Patent US5571576A successfully refreshed from Google Patents.
US5571576A
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Method of forming a fluorinated silicon oxide layer using plasma chemical vapor deposition
Assignee: Applied Materials Inc
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Filing: 1995-02-10
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Granted: 1996-11-05
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Expires: 2015-02-10
Abstract
Abstract A method of forming a fluorinated silicon oxide dielectric layer by plasma chemical vapor deposition. The method includes the steps of creating a plasma in a plasma chamber and introducing a silicon-containing gas, a fluorine-containing gas, oxygen and an inert gas such that the gases are excited by the plasma and react proximate a substrate to form a fluorinated silicon oxide layer on the surface of the substrate. The fluorinated layer formed has a dielectric constant which is less than that of a silicon oxide layer.
Inventors
- 👤 Lingqian Qian
- 👤 Melvin C. Schmidt
- 👤 Glenn L. Nobinger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 11:40
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/26; H05H1/30; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6924; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C8/00; C23C8/06; C23C8/28; C23C8/36; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/69215
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
179 words
A method of forming a fluorinated silicon oxide layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber an inert gas and oxygen gas, said inert gas being selected from at least one of the inert gases of the group consisting of argon, neon, krypton or xenon; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, and wherein the stability of the plasma is enhanced by introduction of said inert gas; introducing a silicon-containing gas into said process chamber adjacent the surface of said substrate; and introducing into one of said chambers a fluorine-containing gas whereby said fluorine gas is available at the surface of said substrate, and said silicon-containing gas and said fluorine-containing gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 2
Independent Claim
179 words
A method of forming a fluorinated silicon oxide layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber an inert gas and oxygen gas, said inert gas being selected from at least one of the inert gases of the group consisting of argon, neon, krypton or xenon; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, and wherein the stability of the plasma is enhanced by introduction of said inert gas; introducing a silicon-containing gas into said process chamber adjacent the surface of said substrate; and introducing into one of said chambers a fluorine-containing gas whereby said fluorine gas is available at the surface of said substrate, and said silicon-containing gas and said fluorine-containing gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 3
Dependent Claim
62 words
The method of claim 1 further comprising the step of simultaneously applying an r.f. bias to said substrate during the formation of said fluorinated silicon oxide layer such that the surface of said substrate is sputtered by ions of said inert gas and etched by ions of said fluorine-containing gas to enhance the filling of gaps on the surface of said substrate.
Claim 4
Dependent Claim
27 words
The method of claim 1 wherein the flow rate of said oxygen gas is approximately twice the flow rate of each of said silicon and fluorine-containing gases.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein said plasma comprises an ion density of greater than 10 11 ions/cm 3 .
Claim 6
Dependent Claim
31 words
The method of claim 1 wherein said fluorine-containing gas is a fluorocarbon represented by the general formula C n F 2+2n , wherein n is an integer of 1 to 3.
Claim 7
Dependent Claim
13 words
The method of claim 5 wherein said fluorocarbon is tetrafluoromethane (CF 4 ).
Claim 8
Dependent Claim
11 words
The method of claim 1 wherein said silicon-containing gas is silane.
Claim 9
Dependent Claim
15 words
The method of claim 1 wherein said fluorine-containing gas is silicon tetrafluorine (SiF 4 ).
Claim 10
Dependent Claim
34 words
The method of claim 1 wherein said substrate is maintained at a temperature of not more than 450° C.; and said process chamber is maintained at a pressure of not more than 20 mTorr.
Claim 11
Independent Claim
219 words
A method of forming a fluorinated silicon oxide layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber an inert gas and oxygen gas, said inert gas being selected from at least one of the inert gases of the group consisting of argon, neon, krypton and xenon; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, said plasma containing an ion density of greater than 10 11 ions/cm 3 and wherein the stability of the plasma is enhanced by introduction of said inert gas; maintaining said substrate at a temperature of not more than 450° C.; maintaining said process and plasma chambers at a pressure of not more than 20 mTorr; introducing a silane gas into said process chamber adjacent the surface of said substrate; and introducing into one of said chambers a fluorine-containing gas, whereby said fluorocarbon gas is available at the surface of said substrate, and said silane gas and said fluorine-containing gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 12
Independent Claim
219 words
A method of forming a fluorinated silicon oxide layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber an inert gas and oxygen gas, said inert gas being selected from at least one of the inert gases of the group consisting of argon, neon, krypton and xenon; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, said plasma containing an ion density of greater than 10 11 ions/cm 3 and wherein the stability of the plasma is enhanced by introduction of said inert gas; maintaining said substrate at a temperature of not more than 450° C.; maintaining said process and plasma chambers at a pressure of not more than 20 mTorr; introducing a silane gas into said process chamber adjacent the surface of said substrate; and introducing into one of said chambers a fluorine-containing gas, whereby said fluorocarbon gas is available at the surface of said substrate, and said silane gas and said fluorine-containing gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 13
Dependent Claim
27 words
The method of claim 10 wherein the flow rate of said oxygen gas is approximately twice the flow rate of each of said silicon and fluorine-containing gases.
