US5576147A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Formation of microstructures using a preformed photoresist sheet
Assignee: Wisconsin Alumni Research Foundation
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Filing: 1995-06-05
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Granted: 1996-11-19
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Expires: 2015-06-05
Abstract
Abstract In the formation of microstructures, a preformed sheet of photoresist, such as polymethylmethacrylate (PMMA), which is strain free, may be milled down before or after adherence to a substrate to a desired thickness. The photoresist is patterned by exposure through a mask to radiation, such as X-rays, and developed using a developer to remove the photoresist material which has been rendered susceptible to the developer. Micrometal structures may be formed by electroplating metal into the areas from which the photoresist has been removed. The photoresist itself may form useful microstructures, and can be removed from the substrate by utilizing a release layer between the substrate and the preformed sheet which can be removed by a remover which does not affect the photoresist. Multiple layers of patterned photoresist can be built up to allow complex three dimensional microstructures to be formed.
Inventors
- 👤 Henry Guckel
- 👤 Todd R. Christenson
- 👤 Kenneth Skrobis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 01:43
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2037; G03F7/2039; G03F7/26; G03F7/38; B; B81; B81C; B81C1/00; B81C1/00349; B81C1/0038; G03F7/0035; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; B81C2201/00; B81C2201/01; B81C2201/0101; B81C2201/0128; B81C2201/0156; B81C2201/0159; B81C2201/0174; B81C2201/019; B81C2201/03; B81C2201/032; Y; Y10; Y10S; Y10S430/00; Y10S430/167; Y10S430/168; Y10T; Y10T428/00; Y10T428/31504
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
147 words
A method of forming microstructures comprising the steps of: (a) providing a first preformed sheet of photoresist material which can be exposed to radiation to affect its susceptibility to a developer; (b) exposing the first photoresist sheet to radiation in a pattern which will result in susceptibility of the photoresist to a developer partially but not entirely through the thickness of the photoresist sheet; (c) applying a developer to the exposed photoresist sheet to remove photoresist which is susceptible to the developer to leave a pattern of voids in the exposed side of the photoresist sheet which voids extend partially but not entirely through the photoresist sheet; and. (d) adhering the first photoresist sheet on the side which has the voids formed therein to a layer of material to form a laminate having a pattern of voids between the first photoresist sheet and the layer of material.
Claim 2
Independent Claim
147 words
A method of forming microstructures comprising the steps of: (a) providing a first preformed sheet of photoresist material which can be exposed to radiation to affect its susceptibility to a developer; (b) exposing the first photoresist sheet to radiation in a pattern which will result in susceptibility of the photoresist to a developer partially but not entirely through the thickness of the photoresist sheet; (c) applying a developer to the exposed photoresist sheet to remove photoresist which is susceptible to the developer to leave a pattern of voids in the exposed side of the photoresist sheet which voids extend partially but not entirely through the photoresist sheet; and. (d) adhering the first photoresist sheet on the side which has the voids formed therein to a layer of material to form a laminate having a pattern of voids between the first photoresist sheet and the layer of material.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein the first photoresist sheet is formed of PMMA.
Claim 4
Dependent Claim
85 words
The method of claim 1 wherein the layer of material is a photoresist and including, before the step of adhering the first preformed sheet to the layer of material, the additional steps of exposing the photoresist layer to radiation in a pattern which will affect its susceptibility to a developer, applying a developer to the exposed layer of photoresist to remove photoresist which is susceptible to the developer, and then carrying out the step of adhering the first preformed sheet of photoresist to the layer.
Claim 5
Dependent Claim
21 words
The method of claim 3 wherein the first preformed sheet of photoresist and the layer of photoresist are formed of PMMA.
Claim 6
Dependent Claim
60 words
The method of claim 1 including the additional step, after the step of adhering the first preformed sheet of photoresist to a layer of material, the additional step of mechanically removing the material of the first preformed photoresist sheet to reduce the thickness of the sheet to fully expose the voids which have been formed in the first preformed sheet.
