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US5616423A
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Ceramic substrate having a multilayered metallic thin film
Assignee: Nippon Steel Corp
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Filing: 1994-07-06
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Granted: 1997-04-01
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Expires: 2014-07-06
Abstract
Abstract A ceramic substrate has a five-layered thin metallic film thereon. The first layer is Ti, Zr, Cr and/or W; the second layer is Ni and/or Mo; the third layer is one or more metals of group Ib in the periodic table; the fourth layer contains the same metals as the second layer and the fifth layer contains the same metals as the third layer.
Inventors
- 👤 Akira Sanjyou
- 👤 Yasuo Nakatsuka
- 👤 Yasuyuki Morita
- 👤 Koichi Uno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:16
CPC Classifications
B; B32; B32B; B32B15/00; B32B15/01; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K1/09; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12535; Y10T428/12611; Y10T428/12632; Y10T428/12771; Y10T428/12806; Y10T428/12826; Y10T428/1284; Y10T428/12847; Y10T428/12854; Y10T428/12861; Y10T428/12882; Y10T428/12903; Y10T428/1291; Y10T428/12944
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
131 words
A ceramic substrate having a five-layered metallic film thereon, wherein: the first layer on the ceramic substrate has a thickness of 0.05-0.20 μm and comprises at least one metal selected from the group consisting of Ti, Zr, Cr and W; the second layer has a thickness of 0.10-0.20 μm and comprises at least one metal selected from the group consisting of Ni and Mo; the third layer has a thickness of 0.01-0.02 μm and comprises at least one metal selected from the group consisting of the elements of group Ib in the periodic table; the fourth layer has a thickness of 0.01-0.30 μm and comprises the same metals as the second layer; and the fifth layer has a thickness of 0.20-0.50 μm and comprises the same metals as the third layer.
Claim 2
Dependent Claim
131 words
A ceramic substrate having a five-layered metallic film thereon, wherein: the first layer on the ceramic substrate has a thickness of 0.05-0.20 μm and comprises at least one metal selected from the group consisting of Ti, Zr, Cr and W; the second layer has a thickness of 0.10-0.20 μm and comprises at least one metal selected from the group consisting of Ni and Mo; the third layer has a thickness of 0.01-0.02 μm and comprises at least one metal selected from the group consisting of the elements of group Ib in the periodic table; the fourth layer has a thickness of 0.01-0.30 μm and comprises the same metals as the second layer; and the fifth layer has a thickness of 0.20-0.50 μm and comprises the same metals as the third layer.
Claim 3
Dependent Claim
21 words
A ceramic substrate having a five-layered metallic film thereon according to claim 1, wherein the ceramic substrate is an alumina substrate.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-03-31 | 2000-09-30 | 2001-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-31 | 2004-09-30 | 2005-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-31 | 2008-09-30 | 2009-04-01 | $7700.00 | Window Closed / Lapsed |