Patent US4756091A successfully refreshed from Google Patents.
Patent US5656848A successfully refreshed from Google Patents.
US5656848A
Expired / Lapsed
US
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High thermal resistance backfill material for hybrid UFPA's
Assignee: Texas Instruments Inc
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Filing: 1995-06-07
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Granted: 1997-08-12
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Expires: 2015-06-07
Abstract
Abstract A porous film 64 is used to thermally insulate sensing integrated circuitry 44 from pixels 34 of an uncooled IR detector hybrid system 30. The porous film 64 is preferably a silicon-dioxide xerogel. A protective film 65 may be deposited on the porous film 64.
Inventors
- 👤 Howard R. Beratan
- 👤 Chih-Chen Cho
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:25
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/20; G01J5/34; H; H10; H10F; H10F39/00; H10F39/011; H10F39/018; H10F39/10; H10F39/12; H10F39/18; H10F39/184; H10F39/1843; H10F39/80; H10F39/803; H10F39/805; H10F39/8057; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
90 words
A hybrid thermal detector structure, comprising: an infrared sensing array comprising at least three thermally sensitive pixels, electrical contacts abutting one side of said pixels, and an optical coating in contact with an opposite side of said pixels; and a sensing integrated circuit structure comprised of integrated circuitry, a porous film deposited on said integrated circuitry, and contact pads electrically connected to said integrated circuitry through said porous film; wherein said electrical contacts of said infrared sensing array are coupled to said contact pads of said sensing integrated circuit structure.
Claim 2
Dependent Claim
90 words
A hybrid thermal detector structure, comprising: an infrared sensing array comprising at least three thermally sensitive pixels, electrical contacts abutting one side of said pixels, and an optical coating in contact with an opposite side of said pixels; and a sensing integrated circuit structure comprised of integrated circuitry, a porous film deposited on said integrated circuitry, and contact pads electrically connected to said integrated circuitry through said porous film; wherein said electrical contacts of said infrared sensing array are coupled to said contact pads of said sensing integrated circuit structure.
Claim 3
Dependent Claim
12 words
The structure of claim 1 wherein said porous material is a xerogel.
Claim 4
Dependent Claim
11 words
The structure of claim 2 wherein said xerogel comprises silicon dioxide.
Claim 5
Dependent Claim
12 words
The structure of claim 1 wherein said porous material is an aerogel.
Claim 6
Dependent Claim
11 words
The structure of claim 4 wherein said aerogel comprises silicon dioxide.
Claim 7
Dependent Claim
16 words
The structure of claim 1 wherein said porous film has a porosity of greater than 80%.
Claim 8
Dependent Claim
19 words
The structure of claim 1 wherein said sensing circuit further comprises a protective film deposited on said porous film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-11 | 2001-02-10 | 2001-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-11 | 2005-02-10 | 2005-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-11 | 2009-02-10 | 2009-08-12 | $7700.00 | Window Closed / Lapsed |