US5651900A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microfabricated particle filter
Assignee: University of California
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Filing: 1994-03-07
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Granted: 1997-07-29
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Expires: 2014-03-07
Abstract
Abstract A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of thin film layers and can therefore be smaller than the limit of resolution obtainable with photolithography. The filters are suitable for use at high temperatures and with many harsh solvents.
Inventors
- 👤 Christopher G. Keller
- 👤 Mauro Ferrari
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:43
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0015; B; B01; B01D; B01D39/00; B01D39/14; B01D39/16; B01D39/1692; B01D39/20; B01D67/00; B01D67/0002; B01D67/0023; B01D67/003; B01D67/0039; B01D67/0053; B01D67/006; B01D67/0062; B01D69/00; B01D69/02; B01D69/12; B01D69/1216; B01D71/00; B01D71/02; B01D71/0215; B01D71/022; C; C23; C23C; C23C16/00; C23C16/01; B01D2325/00; B01D2325/02; B01D2325/021; B01D2325/26; B01D2325/38
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
134 words
A method for fabricating a filter having pores with short pore lengths, comprising: forming a first structural layer over a sacrificial top layer of a substrate; forming a sidewall support sacrificial layer having substantially vertical sidewalls; forming a pore sacrificial layer whose thickness defines a width of said pores; forming a second structural layer covering the vertical sidewalls of said sidewall support sacrificial layer, a thickness of said second structural layer defining a length of said pores; anisotropically etching said second structural layer to remove its horizontal portions; forming an entrance hole sacrificial layer covering a bottom portion of said second structural layer and leaving exposed a top portion of said second structural layer; forming a third structural layer; etching entrance holes in said third structural layer; and etching all of said sacrificial layers.
Claim 2
Independent Claim
134 words
A method for fabricating a filter having pores with short pore lengths, comprising: forming a first structural layer over a sacrificial top layer of a substrate; forming a sidewall support sacrificial layer having substantially vertical sidewalls; forming a pore sacrificial layer whose thickness defines a width of said pores; forming a second structural layer covering the vertical sidewalls of said sidewall support sacrificial layer, a thickness of said second structural layer defining a length of said pores; anisotropically etching said second structural layer to remove its horizontal portions; forming an entrance hole sacrificial layer covering a bottom portion of said second structural layer and leaving exposed a top portion of said second structural layer; forming a third structural layer; etching entrance holes in said third structural layer; and etching all of said sacrificial layers.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein said pore sacrificial layer is formed after etching exit holes in said first structural layer and forming said sidewall support sacrificial layer.
Claim 4
Independent Claim
124 words
A method for fabricating a filter, the method comprising: forming a first thin film structure having openings therethrough, including forming a reinforcing rib in a trench in a substrate adjacent to said first film structure; forming a sacrificial layer over at least part of said first thin film structure; forming a second thin film structure over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings of said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings of said first thin film structure.
Claim 5
Independent Claim
124 words
A method for fabricating a filter, the method comprising: forming a first thin film structure having openings therethrough, including forming a reinforcing rib in a trench in a substrate adjacent to said first film structure; forming a sacrificial layer over at least part of said first thin film structure; forming a second thin film structure over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings of said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings of said first thin film structure.
Claim 6
Dependent Claim
17 words
The method of claim 3 wherein said first thin film structure is grown by chemical vapor deposition.
Claim 7
Independent Claim
111 words
A method for fabricating a filter, the method comprising: providing a first thin film structure having openings therethrough; forming a sacrificial layer over at least part of said first thin film structure; forming a second thin film structure by chemical vapor deposition over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings in said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings in said first thin film structure.
Claim 8
Independent Claim
111 words
A method for fabricating a filter, the method comprising: providing a first thin film structure having openings therethrough; forming a sacrificial layer over at least part of said first thin film structure; forming a second thin film structure by chemical vapor deposition over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings in said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings in said first thin film structure.
Claim 9
Dependent Claim
25 words
The method of claim 5 wherein said step of forming said second thin film structure includes etching back said second thin film structure without patterning.
Claim 10
Dependent Claim
77 words
The method of claim 6 wherein said first and second thin film structures define an exposed surface and further including: after forming said second thin film structure and before etching said sacrificial layer, doping the exposed surface of said first and second thin film structures with boron; and after etching said sacrificial layer, partially etching an undoped portion of said first and second thin film structures; and wherein said first and second thin film structures include silicon.
Claim 11
Independent Claim
143 words
A method for fabricating a filter, the method comprising: providing a first thin film structure having openings therethrough; forming a sacrificial layer over at least part of said first thin film structure, including a step of etching anchoring holes in said sacrificial layer to expose said first thin film structure; at least partially etching through said first thin film structure where it is exposed by said anchoring holes; forming a second thin film structure over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings in said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings in said first thin film structure.
Claim 12
Independent Claim
143 words
A method for fabricating a filter, the method comprising: providing a first thin film structure having openings therethrough; forming a sacrificial layer over at least part of said first thin film structure, including a step of etching anchoring holes in said sacrificial layer to expose said first thin film structure; at least partially etching through said first thin film structure where it is exposed by said anchoring holes; forming a second thin film structure over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings in said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings in said first thin film structure.
Claim 13
Dependent Claim
55 words
The method of claim 8, wherein said etching of said first thin film structure comprises etching completely through said first thin structure, and further including partially etching underneath said first thin film structure where it is exposed by said anchoring holes to provide a space for a rivet-like shape of said second thin film structure.
Claim 14
Independent Claim
146 words
A method for fabricating a filter, the method comprising: providing a first thin film structure having openings therethrough; forming a sacrificial layer over at least part of said first thin film structure; forming a second thin film structure over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings in said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; etching trenches through said first and second thin film structures to form filter islands; applying a polymer matrix on said second thin film structure and in said trenches; curing said polymer matrix; patterning entrance holes in said polymer matrix; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings in said first thin film structure.
Claim 15
Independent Claim
146 words
A method for fabricating a filter, the method comprising: providing a first thin film structure having openings therethrough; forming a sacrificial layer over at least part of said first thin film structure; forming a second thin film structure over said first thin film structure and said sacrificial layer, said sacrificial layer and said second thin film structure blocking said openings in said first thin film structure, and said second thin film structure having second openings therethrough, said second openings exposing a portion of said sacrificial layer; etching trenches through said first and second thin film structures to form filter islands; applying a polymer matrix on said second thin film structure and in said trenches; curing said polymer matrix; patterning entrance holes in said polymer matrix; and etching said sacrificial layer such that said sacrificial layer no longer blocks said openings in said first thin film structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-07-28 | 2001-01-27 | 2001-07-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-07-28 | 2005-01-27 | 2005-07-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-07-28 | 2009-01-27 | 2009-07-29 | $7700.00 | Window Closed / Lapsed |