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US5643638A
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Plasma CVD method of producing a gradient layer
Assignee: Schott AG
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Filing: 1995-12-13
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Granted: 1997-07-01
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Expires: 2015-12-13
Abstract
Abstract The invention relates to a plasma CVD method for producing a gradient layer wherein the layer gradient is produced in the direction of layer growth by changing at least one plasma power parameter during the coating process. According to the invention, thin gradient layers are generated with high precision by supplying the plasma power in a pulsed manner and adjusting the layer gradient by changing the plasma power parameters of pulse amplitude, pulse duration and/or pulse interval.
Inventors
- 👤 Jurgen Otto
- 👤 Johannes Segner
- 👤 Volker Paquet
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:14
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; C08J7/123; C23; C23C; C23C16/00; C23C16/02; C23C16/0272; C23C16/029; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/44; C23C16/50; C23C16/515; C23C16/52; G; G02; G02B; G02B1/00; G02B1/10; G02B1/14
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
94 words
A plasma CVD method for producing a layer wherein a layer composition or structure gradient is generated in the direction of layer growth by changing at least one of plasma power parameters during the coating process, the method comprising the steps of: supplying a plasma power as a power pulse train in a plasma pulse CVD method wherein the pulse train has the parameters of pulse amplitude, pulse width and pulse interval; and, generating said layer gradient of said layer by changing at least one of said pulse amplitude, pulse width and pulse interval.
Claim 2
Dependent Claim
94 words
A plasma CVD method for producing a layer wherein a layer composition or structure gradient is generated in the direction of layer growth by changing at least one of plasma power parameters during the coating process, the method comprising the steps of: supplying a plasma power as a power pulse train in a plasma pulse CVD method wherein the pulse train has the parameters of pulse amplitude, pulse width and pulse interval; and, generating said layer gradient of said layer by changing at least one of said pulse amplitude, pulse width and pulse interval.
Claim 3
Dependent Claim
16 words
The plasma CVD method of claim 1, wherein said layer gradient is in the layer composition.
Claim 4
Dependent Claim
22 words
The plasma CVD method of claim 2, wherein said gradient in said layer is defined by a transition from organic to inorganic.
Claim 5
Dependent Claim
19 words
The plasma CVD method of claim 1, wherein said gradient is a gradient in the structure of said layer.
Claim 6
Dependent Claim
41 words
The plasma CVD method of claim 1, wherein said layer gradient is varied so as to provide a gradient of at least one of the following characteristics: hardness, wattability, refractive index, absorption, porosity, crystal structure, module of elasticity and electrical conductivity.
Claim 7
Dependent Claim
44 words
The plasma CVD method of claim 1, comprising the further steps of: using a coating gas having layer-forming substances; and, changing said plasma parameters during the coating process to vary the portions of said layer-forming substances relative to each other in the deposited layer.
Claim 8
Dependent Claim
36 words
The plasma CVD method of claim 1, comprising the further step of depositing a coating from a coating gas which contains at least one metal-organic layer-forming substance to produce a scratch-protective layer for plastic spectacle lenses.
Claim 9
Dependent Claim
16 words
The plasma CVD method of claim 7, wherein said metal-organic layer forming substance is hexamethylsiloxane (HMDSO).
Claim 10
Dependent Claim
30 words
The plasma CVD method of claim 8, comprising the further step of adding to said coating gas oxygen, nitrogen and/or a gas which releases oxygen and/or nitrogen in the plasma.
Claim 11
Dependent Claim
22 words
The plasma CVD method of claim 9, the method comprising the further step of exciting said plasma by means of microwave radiation.
Claim 12
Dependent Claim
18 words
The plasma CVD method of claim 10, wherein the excitation frequency of said microwave radiation is 2.45 GHz.
Claim 13
Dependent Claim
24 words
The plasma CVD method of claim 7, wherein said gradient of said layer is generated by changing the pulse width during the coating process.
Claim 14
Dependent Claim
18 words
The plasma CVD method of claim 12, wherein said pulse width is varied between 0.1 and 0.2 msec.
Claim 15
Dependent Claim
20 words
The plasma CVD method of claim 7, wherein the composition of said coating gas is changed during the coating process.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-30 | 2000-12-30 | 2001-07-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-30 | 2004-12-30 | 2005-07-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-30 | 2008-12-30 | 2009-07-01 | $7700.00 | Window Closed / Lapsed |