US5026239A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask cassette and mask cassette loading device
Assignee: Canon Inc
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Filing: 1989-09-05
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Granted: 1991-06-25
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Expires: 2009-09-05
Abstract
Abstract A mask cassette and mask cassette loading device, suitably usable in an X-ray exposure apparatus for exposing a wafer to a mask with X-rays contained in synchrotron radiation, to print a pattern of the mask on the wafer, are disclosed. The mask cassette includes a base for accommodating a plurality masks and a cover which can be separated from and coupled to the base only in one direction. When the two are coupled by a locking mechanism, the cassette can be completely closed against atmospheric pressure. The mask cassette loading device includes a common mechanism which serves to release the locking mechanism of the cassette and also, to move the cassette base relative to the cover. Thus, with a simple and compact structure, the protection and replacement of X-ray masks are ensured with certainty.
Inventors
- 👤 Yuji Chiba
- 👤 Hidehiko Fujioka
- 👤 Nobutoshi Mizusawa
- 👤 Takao Kariya
- 👤 Isamu Shimoda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 06:56
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/70741; G03F7/708; G03F7/70858; G03F7/70866; H10P72/3308; H10P72/34; H10P72/3411; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
79 words
A device for loading a mask cassette for accommodating therein, a mask for use in the manufacture of semiconductor chips, said device comprising: a chamber isolated from a surrounding atmosphere; and a driving mechanism for separating, in said chamber, the mask cassette into a cassette major part and a cover, said driving mechanism comprising means for moving the cassette major part and the cover relative to each other, to position the cassette major part above the cover after separation.
Claim 2
Independent Claim
79 words
A device for loading a mask cassette for accommodating therein, a mask for use in the manufacture of semiconductor chips, said device comprising: a chamber isolated from a surrounding atmosphere; and a driving mechanism for separating, in said chamber, the mask cassette into a cassette major part and a cover, said driving mechanism comprising means for moving the cassette major part and the cover relative to each other, to position the cassette major part above the cover after separation.
Claim 3
Dependent Claim
20 words
A device according to claim 1, wherein said driving mechanism further comprises means for vertically moving the cassette major part.
Claim 4
Dependent Claim
36 words
A device according to claim 1, wherein said chamber is provided with an inlet for introducing at least one type of gas into said chamber, and a pressure gauge for measuring the pressure in said chamber.
Claim 5
Dependent Claim
22 words
A device according to claim 3, wherein the gas introduced into said chamber comprises at least one of nitrogen, helium and argon.
Claim 6
Dependent Claim
82 words
A mask cassette, comprising: a base portion for holding at least two X-ray masks; a cover portion disengageably engageable with said base portion for enclosing the masks held by said base portion when said cover portion is engaged with said base portion; and a locking mechanism for selectively locking said base portion and said cover portion when engaged, said locking portion being provided in a downstream direction, away from the direction in which said cover portion is disengaged from said base portion.
Claim 7
Dependent Claim
82 words
A mask cassette, comprising: a base portion for holding at least two X-ray masks; a cover portion disengageably engageable with said base portion for enclosing the masks held by said base portion when said cover portion is engaged with said base portion; and a locking mechanism for selectively locking said base portion and said cover portion when engaged, said locking portion being provided in a downstream direction, away from the direction in which said cover portion is disengaged from said base portion.
Claim 8
Dependent Claim
23 words
A cassette according to claim 5, further comprising a sealing member provided at an abutment between said cover portion and said base portion.
Claim 9
Dependent Claim
27 words
A cassette according to claim 6, wherein said sealing member is resistive to at least outside pressure when said cover portion is engaged with said base portion.
Claim 10
Dependent Claim
17 words
A cassette according to claim 5, wherein said cover portion is provided with at least one valve.
Claim 11
Dependent Claim
19 words
A device according to claim 1, wherein said driving mechanism comprises a drive source disposed outside of said chamber.
Claim 12
Dependent Claim
18 words
A mask cassette according to claim 5, wherein said base portion comprises means for vertically holding the mask.
Claim 13
Dependent Claim
156 words
A dust-protective mask loading method for use with an X-ray lithographic apparatus for manufacturing semiconductor devices, said method comprising the steps of: providing a mask cassette, having a base member for supporting thereon a plurality of masks to be used in the lithographic apparatus, and a casing member, disengageably engageable with the base member, to define a substantially closed space for accommodating the masks therein; introducing the mask cassette, accommodating the plurality of masks therein, into a substantially gas-tight chamber through a door closeable opening of the chamber; providing a predetermined gas ambience in the chamber subsequent to introducing the mask cassette into the chamber in said introducing step; relatively moving the base member upwardly, relative to the casing member, to disengage the base member from the casing member; and unloading a mask from the base member and loading the unloaded mask at a predetermined position in the chamber for use in the X-ray lithographic apparatus.
Claim 14
Dependent Claim
156 words
A dust-protective mask loading method for use with an X-ray lithographic apparatus for manufacturing semiconductor devices, said method comprising the steps of: providing a mask cassette, having a base member for supporting thereon a plurality of masks to be used in the lithographic apparatus, and a casing member, disengageably engageable with the base member, to define a substantially closed space for accommodating the masks therein; introducing the mask cassette, accommodating the plurality of masks therein, into a substantially gas-tight chamber through a door closeable opening of the chamber; providing a predetermined gas ambience in the chamber subsequent to introducing the mask cassette into the chamber in said introducing step; relatively moving the base member upwardly, relative to the casing member, to disengage the base member from the casing member; and unloading a mask from the base member and loading the unloaded mask at a predetermined position in the chamber for use in the X-ray lithographic apparatus.
Claim 15
Dependent Claim
27 words
A method according to claim 11, further comprising effecting disengagement of the base member from the casing member by a driving force generated outside of the chamber.
Claim 16
Dependent Claim
22 words
A method according to claim 11, further comprising supporting the masks by the base member along vertical planes in the mask cassette.
References Cited (Backward Citations)
US4815912A
Cited
WO1987004043A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-24 | 1994-12-24 | 1995-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-24 | 1998-12-24 | 1999-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-24 | 2002-12-24 | 2003-06-25 | $7700.00 | Window Closed / Lapsed |