Patent US5567336A successfully refreshed from Google Patents.
US5567336A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser ablation forward metal deposition with electrostatic assisted bonding
Assignee: Panasonic Holdings Corp
•
Filing: 1995-03-31
•
Granted: 1996-10-22
•
Expires: 2015-03-31
Abstract
Abstract Apparatus and method for metal line deposition on a substrate. Laser ablation of a metal film coated on a first substrate removes metal ions from the film. The ions travel forward to a surface of a second substrate disposed opposite the metal film on the first substrate and are deposited on the second substrate. A positive electrode on the first substrate, a negative electrode on the second substrate, and a power supply create an electric field that is simultaneously applied across the first and second substrates to bond the metal ions to the second substrate. Bonding is enhanced by repeated reflecting a laser beam through the second substrate to heat the second substrate. The laser beam is reflected between a reflector and the deposited metal line.
Inventors
- 👤 Abdelkrim Tatah
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 18:48
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; C23C14/22; C23C14/24; C23C14/28; H; H05; H05K; H05K3/00; H05K3/10; H05K3/14
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
106 words
A method of bonding a metal line to a substrate having the metal line on a first surface thereof, and a second surface opposing the first surface, comprising the steps of: (a) disposing said second surface adjacent a reflector such that said reflector directly opposes said metal line; (b) applying an electric field across said substrate; and (c) focusing a laser beam through said substrate onto said reflector such that said laser beam is repeatedly reflected between said reflector and said metal line; whereby said substrate absorbs energy from said laser beam as said laser beam is repeatedly reflected through said substrate, thereby heating said substrate.
Claim 2
Independent Claim
106 words
A method of bonding a metal line to a substrate having the metal line on a first surface thereof, and a second surface opposing the first surface, comprising the steps of: (a) disposing said second surface adjacent a reflector such that said reflector directly opposes said metal line; (b) applying an electric field across said substrate; and (c) focusing a laser beam through said substrate onto said reflector such that said laser beam is repeatedly reflected between said reflector and said metal line; whereby said substrate absorbs energy from said laser beam as said laser beam is repeatedly reflected through said substrate, thereby heating said substrate.
Claim 3
Independent Claim
108 words
A method of depositing a metal line comprising the steps of: (a) disposing a first substrate having a metal coating on a surface thereof in spaced relation to a second substrate such that said second substrate is adjacent the surface of said first substrate having the metal coating; (b) ablating said metal coating to discharge ions of said metal coating; (c) applying an electric field across said first and second substrates to drive said ions to said second substrate and to bond said ions thereto; and (d) heating said second substrate by repeatedly reflecting a laser beam through said second substrate to enhance bonding of said ions thereto.
Claim 4
Independent Claim
108 words
A method of depositing a metal line comprising the steps of: (a) disposing a first substrate having a metal coating on a surface thereof in spaced relation to a second substrate such that said second substrate is adjacent the surface of said first substrate having the metal coating; (b) ablating said metal coating to discharge ions of said metal coating; (c) applying an electric field across said first and second substrates to drive said ions to said second substrate and to bond said ions thereto; and (d) heating said second substrate by repeatedly reflecting a laser beam through said second substrate to enhance bonding of said ions thereto.
Claim 5
Dependent Claim
107 words
Apparatus for bonding a metal line to a substrate having the metal line on a first surface thereof, and a second surface opposing the first surface, comprising: (a) a reflector disposed adjacent to said second surface such that said reflector directly opposes said metal line; (b) means for applying an electric field across said substrate; and (c) means for focusing a laser beam through said substrate onto said reflector such that said laser beam is repeatedly reflected between said reflector and said metal line; whereby said substrate absorbs energy from said laser beam as said laser beam is repeatedly reflected through said substrate, thereby heating said substrate.
Claim 6
Dependent Claim
107 words
Apparatus for bonding a metal line to a substrate having the metal line on a first surface thereof, and a second surface opposing the first surface, comprising: (a) a reflector disposed adjacent to said second surface such that said reflector directly opposes said metal line; (b) means for applying an electric field across said substrate; and (c) means for focusing a laser beam through said substrate onto said reflector such that said laser beam is repeatedly reflected between said reflector and said metal line; whereby said substrate absorbs energy from said laser beam as said laser beam is repeatedly reflected through said substrate, thereby heating said substrate.
Claim 7
Dependent Claim
113 words
Apparatus for depositing a metal line comprising: (a) a first substrate having a metal coating on a surface thereof; (b) means for ablating said metal coating to discharge metal ions; (c) a second substrate, onto which said metal line is to be deposited, disposed in spaced relation adjacent to said surface of said first substrate having the metal coating thereon; (d) means for applying an electric field across said first and second substrates to drive said metal ions toward said second substrate and bond said ions thereto; and (e) means for repeatedly reflecting a laser beam through said second substrate to heat said second substrate and thereby enhance bonding of said ions thereto.
Claim 8
Dependent Claim
113 words
Apparatus for depositing a metal line comprising: (a) a first substrate having a metal coating on a surface thereof; (b) means for ablating said metal coating to discharge metal ions; (c) a second substrate, onto which said metal line is to be deposited, disposed in spaced relation adjacent to said surface of said first substrate having the metal coating thereon; (d) means for applying an electric field across said first and second substrates to drive said metal ions toward said second substrate and bond said ions thereto; and (e) means for repeatedly reflecting a laser beam through said second substrate to heat said second substrate and thereby enhance bonding of said ions thereto.
References Cited (Backward Citations)
US3560258A
Cited
US3757078A
Cited
US3781978A
Cited
US4294602A
Cited
US4349583A
Cited
US4622058A
Cited
US4752455A
Cited
US4879450A
Cited
US4895735A
Cited
US4933204A
Cited
US4987006A
Cited
US5057184A
Cited
US5203929A
Cited
US5079070A
Cited
US5153408A
Cited
US5177594A
Cited
US5175504A
Cited
US5235272A
Cited
US5141602A
Cited
US5246745A
Cited
US5495089A
Cited
US5481082A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-10-22 | 2000-04-22 | 2000-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-10-22 | 2004-04-22 | 2004-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-10-22 | 2008-04-22 | 2008-10-22 | $7700.00 | Window Closed / Lapsed |