Claim 7
Dependent Claim
14 words
The method of claim 5 wherein the first photoresist sheet is formed of PMMA.
Claim 8
Dependent Claim
140 words
The method of claim 5 including, after the step of mechanically removing the material of the first preformed sheet, the additional steps of providing a second preformed sheet of photoresist material which can be exposed to radiation to affect its susceptibility to a developer, exposing the second photoresist sheet to radiation in a pattern which will change the susceptibility of the photoresist to a developer partially but not entirely through the thickness of the second photoresist sheets, applying a developer to the exposed second photoresist sheet to remove the photoresist which is susceptible to the developer to leave voids in one side of the second photoresist sheet which extend partially but not entirely through the thickness of the sheet, and then adhering the second photoresist sheet by the side having voids therein to the surface of the first photoresist sheet.
Claim 9
Dependent Claim
50 words
The method of claim 7 including the additional step, after the second photoresist sheet has been adhered to the first photoresist sheet, of mechanically removing the material of the second photoresist sheet to reduce the thickness of the sheet to fully expose the voids formed in the second photoresist sheet.
Claim 10
Dependent Claim
17 words
The method of claim 8 wherein the first and second photoresist sheets are both formed of PMMA.
Claim 11
Dependent Claim
31 words
The method of claim 9 wherein the steps of exposing the photoresist sheets in a pattern to radiation is carried out by exposing each photoresist sheet to X-rays from a synchrotron.
Claim 12
Dependent Claim
151 words
The method of claim 1 wherein the layer of material is a preformed photoresist sheet, and including, before the step of adhering the first preformed photoresist sheet to the layer, the steps of exposing the preformed photoresist sheet layer to radiation in a pattern which will change the susceptibility of the photoresist to a developer partially but not entirely through the thickness of the photoresist sheet layer, and then applying a developer to the exposed photoresist sheet layer to remove photoresist which is susceptible to the developer to leave voids in one side of the layer of photoresist which extend partially but not entirely through the layer of photoresist, and wherein the step of adhering the layer to the first preformed photoresist sheet is carried out by adhering the side of the layer having voids formed therein to the side of the first preformed photoresist sheet which has voids formed therein.
Claim 13
Dependent Claim
18 words
The method of claim 11 wherein the first preformed photoresist sheet and the layer are formed of PMMA.
Claim 14
Dependent Claim
49 words
The method of claim 11 wherein after the step of adhering the photoresist layer to the first photoresist sheet, the additional step of mechanically removing the material of the first photoresist sheet to reduce the thickness of the sheet to fully expose the voids in the first photoresist sheet.
Claim 15
Dependent Claim
32 words
The method of claim 13 including the additional step of adhering the side of the first preformed photoresist sheet which has had material mechanically removed therefrom to an additional layer of material.
Claim 16
Dependent Claim
25 words
The method of claim 14 wherein the additional layer of material is a substrate having a flat surface to which the first layer is adhered.
Claim 17
Dependent Claim
130 words
The method of claim 14 wherein the additional layer is a preformed photoresist sheet, and including, before the step of adhering the additional layer to the first preformed photoresist sheet, the steps of exposing the additional photoresist sheet in a pattern to radiation which will change its susceptibility to a developer partially but not entirely through the thickness of the additional photoresist sheet, applying a developer to the exposed photoresist of the additional photoresist sheet to remove photoresist which is susceptible to the developer to leave voids in one side of the additional photoresist sheet which extend partially but not entirely through the additional photoresist sheet, and then carrying out the step of adhering the side of the additional photoresist sheet having the voids therein to the first photoresist sheet.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-19 | 2000-05-20 | 2000-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-19 | 2004-05-20 | 2004-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-19 | 2008-05-20 | 2008-11-19 | $7700.00 | Window Closed / Lapsed |