US5656382A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Oriented conductive film and process for preparing the same
Assignee: EpiPhotonics Corp
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Filing: 1996-03-18
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Granted: 1997-08-12
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Expires: 2016-03-18
Abstract
Abstract An oriented conductive thin film useful as a thin film electrode or a thin film resistor is disclosed, comprising an epitaxial or oriented ABO3 type oxide (e.g., BaPbO3) conductive thin film which is obtained by coating a single crystal oxide substrate or a single crystal semiconductor substrate with a solution of a metal oxide precursor comprising an organometallic compound, thermally decomposing the coating layer, followed by annealing. An epitaxial or oriented ABO3 type ferroelectric thin film may further be provided on the conductive thin film.
Inventors
- 👤 Keiichi Nashimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:23
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/47; H10D1/474; H10D1/60; H10D1/68; H10D1/692; H10D1/682; H10N; H10N30/00; H10N30/01; H10N30/06; H10N30/80; H10N30/87; H10N30/877; H10N30/878; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/12535; Y10T428/12583; Y10T428/1259; Y10T428/12771
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
58 words
An oriented conductive thin film comprising an epitaxial or oriented perovskite ABO 3 structure oxide conductive thin film of BaPbO 3 oriented in only one direction which is obtained by coating a single crystal substrate with a solution of a metal oxide precursor comprising an unhydrolyzed organometallic compound, thermally decomposing the coating layer, and annealing the coated substrate.
Claim 2
Dependent Claim
58 words
An oriented conductive thin film comprising an epitaxial or oriented perovskite ABO 3 structure oxide conductive thin film of BaPbO 3 oriented in only one direction which is obtained by coating a single crystal substrate with a solution of a metal oxide precursor comprising an unhydrolyzed organometallic compound, thermally decomposing the coating layer, and annealing the coated substrate.
Claim 3
Dependent Claim
54 words
An oriented conductive thin film as claimed in claim 1, wherein said unhydrolyzed organometallic compound is a mixture of organometallic compounds selected from the group consisting of metal alkoxides and organic acid metal salts, or a reaction product of organometallic compounds selected from the group consisting of metal alkoxides and organic acid metal salts.
Claim 4
Dependent Claim
27 words
An oriented conductive thin film as claimed in claim 1, wherein said single crystal substrate is an oxide single crystal substrate or a semiconductor single crystal substrate.
Claim 5
Dependent Claim
26 words
An oriented conductive thin film as claimed in claim 1, wherein said single crystal substrate has an epitaxial or oriented buffer layer on the surface thereof.
Claim 6
Dependent Claim
33 words
An oriented conductive thin film as claimed in claim 1, wherein said oriented conductive thin film has further an epitaxial or oriented thin film of a perovskite ABO 3 structure ferroelectric substance thereon.
Claim 7
Dependent Claim
48 words
An oriented conductive thin film as claimed in claim 1, wherein said thermal decomposing is carried out by heating the coated substrate at a rate of temperature rise of from 0.1° to 500° C./sec and maintaining the coated substrate at a temperature of from 100° to 500° C.
Claim 8
Dependent Claim
47 words
An oriented conductive thin film as claimed in claim 1, wherein said annealing is carried out by heating the coated substrate at a rate of temperature rise of from 0.1° to 500° C./sec and maintaining the coated substrate at a temperature of from 300° to 1200° C.
Claim 9
Dependent Claim
24 words
An oriented conductive thin film as claimed in claim 1, wherein said oriented conductive thin film has a thickness of up to 0.1 micron.
Claim 10
Dependent Claim
24 words
An oriented conductive thin film as claimed in claim 1, wherein said oriented conductive thin film has a thickness of up to 0.35 micron.
Claim 11
Dependent Claim
24 words
An oriented conductive thin film as claimed in claim 1, wherein said oriented conductive thin film has a thickness of up to 1 micron.
Claim 12
Dependent Claim
21 words
An oriented conductive thin film as claimed in claim 1, wherein said oriented conductive thin film has a cubic crystalline structure.
Claim 13
Dependent Claim
20 words
An oriented conductive thin film as claimed in claim 1, wherein said oriented conductive thin film is a single crystal.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-11 | 2001-02-10 | 2001-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-11 | 2005-02-10 | 2005-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-11 | 2009-02-10 | 2009-08-12 | $7700.00 | Window Closed / Lapsed |