Claim 14
Dependent Claim
62 words
The method of claim 10 further comprising the step of simultaneously applying an r.f. bias to said substrate during the formation of said fluorinated silicon oxide layer such that the surface of said substrate is sputtered by ions of said inert gas etched by and ions of said fluorine-containing gas to enhance the filling of gaps on the surface of said substrate.
Claim 15
Dependent Claim
14 words
The method of claim 10 wherein said fluorine-containing gas is tetrafluoromethane (CF 4 ).
Claim 16
Dependent Claim
31 words
The method of claim 10 wherein said fluorine-containing gas is a fluorocarbon represented by the general formula C n F 2+2n , wherein n is an integer of 1 to 3.
Claim 17
Dependent Claim
15 words
The method of claim 10 wherein said fluorine-containing gas is silicon tetrafluorine (SiF 4 ).
Claim 18
Independent Claim
198 words
A method of forming a fluorinated silicon oxide layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber an inert gas and oxygen gas; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, said plasma containing an ion density of greater than 10 11 ions/cm 3 and wherein the stability of the plasma is enhanced by introduction of said inert gas; maintaining said substrate at a temperature of not more than 450° C.; maintaining said process and plasma chambers at a pressure of not more than 20 Mtorr; introducing a silane gas into said process chamber adjacent the surface of said substrate; and introducing silicon tetrafluorine gas into one of said chambers, whereby said silicon tetrafluorine gas is available at the surface of said substrate and said silane gas and said silicon tetrafluorine gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 19
Independent Claim
198 words
A method of forming a fluorinated silicon oxide layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber an inert gas and oxygen gas; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, said plasma containing an ion density of greater than 10 11 ions/cm 3 and wherein the stability of the plasma is enhanced by introduction of said inert gas; maintaining said substrate at a temperature of not more than 450° C.; maintaining said process and plasma chambers at a pressure of not more than 20 Mtorr; introducing a silane gas into said process chamber adjacent the surface of said substrate; and introducing silicon tetrafluorine gas into one of said chambers, whereby said silicon tetrafluorine gas is available at the surface of said substrate and said silane gas and said silicon tetrafluorine gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 20
Dependent Claim
60 words
The method of claim 16 further comprising the step of simultaneously applying an r.f. bias to said substrate during the formation of said fluorinated silicon oxide layer such that the surface of said substrate is sputtered by ions of said inert gas and ions of said fluorine-containing gas to enhance the filling of gaps on the surface of said substrate.
Claim 21
Independent Claim
217 words
A method of forming a fluorinated silicon oxide dielectric layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber argon and oxygen gas, said inert gas being selected from at least one of the inert gases of the group consisting of argon, neon, krypton and xenon; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, said plasma containing an ion density of greater than 10 11 ions/cm 3 and wherein the stability of the plasma is enhanced by introduction of said inert gas; maintaining said substrate at a temperature of not more than 450° C.; maintaining said process and plasma chambers at a pressure of not more than 20 Mtorr; introducing a silane gas into said process chamber adjacent the surface of said substrate; and introducing tetrafluoromethane gas into one of said chambers, whereby said tetrafluoromethane gas is available at the surface of said substrate, and said silane gas and said tetrafluoromethane gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 22
Independent Claim
217 words
A method of forming a fluorinated silicon oxide dielectric layer on the surface of a substrate using a plasma chemical vapor deposition apparatus which includes a process chamber and a plasma chamber, comprising the steps of: positioning the substrate within said process chamber; introducing into said plasma chamber argon and oxygen gas, said inert gas being selected from at least one of the inert gases of the group consisting of argon, neon, krypton and xenon; introducing r.f. power into said plasma chamber such that a plasma is created in the plasma chamber, said plasma containing an ion density of greater than 10 11 ions/cm 3 and wherein the stability of the plasma is enhanced by introduction of said inert gas; maintaining said substrate at a temperature of not more than 450° C.; maintaining said process and plasma chambers at a pressure of not more than 20 Mtorr; introducing a silane gas into said process chamber adjacent the surface of said substrate; and introducing tetrafluoromethane gas into one of said chambers, whereby said tetrafluoromethane gas is available at the surface of said substrate, and said silane gas and said tetrafluoromethane gas are excited by said plasma and interact proximate to the surface of said substrate to form a fluorinated silicon oxide layer on the surface of said substrate.
Claim 23
Dependent Claim
62 words
The method of claim 18 further comprising the step of simultaneously applying an r.f. bias to said substrate during the formation of said fluorinated silicon oxide layer such that the surface of said substrate is sputtered by ions of said argon gas and etched by ions of said fluorine-containing gas to enhance the filling of gaps on the surface of said substrate.
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