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US5633516A
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Lattice-mismatched crystal structures and semiconductor device using the same
Assignee: Renesas Electronics Corp
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Filing: 1995-07-24
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Granted: 1997-05-27
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Expires: 2015-07-24
Abstract
Abstract A semiconductor device has a lattice-mismatched crystal structure including a semiconductor film formed on a substrate with an intervening buffer layer. The buffer layer has a plurality of layers, including first sublayers, or regions, in which an element that controls the lattice constant is provided in increasing mole fraction, and second sublayers, or regions, in which the lattice constant is maintained. The first sublayers and second sublayers are provided in alternating fashion. The resulting device has an increased electron mobility as compared with the prior art.
Inventors
- 👤 Tomoyoshi Mishima
- 👤 Katsuhiko Higuchi
- 👤 Mitsuhiro Mori
- 👤 Makoto Kudo
- 👤 Chushiro Kusano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:39
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/40; H10D30/47; H10D62/00; H10D62/80; H10D62/82; H10D62/824; H10D30/471; H10D30/473; H10D30/4732; H01; H01S; H01S5/00; H01S5/20; H01S5/22; H01S5/223; H01S5/30; H01S5/32; H01S5/3201
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
181 words
A lattice-mismatched crystal structure, comprising: a substrate crystal; a semiconductor buffer layer 1 μm thick or less on the substrate crystal; and a semiconductor film having a lattice constant different from that of the substrate crystal in the direction parallel to a face of the substrate crystal; wherein the buffer layer includes a plurality of first regions and a plurality of second regions formed in multilayer, the lattice constants of the first regions in a direction parallel to the substrate crystal face increasing toward the semiconductor film in a layer stacking direction; wherein the first regions have a thickness sufficient to relax the lattice strain resulting from lattice mismatch with the substrate crystal; wherein the second regions are formed on and in contact with the semiconductor-film-side of respective ones of the first regions, the lattice constants of the second regions in the direction parallel to the substrate crystal face being constant in the layer stacking direction, and wherein the lattice constant of the buffer layer in the direction parallel to the substrate crystal face is continuous in the layer stacking direction.
Claim 2
Dependent Claim
181 words
A lattice-mismatched crystal structure, comprising: a substrate crystal; a semiconductor buffer layer 1 μm thick or less on the substrate crystal; and a semiconductor film having a lattice constant different from that of the substrate crystal in the direction parallel to a face of the substrate crystal; wherein the buffer layer includes a plurality of first regions and a plurality of second regions formed in multilayer, the lattice constants of the first regions in a direction parallel to the substrate crystal face increasing toward the semiconductor film in a layer stacking direction; wherein the first regions have a thickness sufficient to relax the lattice strain resulting from lattice mismatch with the substrate crystal; wherein the second regions are formed on and in contact with the semiconductor-film-side of respective ones of the first regions, the lattice constants of the second regions in the direction parallel to the substrate crystal face being constant in the layer stacking direction, and wherein the lattice constant of the buffer layer in the direction parallel to the substrate crystal face is continuous in the layer stacking direction.
Claim 3
Dependent Claim
85 words
A lattice-mismatched crystal structure as claimed in claim 1, wherein the lattice constants of the first and second regions in the direction parallel to the substrate crystal face are controlled by the composition of component elements common to the first and second regions, and the composition of the common component elements is greater in at least one first region in the vicinity of the interface between the at least one first region and a second region in contact therewith than that in the second region.
Claim 4
Dependent Claim
34 words
A lattice-mismatched crystal structure as claimed in claim 2, wherein the substrate crystal is formed of GaAs, the buffer layer is of InAlAs, and the closest-to-buffer side of the semiconductor film is of InGaAs.
Claim 5
Dependent Claim
38 words
A lattice-mismatched crystal structure as claimed in claim 2, wherein the substrate crystal is formed of GaAs, and the buffer layer and the closest-to-buffer side of the semiconductor film are of InAlGaAs with different group III element contents.
Claim 6
Dependent Claim
22 words
A semiconductor device including an active region formed in the semiconductor film in the lattice-mismatched crystal structure as claimed in claim 2.
Claim 7
Dependent Claim
33 words
A semiconductor device as claimed in claim 5, wherein the substrate crystal is formed of GaAs, the buffer layer is of InAlAs, and the closest-to-buffer side of the semiconductor film is of InGaAs.
Claim 8
Dependent Claim
133 words
A semiconductor device as claimed in claim 6, further comprising a field effect transistor; wherein the substrate crystal is formed of semi-insulating GaAs; the buffer layer is of an undoped InAlAs; and the semiconductor film includes, from the substrate crystal, in order, an undoped InGaAs channel layer, an undoped InAlAs spacer layer, an n-type InAlAs carrier supplying layer, an undoped InAlAs layer, and an n-type InGaAs cap layer, the n-type InGaAs cap layer being divided into a source and a drain region so that the undoped InAlAs layer under the n-type InGaAs cap layer may be exposed in the gate region, a source and a drain electrode respectively formed in the source and drain regions of the cap layer, and a gate electrode formed on the exposed portion of the undoped InAlAs layer.
