Method of forming a contact hole for a metal line in a semiconductor device

Claim 1

A method for forming a contact hole to connect a metal line to a contact area on semiconductor substrate through said contact hole, the method comprising the steps of: forming a first insulative layer on a surface of said semiconductor substrate; forming a first contact hole in said first insulative layer to expose said contact area; forming an insulative sidewall spacer on a sidewall surface of said contact hole; depositing a barrier metal layer on said first insulative layer including said insulative sidewall spacer; forming a barrier metal protective layer on said barrier metal layer, the barrier metal protective layer covering the contact area; etching the barrier metal layer using the barrier metal protective layer as a mask; forming a second insulative layer on said barrier metal protective layer and said first insulative layer; and forming a second contact hole by removing at least portions of said second insulative layer and said barrier metal protective layer in correspondence with said first contact hole, thereby exposing said barrier metal layer in said contact area.

Claim 2

A method for forming a contact hole to connect a metal line to a contact area on semiconductor substrate through said contact hole, the method comprising the steps of: forming a first insulative layer on a surface of said semiconductor substrate; forming a first contact hole in said first insulative layer to expose said contact area; forming an insulative sidewall spacer on a sidewall surface of said contact hole; depositing a barrier metal layer on said first insulative layer including said insulative sidewall spacer; forming a barrier metal protective layer on said barrier metal layer, the barrier metal protective layer covering the contact area; etching the barrier metal layer using the barrier metal protective layer as a mask; forming a second insulative layer on said barrier metal protective layer and said first insulative layer; and forming a second contact hole by removing at least portions of said second insulative layer and said barrier metal protective layer in correspondence with said first contact hole, thereby exposing said barrier metal layer in said contact area.

Claim 4

A method for forming a contact hole to connect a metal line to a semiconductor substrate through the contact hole, the method comprising the steps of: depositing a gate silicon oxide layer, a polysilicon layer, and a cap gate silicon oxide layer on the semiconductor substrate; etching the cap gate silicon oxide layer, the polysilicon layer, and the gate silicon oxide layer for forming a gate electrode pattern and exposing a portion of the semiconductor substrate by a photolithography process; forming a source/drain junction at the exposed portion of the semiconductor substrate by ion implantation and thermal diffusion; depositing a silicon oxide layer on a resulting surface and etching the silicon oxide layer to form a side wall spacer at the side of the gate and the cap gate silicon oxide; depositing a barrier metal layer on the cap gate silicon oxide layer, on the side of the side wall spacer, and on the source/drain junction; depositing a first insulating layer on the barrier metal layer; forming a barrier metal protector from the first insulating layer by the photolithography process, the protector covering the contact area; etching the barrier metal layer using the barrier metal protector as a mask, forming a barrier metal contact portion; depositing a second insulating layer having an etching selectivity against silicon oxide on the cap gate silicon oxide, the side wall spacer, and the barrier metal; carrying out a process for cell fabrication on the silicon substrate; forming a third insulating layer on a resulting surface; and forming a contact hole on the barrier metal contact portion by etching the third, second, and first insulating layers.

Claim 5

A method for forming a contact hole to connect a metal line to a semiconductor substrate through the contact hole, the method comprising the steps of: depositing a gate silicon oxide layer, a polysilicon layer, and a cap gate silicon oxide layer on the semiconductor substrate; etching the cap gate silicon oxide layer, the polysilicon layer, and the gate silicon oxide layer for forming a gate electrode pattern and exposing a portion of the semiconductor substrate by a photolithography process; forming a source/drain junction at the exposed portion of the semiconductor substrate by ion implantation and thermal diffusion; depositing a silicon oxide layer on a resulting surface and etching the silicon oxide layer to form a side wall spacer at the side of the gate and the cap gate silicon oxide; depositing a barrier metal layer on the cap gate silicon oxide layer, on the side of the side wall spacer, and on the source/drain junction; depositing a first insulating layer on the barrier metal layer; forming a barrier metal protector from the first insulating layer by the photolithography process, the protector covering the contact area; etching the barrier metal layer using the barrier metal protector as a mask, forming a barrier metal contact portion; depositing a second insulating layer having an etching selectivity against silicon oxide on the cap gate silicon oxide, the side wall spacer, and the barrier metal; carrying out a process for cell fabrication on the silicon substrate; forming a third insulating layer on a resulting surface; and forming a contact hole on the barrier metal contact portion by etching the third, second, and first insulating layers.