US5608773A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask holding device, and an exposure apparatus and a device manufacturing method using the device
Assignee: Canon Inc
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Filing: 1994-11-29
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Granted: 1997-03-04
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Expires: 2014-11-29
Abstract
Abstract A mask for exposure is supported at three positions on a holding surface of a mask chuck of an X-ray exposure apparatus by means of kinematic mounting. Magnetic units, each comprising an electromagnet, and magnetic rings are provided around supporting points at the three,positions on the mask chuck and on the mask frame, respectively. It is thereby possible to generate a tensile force to magnetically attract the mask frame in the direction of the normal of the holding surface of the mask chuck, and to attract and hold the mask on the mask chuck. Thus, the mask can be chucked on the X-ray exposure apparatus in substantially the same state as that of a mechanical clamp on an electron beam (EB) scanning apparatus while the mask is manufactured, without using a mechanical clamping mechanism.
Inventors
- 👤 Nobusige Korenaga
- 👤 Kouichi Hara
- 👤 Shinichi Hara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 04:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
53 words
A mask holding device comprising: a holding surface for supporting a mask at three positions, wherein the mask includes a conical-hole portion, a V-groove portion and flat portion; and force generation means, provided at positions corresponding to the three positions, for generating a non-mechanical force to pull the mask toward said holding surface.
Claim 2
Dependent Claim
53 words
A mask holding device comprising: a holding surface for supporting a mask at three positions, wherein the mask includes a conical-hole portion, a V-groove portion and flat portion; and force generation means, provided at positions corresponding to the three positions, for generating a non-mechanical force to pull the mask toward said holding surface.
Claim 3
Dependent Claim
16 words
A device according to claim 1, wherein said force generation means comprises a magnetic attraction mechanism.
Claim 4
Dependent Claim
16 words
A device according to claim 1, wherein said force generation means comprises a vacuum attraction mechanism.
Claim 5
Dependent Claim
20 words
A device according to claim 1, further comprising spheres provided at the positions between the mask and the holding surface.
Claim 6
Dependent Claim
81 words
An exposure apparatus comprising: a mask holding apparatus comprising: a holding surface for supporting a mask at three positions, wherein the mask includes a conical-hole portion, a V-groove portion and a flat portion; and force generation means, provided at positions corresponding to the three positions, for generating a non-mechanical force to pull the mask toward said holding surface; and exposure means for exposing and transferring a transfer pattern provided on the mask held on said mask holding device onto a wafer.
Claim 7
Dependent Claim
81 words
An exposure apparatus comprising: a mask holding apparatus comprising: a holding surface for supporting a mask at three positions, wherein the mask includes a conical-hole portion, a V-groove portion and a flat portion; and force generation means, provided at positions corresponding to the three positions, for generating a non-mechanical force to pull the mask toward said holding surface; and exposure means for exposing and transferring a transfer pattern provided on the mask held on said mask holding device onto a wafer.
Claim 8
Dependent Claim
14 words
An apparatus according to claim 5, wherein said exposure means performs exposure with X-rays.
Claim 9
Dependent Claim
94 words
A mask holding method for holding a mask vertically, against gravity, said method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; first pressing the conical-hole portion among the three portions against a corresponding projection of a mask chuck, wherein the conical-hole portion is arranged to be the uppermost of the three portions on the mask; and thereafter, pressing the V-groove portion and the flat portion against corresponding ones of three projections provided on the mask chuck, to hold the mask at the three positions.
Claim 10
Dependent Claim
94 words
A mask holding method for holding a mask vertically, against gravity, said method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; first pressing the conical-hole portion among the three portions against a corresponding projection of a mask chuck, wherein the conical-hole portion is arranged to be the uppermost of the three portions on the mask; and thereafter, pressing the V-groove portion and the flat portion against corresponding ones of three projections provided on the mask chuck, to hold the mask at the three positions.
Claim 11
Dependent Claim
38 words
A method according to claim 7, further comprising pressing the V-groove portion on the mask against a corresponding projection of the mask chuck after the conical-hole portion has been pressed against a corresponding projection of the mask chuck.
Claim 12
Dependent Claim
14 words
A method according to claim 7, further comprising vertically holding the mask against gravity.
Claim 13
Dependent Claim
16 words
A method according to claim 7, wherein the mask comprises an X-ray mask for X-ray lithography.
Claim 14
Dependent Claim
75 words
A mask holding method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; and engaging the conical-hole portion, the V-groove portion and the flat portion provided on the mask with three projections provided on a mask chuck and pressing them against each other, to vertically hold the mask at three positions against gravity, wherein the conical-hole portion among the three portions has the largest pressing force.
Claim 15
Dependent Claim
75 words
A mask holding method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; and engaging the conical-hole portion, the V-groove portion and the flat portion provided on the mask with three projections provided on a mask chuck and pressing them against each other, to vertically hold the mask at three positions against gravity, wherein the conical-hole portion among the three portions has the largest pressing force.
Claim 16
Dependent Claim
16 words
A method according to claim 11, wherein the V-groove portion has the second largest pressing force.
Claim 17
Dependent Claim
15 words
A method according to claim 11, wherein the flat portion has the smallest pressing force.
Claim 18
Dependent Claim
16 words
A method according to claim 11, wherein the mask comprises an X-ray mask for X-ray lithography.
Claim 19
Dependent Claim
72 words
A mask holding method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion, the conical-hole portion being the uppermost portion on the mask; and engaging the conical-hole portion, the V-groove portion and the flat portion provided on the mask with three projections provided on a mask chuck and pressing them against each other, to vertically hold the mask at three positions against gravity.
