US4960071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film forming apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1988-09-29
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Granted: 1990-10-02
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Expires: 2008-09-29
Abstract
Abstract The present invention relates to an apparatus to form a thin film on a specimen in a chamber by introducing electromagnetic waves into the chamber through a dielectric provided on a window of the chamber and activating the material gas in the chamber, and the forming apparatus according to the present invention has such a construction that an electrode connected to a high-frequency generating source is mounted near the dielectric. Consequently, when a high frequency is applied to the electrode, self-biases are generated on the inner surface of the dielectric (the surface on the side of the specimen), the plus ions in the chamber being attracted to the inner surface to strike thereon, and the sputtering being caused on the inner surface by the incidence energy. As a result, due to the sputtering effect, the generation of a pile of films on the inner surface of the dielectric can be prevented, while in the case where films are already piled on the inner surface of the dielectric these films can be removed.
Inventors
- 👤 Takashi Akahori
- 👤 Satoshi Nakayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:05
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/54; C23C16/488
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
115 words
A thin film forming apparatus including a microwave generating means and in which a thin film can be formed on a specimen which has been put in a chamber of the apparatus, the apparatus having a window through which microwaves generated by the microwave generating means can be introduced into said chamber through a dielectric provided at said window so as to activate a material gas in said chamber and deposit a thin film on the specimen; an electrode mounted on said dielectric, said electrode being provided with at least one opening therethrough through which the microwaves pass when activating the material gas in said chamber; and a high-frequency generating source connected to said electrode.
Claim 2
Dependent Claim
115 words
A thin film forming apparatus including a microwave generating means and in which a thin film can be formed on a specimen which has been put in a chamber of the apparatus, the apparatus having a window through which microwaves generated by the microwave generating means can be introduced into said chamber through a dielectric provided at said window so as to activate a material gas in said chamber and deposit a thin film on the specimen; an electrode mounted on said dielectric, said electrode being provided with at least one opening therethrough through which the microwaves pass when activating the material gas in said chamber; and a high-frequency generating source connected to said electrode.
Claim 3
Dependent Claim
19 words
A thin film forming apparatus as set forth in claim 1, wherein said electrode is fixed to said dielectric.
Claim 4
Dependent Claim
26 words
A thin film forming apparatus as set forth in claim 1, wherein said electrode is capable of being mounted to and being demounted from said dielectric.
Claim 5
Dependent Claim
22 words
A thin film forming apparatus as set forth in claim 1, further comprising a specimen stand on which said specimen is set.
Claim 6
Dependent Claim
25 words
A thin film forming apparatus as set forth in claim 1, further comprising a gas pipe in order to introduce said material gas into chamber.
Claim 7
Dependent Claim
21 words
The thin film forming apparatus of claim 1, wherein said at least one opening comprises a single bore through said electrode.
Claim 8
Dependent Claim
117 words
A thin film forming apparatus including an electromagnetic wave generating means and in which a thin film can be formed on a specimen which has been put in a chamber of the apparatus, the apparatus having a window through which electromagnetic waves generated by the electromagnetic wave generating means can be introduced into said chamber through a dielectric provided at said window so as to activate a material gas in said chamber and deposit a thin film on the specimen; an electrode buried in said dielectric, said electrode having at least one opening therethrough through which the electromagnetic waves pass when activating the material gas in said chamber; and a high-frequency generating source connected to said electrode.
Claim 9
Dependent Claim
117 words
A thin film forming apparatus including an electromagnetic wave generating means and in which a thin film can be formed on a specimen which has been put in a chamber of the apparatus, the apparatus having a window through which electromagnetic waves generated by the electromagnetic wave generating means can be introduced into said chamber through a dielectric provided at said window so as to activate a material gas in said chamber and deposit a thin film on the specimen; an electrode buried in said dielectric, said electrode having at least one opening therethrough through which the electromagnetic waves pass when activating the material gas in said chamber; and a high-frequency generating source connected to said electrode.
Claim 10
Dependent Claim
48 words
The thin film forming apparatus of claim 7, further comprising a specimen stand within said chamber on which the specimen is mounted when the thin film is formed, the specimen stand being aligned with the window, the dielectric and the at least one opening in the buried electrode.
Claim 11
Dependent Claim
19 words
A thin film forming apparatus as set forth in claim 7, wherein said electromagnetic waves are rays of light.
Claim 12
Dependent Claim
29 words
A thin film forming apparatus as set forth in claim 9, wherein said electrode is provided with at least a bore in order to pass the rays of light.
Claim 13
Dependent Claim
27 words
A thin film forming apparatus as set forth in claim 9, wherein said electrode has the form of meshes in order to pass the rays of light.
References Cited (Backward Citations)
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JPS60170037A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-01 | 1994-04-02 | 1994-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-01 | 1998-04-02 | 1998-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-01 | 2002-04-02 | 2002-10-02 | $7700.00 | Window Closed / Lapsed |