Claim 9
Dependent Claim
36 words
A semiconductor device as claimed in claim 7, wherein the ratio of thickness of the first regions of the InAlAs buffer layer to the total thickness of the InAlAs buffer layer ranges from 0.1 to 0.45.
Claim 10
Dependent Claim
37 words
A semiconductor device as claimed in claim 5, wherein the substrate crystal is formed of GaAs, and the buffer layer and the closest-to-buffer side of the semiconductor film are of InAlGaAs with different Group III element contents.
Claim 11
Dependent Claim
99 words
A semiconductor device as claimed in claim 9, further comprising a semiconductor laser; wherein the substrate crystal is formed of n-type GaAs; the buffer layer is of n-type InGaAs; and the semiconductor film crystal includes, from the substrate crystal in order an n-type InAlGaAs graded layer, an n-type InAlAs clad layer, an undoped InAlGaAs GRIN layer, an undoped InGaAs active layer, an undoped InAlGaAs GRIN layer, a p-type InAlAs clad layer, a p-type InAlGaAs graded layer and a p-type InGaAs contact layer, and ohmic electrodes each formed on an n-type GaAs substrate crystal and a p-type InGaAs contact layer.
Claim 12
Dependent Claim
34 words
A lattice-mismatched crystal structure as claimed in claim 1, wherein the substrate crystal is formed of GaAs, the buffer layer is of InAlAs, and the closest-to-buffer side of the semiconductor film is of InGaAs.
Claim 13
Dependent Claim
38 words
A lattice-mismatched crystal structure as claimed in claim 1, wherein the substrate crystal is formed of GaAs, and the buffer layer and the closest-to-buffer side of the semiconductor film are of InAlGaAs with different Group III element contents.
Claim 14
Dependent Claim
22 words
A semiconductor device including an active region formed in the semiconductor film in the lattice-mismatched crystal structure as claimed in claim 1.
Claim 15
Dependent Claim
33 words
A semiconductor device as claimed in claim 13, wherein the substrate crystal is formed of GaAs, the buffer layer is of InAlAs, and the closest-to-buffer side of the semiconductor film is of InGaAs.
Claim 16
Dependent Claim
133 words
A semiconductor device as claimed in claim 14, further comprising a field effect transistor; wherein the substrate crystal is formed of semi-insulating GaAs; the buffer layer is of an undoped InAlAs; and the semiconductor film includes, from the substrate crystal, in order, an undoped InGaAs channel layer, an undoped InAlAs spacer layer, an n-type InAlAs carrier supplying layer, an undoped InAlAs layer, and an n-type InGaAs cap layer, the n-type InGaAs cap layer being divided into a source and a drain region so that the undoped InAlAs layer under the n-type InGaAs cap layer may be exposed in the gate region, a source and a drain electrode respectively formed in the source and drain regions of the cap layer, and a gate electrode formed on the exposed portion of the undoped InAlAs layer.
Claim 17
Dependent Claim
36 words
A semiconductor device as claimed in claim 15, wherein the ratio of thickness of the first regions of the InAlAs buffer layer to the total thickness of the InAlAs buffer layer ranges from 0.1 to 0.45.
Claim 18
Dependent Claim
37 words
A semiconductor device as claimed in claim 13, wherein the substrate crystal is formed of GaAs, and the buffer layer and the closest-to-buffer side of the semiconductor film are of InAlGaAs with different Group III element contents.
Claim 19
Dependent Claim
99 words
A semiconductor device as claimed in claim 17, further comprising a semiconductor laser; wherein the substrate crystal is formed of n-type GaAs; the buffer layer is of n-type InGaAs; and the semiconductor film crystal includes, from the substrate crystal, in order, an n-type InAlGaAs graded layer, an n-type InAlAs clad layer, an undoped InAlGaAs GRIN layer, an undoped InGaAs active layer, an undoped InAlGaAs GRIN layer, a p-type InAlAs clad layer, a p-type InAlGaAs graded layer and a p-type InGaAs contact layer, and ohmic electrodes each formed on an n-type GaAs substrate crystal and a p-type InGaAs contact layer.
Claim 20
Dependent Claim
163 words
A semiconductor wafer, comprising: a multilayer semiconductor layer on a substrate crystal; wherein the semiconductor layer includes a plurality of first regions and a plurality of second regions formed in multilayer in a layer stacking direction, the lattice constants of the first regions in the direction parallel to a face of the substrate crystal being different from that of the substrate crystal and increasing toward the semiconductor film crystal in the layer stacking direction; wherein the first regions have such a thickness as to relax the lattice strain resulting from the lattice mismatch with the substrate crystal; wherein the second regions are formed on and in contact with the opposite-to-the-substrate-crystal side of the first regions, the lattice constants of the second regions in the direction parallel to the substrate crystal face being constant in the layer stacking direction; and wherein the lattice constant of the semiconductor layer in the direction parallel to the substrate crystal face is continuous in the layer stacking direction.