Claim 20
Dependent Claim
72 words
A mask holding method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion, the conical-hole portion being the uppermost portion on the mask; and engaging the conical-hole portion, the V-groove portion and the flat portion provided on the mask with three projections provided on a mask chuck and pressing them against each other, to vertically hold the mask at three positions against gravity.
Claim 21
Dependent Claim
16 words
A method according to claim 15, wherein the mask comprises an X-ray mask for X-ray lithography.
Claim 22
Dependent Claim
62 words
A mask for being held vertically, against gravity, said mask comprising: a transfer pattern; a mask frame having a holding surface; and a conical-hole portion, a V-groove portion and a flat portion provided at three positions on said holding surface, wherein an angle of said conical-hole portion is greater than an angle of said V-groove portion, with respect to said holding surface.
Claim 23
Dependent Claim
62 words
A mask for being held vertically, against gravity, said mask comprising: a transfer pattern; a mask frame having a holding surface; and a conical-hole portion, a V-groove portion and a flat portion provided at three positions on said holding surface, wherein an angle of said conical-hole portion is greater than an angle of said V-groove portion, with respect to said holding surface.
Claim 24
Dependent Claim
15 words
A mask according to claim 17, wherein the mask comprises a mask for X-ray lithography.
Claim 25
Dependent Claim
35 words
A mask holding method comprising the steps of: providing a mask having a conical-hole portion, a V-groove portion and a flat portion; and generating a non-mechanical force to pull the mask toward a holding surface.
Claim 26
Dependent Claim
35 words
A mask holding method comprising the steps of: providing a mask having a conical-hole portion, a V-groove portion and a flat portion; and generating a non-mechanical force to pull the mask toward a holding surface.
Claim 27
Dependent Claim
22 words
A method according to claim 19, wherein the non-mechanical force is one of a magnetic attraction force and a vacuum attraction force.
Claim 28
Dependent Claim
16 words
A method according to claim 19, wherein the mask is an X-ray mask for X-ray lithography.
Claim 29
Independent Claim
110 words
A method for manufacturing micro-devices, comprising: (i) holding a mask vertically, against gravity, by a method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; first pressing the conical-hole portion among the three portions against a corresponding projection of a mask chuck, wherein the conical-hole portion is arranged to be the uppermost of the three portions on the mask; thereafter, pressing the V-groove portion and the flat portion against corresponding ones of three projections provided on the mask chuck, to hold the mask at three positions; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
Claim 30
Independent Claim
110 words
A method for manufacturing micro-devices, comprising: (i) holding a mask vertically, against gravity, by a method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; first pressing the conical-hole portion among the three portions against a corresponding projection of a mask chuck, wherein the conical-hole portion is arranged to be the uppermost of the three portions on the mask; thereafter, pressing the V-groove portion and the flat portion against corresponding ones of three projections provided on the mask chuck, to hold the mask at three positions; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
Claim 31
Independent Claim
98 words
A method for manufacturing micro-devices, comprising: (i) holding a mask by a method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; engaging the conical-hole portion, the V-groove portion and the flat portion provided on the mask with three projections provided on a mask chuck and pressing them against each other, to vertically hold the mask at three positions against gravity, wherein the conical-hole portion among the three portions has the largest pressing force; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
Claim 32
Independent Claim
98 words
A method for manufacturing micro-devices, comprising: (i) holding a mask by a method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; engaging the conical-hole portion, the V-groove portion and the flat portion provided on the mask with three projections provided on a mask chuck and pressing them against each other, to vertically hold the mask at three positions against gravity, wherein the conical-hole portion among the three portions has the largest pressing force; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
Claim 33
Independent Claim
81 words
A method for manufacturing micro-devices, comprising: (i) holding a mask vertically, against gravity, the mask comprising: a transfer pattern; a mask frame having a holding surface; a conical-hole portion, a V-groove portion and a flat portion provided at three positions on said holding surface, wherein an angle of said conical-hole portion is greater than an angle of said V-groove portion, with respect to said holding surface; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
Claim 34
Independent Claim
81 words
A method for manufacturing micro-devices, comprising: (i) holding a mask vertically, against gravity, the mask comprising: a transfer pattern; a mask frame having a holding surface; a conical-hole portion, a V-groove portion and a flat portion provided at three positions on said holding surface, wherein an angle of said conical-hole portion is greater than an angle of said V-groove portion, with respect to said holding surface; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
Claim 35
Independent Claim
59 words
A method for manufacturing micro-devices, comprising (i) holding a mask by a method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; and generating a non-mechanical force to pull the mask toward a holding surface; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
Claim 36
Independent Claim
59 words
A method for manufacturing micro-devices, comprising (i) holding a mask by a method comprising the steps of: providing a mask with a conical-hole portion, a V-groove portion and a flat portion; and generating a non-mechanical force to pull the mask toward a holding surface; and (ii) transferring a pattern of the mask onto a substrate with an exposure operation.
References Cited (Backward Citations)
US4372248A
Cited
US4633810A
Cited
US4544311A
Cited
US4534047A
Cited
US4682277A
Cited
US5026239A
Cited
US5073912A
Cited
US5253012A
Cited
US5161177A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-03 | 2000-09-02 | 2001-03-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-03 | 2004-09-02 | 2005-03-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-03 | 2008-09-02 | 2009-03-04 | $7700.00 | Window Closed / Lapsed |