the dummy discs being made of a material selected from the group of quartz and silicon carbide, each dummy disc having at least one hole therein; and depositing silicon nitride on the production wafers in a furnace.
Claim 2
Dependent Claim
85 words
In a process of fabricating an integrated circuit, a method for uniformly depositing silicon nitride, comprising the following steps of: disposing a plurality of production wafers in a row having two ends on a paddle; disposing a plurality of dummy discs at said ends of said row of the dummy discs being made of a material selected from the group of quartz and silicon carbide, each dummy disc having at least one hole therein; and depositing silicon nitride on the production wafers in a furnace.
Claim 3
Dependent Claim
25 words
The method as claimed in claim 1, wherein the dummy discs are substantially circles, each dummy disc having an arc-like notch for indicating its orientation.
Claim 4
Dependent Claim
28 words
The method as claimed in claim 2, wherein the diameter of the dummy discs is about 174 mm, the thickness of the dummy discs is about 3.0 mm.
Claim 5
Dependent Claim
47 words
The method as claimed in claim 3, wherein three structures of the dummy discs are provided, the first structure with a first hole, the second structure with four second holes smaller than the first hole, the third structure with nineteen third holes smaller than the second holes.
Claim 6
Dependent Claim
22 words
The method as claimed in claim 4, wherein the holes are not placed in line in the arrangement of the dummy discs.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-18 | 2001-02-17 | 2001-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-18 | 2005-02-17 | 2005-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-18 | 2009-02-17 | 2009-08-19 | $7700.00 | Window Closed / Lapsed |