US4653650A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rack for supporting wafers for treatment
Assignee: Heraeus Quarzschmelze GmbH
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Filing: 1985-10-23
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Granted: 1987-03-31
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Expires: 2005-10-23
Abstract
Abstract A rack for supporting wafers has a pair of parallel struts with kerfs therealong for supporting the wafers. A dummy wafer is attached to the struts near each end of the struts to connect the struts structurally as the rack and serve as rack-handling handles. The dummy wafers are parallel to the adjacent kerfs and thus the wafers therein and dimensioned similarly to the wafers for providing favorable gas and heat distribution when a wafer loaded rack is placed in a furnace. This adapts the rack for diffusion treatment of semiconductor wafers.
Inventors
- 👤 Karl A. Schulke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:25
CPC Classifications
F; F27; F27D; F27D5/00; F27D5/0006; F27D5/0012; Y; Y10; Y10S; Y10S206/00; Y10S206/832; Y10S206/833
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
137 words
A rack for supporting wafers, comprising: first and second parallel struts having kerfs for supporting wafers transversely therealong; and two dummy wafers, one dummy wafer transversely interconnecting the struts near each end of the struts substantially parallel to the adjacent kerfs, whereby each dummy wafer is substantially parallel to the wafer in the adjacent kerfs and forms at least part of the structure of the rack by joining the struts, each dummy wafer having an extension from the outer surface thereof on the side opposite the adjacent kerfs, the extensions on the dummy wafers being off set from each other, whereby the rack can be placed end to end with another such rack without interference between the extensions of the thereby adjacent dummy wafers and the extensions can be used as a handle for handling the rack.
Claim 2
Dependent Claim
137 words
A rack for supporting wafers, comprising: first and second parallel struts having kerfs for supporting wafers transversely therealong; and two dummy wafers, one dummy wafer transversely interconnecting the struts near each end of the struts substantially parallel to the adjacent kerfs, whereby each dummy wafer is substantially parallel to the wafer in the adjacent kerfs and forms at least part of the structure of the rack by joining the struts, each dummy wafer having an extension from the outer surface thereof on the side opposite the adjacent kerfs, the extensions on the dummy wafers being off set from each other, whereby the rack can be placed end to end with another such rack without interference between the extensions of the thereby adjacent dummy wafers and the extensions can be used as a handle for handling the rack.
Claim 3
Dependent Claim
19 words
The rack of claim 1, wherein the struts project from the outer surface of one of the dummy wafers.
Claim 4
Dependent Claim
17 words
The rack of claim 2, wherein the struts project from the outer surface of each dummy wafer.
Claim 5
Dependent Claim
36 words
The rack of claim 2, and further comprising means located in the outer surface of each dummy wafer in a position which would receive the extension of the other dummy wafer for receiving such an extension.
Claim 6
Dependent Claim
10 words
The rack of claim 3, whrein the extensions are cylindrical.
Claim 7
Dependent Claim
10 words
The rack of claim 3, wherein the extensions are loops.
Claim 8
Dependent Claim
36 words
The rack of claim 3, and further comprising means located in the outer surface of each dummy wafer in a position which would receive the extension of the other dummy wafer for receiving such an extension.
Claim 9
Dependent Claim
36 words
The rack of claim 5, and further comprising means located in the outer surface of each dummy wafer in a position which would receive the extension of the other dummy wafer for receiving such an extension.
Claim 10
Dependent Claim
36 words
The rack of claim 6, and further comprising means located in the outer surface of each dummy wafer in a position which would receive the extension of the other dummy wafer for receiving such an extension.
Claim 11
Dependent Claim
36 words
The rack of claim 1, and further comprising means located in the outer surface of each dummy wafer in a position which would receive the extension of the other dummy wafer for receiving such an extension.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-30 | 1990-09-29 | 1991-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-30 | 1994-09-29 | 1995-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-30 | 1998-09-29 | 1999-03-31 | $7700.00 | Window Closed / Lapsed |