Claim 21
Dependent Claim
163 words
A semiconductor wafer, comprising: a multilayer semiconductor layer on a substrate crystal; wherein the semiconductor layer includes a plurality of first regions and a plurality of second regions formed in multilayer in a layer stacking direction, the lattice constants of the first regions in the direction parallel to a face of the substrate crystal being different from that of the substrate crystal and increasing toward the semiconductor film crystal in the layer stacking direction; wherein the first regions have such a thickness as to relax the lattice strain resulting from the lattice mismatch with the substrate crystal; wherein the second regions are formed on and in contact with the opposite-to-the-substrate-crystal side of the first regions, the lattice constants of the second regions in the direction parallel to the substrate crystal face being constant in the layer stacking direction; and wherein the lattice constant of the semiconductor layer in the direction parallel to the substrate crystal face is continuous in the layer stacking direction.
Claim 22
Dependent Claim
23 words
A semiconductor wafer as claimed in claim 19, wherein the substrate crystal is formed of GaAs, and the semiconductor layer is of InAlGaAs.
Claim 23
Dependent Claim
80 words
A semiconductor wafer as claimed in claim 19, wherein the lattice constants of the first and second regions in the direction parallel to the substrate crystal face are controlled by the composition of component elements common to the first and second regions, and the composition of the common component elements is greater in the vicinity of at least one interface between the first and second regions than that in the second region in contact with at least one first region.
Claim 24
Dependent Claim
23 words
A semiconductor wafer as claimed in claim 21, wherein the substrate crystal is formed of GaAs, and the semiconductor layer is of InAlGaAs.
Claim 25
Dependent Claim
23 words
A semiconductor wafer as claimed in claim 21, wherein the substrate crystal is formed of GaAs, and the semiconductor layer is of InAlAs.
Claim 26
Dependent Claim
23 words
A semiconductor wafer as claimed in claim 19, wherein the substrate crystal is formed of GaAs, and the semiconductor layer is of InAlAs.
Claim 27
Dependent Claim
111 words
A lattice-mismatched crystal structure, comprising: a substrate; a multilayered buffer layer including alternating sublayers, every other sublayer beginning with the sublayer contacting the substrate having a lattice strain-absorbing characteristic characterized by respective lattice constants that increase in a direction perpendicularly away from a plane of the substrate, and the other sublayers having a lattice-absorbing characteristic characterized by lattice constants that are each unchanging in the direction perpendicular to the plane of the substrate; and a plurality of layers formed on said buffer layer, each of said plurality of layers having a lattice constant that is different from a lattice constant of the substrate in a direction parallel to the substrate plane.
Claim 28
Dependent Claim
111 words
A lattice-mismatched crystal structure, comprising: a substrate; a multilayered buffer layer including alternating sublayers, every other sublayer beginning with the sublayer contacting the substrate having a lattice strain-absorbing characteristic characterized by respective lattice constants that increase in a direction perpendicularly away from a plane of the substrate, and the other sublayers having a lattice-absorbing characteristic characterized by lattice constants that are each unchanging in the direction perpendicular to the plane of the substrate; and a plurality of layers formed on said buffer layer, each of said plurality of layers having a lattice constant that is different from a lattice constant of the substrate in a direction parallel to the substrate plane.
Claim 29
Dependent Claim
46 words
A lattice-mismatched crystal structure according to claim 25, wherein the buffer layer includes indium in a concentration that increases linearly in each sublayer having an increasing lattice constant up to the beginning of the next sublayer in the buffer layer that has an unchanging lattice constant.
Claim 30
Dependent Claim
50 words
A lattice-mismatched crystal structure according to claim 25, wherein the buffer layer includes indium in a concentration that increases in each sublayer having an increasing lattice constant up to a level higher than the indium concentration in the next sublayer in the buffer layer that has an unchanging lattice constant.
Claim 31
Dependent Claim
15 words
A lattice-mismatched crystal structure according to claim 25, wherein the substrate is a GaAs crystal.
Claim 32
Dependent Claim
30 words
A lattice-mismatched crystal structure according to claim 28, wherein the buffer layer comprises InAlAs, and wherein the layer formed on the buffer layer in contact therewith is formed of InGaAs.
Claim 33
Dependent Claim
29 words
A lattice-mismatched crystal structure according to claim 28, wherein the buffer layer comprises InGaAs, and the layer formed on the buffer layer in contact therewith is formed of InAlGaAs.
Claim 34
Dependent Claim
30 words
A lattice-mismatched crystal structure according to claim 28, wherein the buffer layer comprises InAlGaAs, and wherein the layer formed on the buffer layer in contact therewith is formed of InGaAs.
Claim 35
Dependent Claim
30 words
A lattice-mismatched crystal structure according to claim 28, wherein the buffer layer comprises InAlGaAs, and wherein the layer formed on the buffer layer in contact therewith is formed of InAlGaAs.
References Cited (Backward Citations)
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