Abstract A movable light-source type exposure apparatus comprising a light source disposed at the focal point of a parabolic reflector, a first light-shielding member disposed right beneath the light source and intended to prevent the light rays from the light source from being irradiated directly over a mask and a work, a second light-shielding member disposed closely to the mask and work so as to cause the formation of a shadow capable of equalizing the cumulated amounts of light rays at points thereon, a positioning/fixing means intended, for each exposure, to position and fix a retaining frame for the mask and a retaining frame for the work, and a light-source moving means for moving a lamp house having the parabolic reflector, light source, first light-shielding member and second shielding member over the mask and work for purpose of causing the same to be exposed.
An exposure apparatus of movable light-source type, comprising a light source disposed at a position corresponding to a focal point of a substantially parabolic, reflector, a first light-shielding member disposed right beneath said light source and intended to prevent the light rays from said light source from being irradiated directly over an original image and a material to be exposed, a second light-shielding member disposed at a position closer to the position of said original image and material to be exposed so as to cause the formation of a shadow capable of making equal the cumulated amounts of light rays at points thereon, a positioning/fixing means intended, for each exposure, to position and fix a retaining frame for said original and a retaining frame for said material to be exposed, and a light-source moving means for moving a lamp housing having said substantially parabolic reflector, light source, first light-shielding member and second light-shielding member over said original and said material to be exposed for purpose of causing the material to be exposed.
Claim 2
Dependent Claim
172 words
An exposure apparatus of movable light-source type, comprising a light source disposed at a position corresponding to a focal point of a substantially parabolic, reflector, a first light-shielding member disposed right beneath said light source and intended to prevent the light rays from said light source from being irradiated directly over an original image and a material to be exposed, a second light-shielding member disposed at a position closer to the position of said original image and material to be exposed so as to cause the formation of a shadow capable of making equal the cumulated amounts of light rays at points thereon, a positioning/fixing means intended, for each exposure, to position and fix a retaining frame for said original and a retaining frame for said material to be exposed, and a light-source moving means for moving a lamp housing having said substantially parabolic reflector, light source, first light-shielding member and second light-shielding member over said original and said material to be exposed for purpose of causing the material to be exposed.