Patent US5589962A successfully refreshed from Google Patents.
US5589962A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Active matrix display device using aluminum alloy in scanning signal line or video signal line
Assignee: Hitachi Ltd
•
Filing: 1995-06-06
•
Granted: 1996-12-31
•
Expires: 2015-06-06
Abstract
Abstract An anodized oxide film of Al is formed on a scanning signal line and a gate electrode. An alloy of Al containing Ta and Ti is used as material of each of the scanning signal line and gate electrode. The thickness of the anodized oxide film is set to 1,000 angstroms or more. The fabrication yield and reliability can be improved.
Inventors
- 👤 Hideaki Yamamoto
- 👤 Haruo Matsumaru
- 👤 Tetsuaki Suzuki
- 👤 Mitsuo Nakatani
- 👤 Michio Tsukii
- 👤 Akira Sasano
- 👤 Saburo Oikawa
- 👤 Ryoji Oritsuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 19:53
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/136213; G02F1/136286; G02F1/136295
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
152 words
An active matrix display device comprising a plurality of pixels arranged in a matrix, each of said pixels having a pixel electrode and a thin film transistor, said thin film transistor including: a gate electrode electrically connected to a scanning signal line; a first insulating film formed on said gate electrode; a semiconductor layer formed above said first insulating film; a source electrode formed on said semiconductor layer and electrically connected to said pixel electrode; and a drain electrode formed on said semiconductor layer and electrically connected to a video signal line, wherein each of said scanning signal line and said gate electrode is made of an alloy of Al containing Ta and Ti, and a second insulating film formed of an anodized oxide film of said scanning signal line or said gate electrode is formed on the surface of at least one of said scanning signal line and said gate electrode.
Claim 2
Dependent Claim
152 words
An active matrix display device comprising a plurality of pixels arranged in a matrix, each of said pixels having a pixel electrode and a thin film transistor, said thin film transistor including: a gate electrode electrically connected to a scanning signal line; a first insulating film formed on said gate electrode; a semiconductor layer formed above said first insulating film; a source electrode formed on said semiconductor layer and electrically connected to said pixel electrode; and a drain electrode formed on said semiconductor layer and electrically connected to a video signal line, wherein each of said scanning signal line and said gate electrode is made of an alloy of Al containing Ta and Ti, and a second insulating film formed of an anodized oxide film of said scanning signal line or said gate electrode is formed on the surface of at least one of said scanning signal line and said gate electrode.
References Cited (Backward Citations)
DE2919547A1
Cited
US4855806A
Cited
US4984033A
Cited
US5054887A
Cited
JPH02151835A
Cited
JPH02245736A
Cited
US5264728A
Cited
US5150233A
Cited
US5243202A
Cited
US5187602A
Cited
US5270846A
Cited
JPH04273215A
Cited
US5504348A
Cited
US5510918A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-31 | 2000-07-01 | 2000-12-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-31 | 2004-07-01 | 2004-12-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-31 | 2008-07-01 | 2008-12-31 | $7700.00 | Window Closed / Lapsed |