US5217749A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making polymer thin films for optical uses
Assignee: Wisconsin Alumni Research Foundation
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Filing: 1991-09-24
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Granted: 1993-06-08
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Expires: 2011-09-24
Abstract
Abstract A method is disclosed for the deposition of plasma films in which the optical index of refraction of the deposited film can be varied continuously or discontinuously as the material is deposited. The change in refractive index is accomplished by changing the input power applied to the plasma chamber. The method can be used to create optical wave guides from material of a single input monomer vapor.
Inventors
- 👤 Denice D. Denton
- 👤 Jeffrey A. Tobin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 00:34
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/1221; B05D2502/00; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
107 words
A method for the creation of organic optical thin films of varying index of refraction comprising the steps of (a) drawing a vacuum in a plasma chamber including a pair of spaced electrodes; (b) introducing an organic monomer vapor into the chamber; (c) applying a first level of radio frequency electric power to one of the electrodes under conditions favoring creation of a plasma from the monomer vapor and the deposition of the monomer vapor as a film on at least one of the electrodes; and (d) varying the level of the power applied to the electrode to vary the refractive index of the film being deposited.
Claim 2
Independent Claim
107 words
A method for the creation of organic optical thin films of varying index of refraction comprising the steps of (a) drawing a vacuum in a plasma chamber including a pair of spaced electrodes; (b) introducing an organic monomer vapor into the chamber; (c) applying a first level of radio frequency electric power to one of the electrodes under conditions favoring creation of a plasma from the monomer vapor and the deposition of the monomer vapor as a film on at least one of the electrodes; and (d) varying the level of the power applied to the electrode to vary the refractive index of the film being deposited.
Claim 3
Dependent Claim
18 words
A method as claimed in claim 1 wherein the chamber includes a ground shield around the powered electrode.
Claim 4
Dependent Claim
24 words
A method as claimed in claim 1 wherein a substrate is placed on one of the electrodes so that deposition occurs on the substrate.
Claim 5
Dependent Claim
16 words
A method as claimed in claim 3 wherein the substrate is placed upon the grounded electrode.
Claim 6
Dependent Claim
14 words
A method as claimed in claim 1 wherein the monomer vapor is methyl methacrylate.
Claim 7
Dependent Claim
28 words
A method as claimed in claim 1 wherein the density of the plasma in the chamber is also varied to vary the index of refraction in the film.
References Cited (Backward Citations)
US3822928A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |