Microelectromechanical lateral accelerometer

Claim 2

A micromechanical accelerometer comprising: a support beam having an elongated axis and being axially movable in response to applied forces to be measured; a plurality of laterally extending, spaced, parallel fingers extending from and carried by said support beam and movable with said beam; a flexible restoring spring connected to and carrying said elongated support beam, said spring allowing axial motion of said axially movable support beam and urging said support beam toward a rest position, said movable beam, said movable fingers and said spring having high aspect ratios with minimum dimensions in the range of 1-3 micrometers; and a controller for said flexible restoring spring to regulate the force applied by said spring to said support beam.

Claim 3

The accelerometer of claim 1, wherein said controller includes means for applying a capacitive force to said restoring spring for varying the flexibility of said restoring spring.

Claim 4

The accelerometer of claim 1, further including sensor means adjacent said lateral fingers for detecting motion of said elongated support beam and said lateral fingers.

Claim 5

The accelerometer of claim 3, wherein said sensor means includes a plurality of parallel fixed fingers interleaved with said movable fingers.

Claim 6

The accelerometer of claim 4, further including electrically conductive means on said fixed and said movable fingers to form capacitors variable in response to relative motion of said fixed and movable fingers.

Claim 7

The accelerometer of claim 4, wherein said interleaved fixed and movable fingers lie in a common plane, said fixed and movable fingers having opposed corresponding vertical surfaces, said accelerometer further including electrically conductive layers on at least selected parts of said opposed vertical surfaces to provide corresponding capacitors variable in response to relative motion of said fixed and movable fingers.

Claim 8

A microelectromechanical accelerometer, comprising: a support beam having an elongated axis and being axially movable in response to applied forces to be measured; a plurality of laterally extending, spaced parallel fingers extending from and carried by said support beam and movable with said beam, said support beam and said fingers each having a double-beam structure with interconnecting bridges to provide a high degree of stiffness; and a flexible restoring spring connected to and carrying said elongated support beam, said spring allowing axial motion of said axially movable support beam and urging said support beam toward a rest position, said movable beam, said movable fingers, and said spring having high aspect ratios with minimum dimensions in the range of 1-3 μm.

Claim 9

A microelectromechanical accelerometer, comprising: a support beam having an elongated axis and being axially movable in response to applied forces to be measured; a plurality of laterally extending, spaced parallel fingers extending from and carried by said support beam and movable with said beam, said support beam and said fingers each having a double-beam structure with interconnecting bridges to provide a high degree of stiffness; and a flexible restoring spring connected to and carrying said elongated support beam, said spring allowing axial motion of said axially movable support beam and urging said support beam toward a rest position, said movable beam, said movable fingers, and said spring having high aspect ratios with minimum dimensions in the range of 1-3 μm.

Claim 10

The accelerometer of claim 7, wherein each beam of said double beam structure has a high aspect ratio with a width of between 1 and 3 micrometers and a height of about 10 micrometers.

Claim 11

The accelerometer of claim 8, wherein each beam of said double beam structure has a height in the range of 5-15 micrometers.

Claim 12

The accelerometer of claim 8, further including control means for said flexible restoring spring to regulate the force applied by said spring to said support beam.

Claim 13

The accelerometer of claim 10, wherein said control means includes clamping means for varying the flexibility of said restoring spring.

Claim 14

A microelectromechanical accelerometer, comprising: a single crystal silicon substrate; a support beam having an axis, said beam being fabricated from said substrate and being released from said substrate so as to be axially movable with respect to said substrate in response to applied forces to be measured; and a cantilevered restoring spring fabricated from said substrate and connected between said support beam and said substrate, said spring allowing axial motion of said support beam and urging said beam toward a rest position, said support beam and said restoring spring having respective cross-sectional heights greater than their respective cross-sectional widths to provide a high aspect ratio beam and a high aspect ratio spring having flexibility in a first direction and stiffness in a second direction.

Claim 15

A microelectromechanical accelerometer, comprising: a single crystal silicon substrate; a support beam having an axis, said beam being fabricated from said substrate and being released from said substrate so as to be axially movable with respect to said substrate in response to applied forces to be measured; and a cantilevered restoring spring fabricated from said substrate and connected between said support beam and said substrate, said spring allowing axial motion of said support beam and urging said beam toward a rest position, said support beam and said restoring spring having respective cross-sectional heights greater than their respective cross-sectional widths to provide a high aspect ratio beam and a high aspect ratio spring having flexibility in a first direction and stiffness in a second direction.

Claim 16

The accelerometer of claim 12, wherein said support beam and said restoring spring lie in a common plane, said spring mounting said beam for axial motion in said plane, said first direction of flexibility for said beam and said spring being in said common plane and said second direction of stiffness for said beam and said spring being in a direction perpendicular to said common plane.

Claim 17

The accelerometer of claim 13, wherein said high aspect ratio is about 10:1.

Claim 18

The accelerometer of claim 12, wherein said beam has first and second ends, said flexible restoring spring being connected to said first end to permit said beam to move along said axis in said first direction.

Claim 19

The accelerometer of claim 12, wherein said support beam and said restoring spring are fabricated from said single crystal silicon substrate by the process of: depositing an oxide layer on said substrate; forming in said layer a pattern mask exposing the surface of said substrate in a pattern defining said support beam and restoring spring; etching by a deep reactive ion vertical etch on said exposed substrate surface trenches having vertical side walls defining beneath said pattern mask a structure of said support beam and said restoring spring; protecting said vertical side walls; deepening said trenches to expose sidewall substrate single crystal silicon beneath said defined structure; and etching said exposed sidewall substrate single crystal silicon to release said defined structure, leaving said support beam supported on said substrate solely by said restoring spring.

Claim 20

The accelerometer of claim 16, wherein said support beam comprises an elongated backbone and plural laterally extending fingers integral with, coplanar with, and movable with said backbone, and further including plural laterally extending fixed fingers integral with said substrate and coplanar with said backbone, said movable and fixed fingers having corresponding opposed surfaces.

Claim 21

The accelerometer of claim 17, further including depositing a metal layer on said opposed surfaces to thereby form opposed capacitor plates.

Claim 22

The accelerometer of claim 18, further including electrically connecting said capacitor plates to sensor circuit means for sensing relative motion between said beam and said substrate.

Claim 23

The accelerometer of claim 12, further including a second flexible restoring spring connected to said second end of said beam to permit said beam to move along said axis.

Claim 24

The accelerometer of claim 20, wherein each of said flexible restoring springs is a linear flexible beam integral with said support beam, extending laterally therefrom, and having outer ends fixedly supported, whereby said springs position said support beam and said movable fingers with respect to said substrate and permit axial motion of said support beam.

Claim 25

The accelerometer of claim 21, further including control means for varying the flexibility of said support springs.

Claim 26

The accelerometer of claim 21, further including control means for regulating the motion of said support beam and springs.

Claim 27

The accelerometer of claim 23, wherein said control means includes a feedback system.

Claim 28

The accelerometer of claim 18, wherein said control means includes clamping means for mechanically changing the flexibility of said springs.

Claim 29

The accelerometer of claim 18, wherein said control means includes capacitor means connected to regulate the motion of said support beam and springs.

Claim 30

The accelerometer of claim 12, wherein said support beam comprises an elongated backbone incorporating first sensor means integral with and movable with said backbone and fabricated from said substrate.

Claim 31

The accelerometer of claim 27, further including second sensor means integral with said substrate and coupled with said first sensor means for detecting relative motion between said support beam and said substrate.

Claim 32

The accelerometer of claim 28, wherein said first and second sensor means comprise opposed movable and stationary capacitor plates, respectively.

Claim 33

The accelerometer of claim 28, further including a additional proof mass carried by said backbone and integral fingers.

Claim 34

The accelerometer of claim 28, wherein said restoring spring is fabricated from said substrate to have a predetermined spring constant, whereby said support beam has a known resonance frequency.

Claim 35

The accelerometer of claim 31, further including means for electromechanically adjusting said spring constant to vary the resonance frequency of said support beam.

Claim 36

The accelerometer of claim 28, wherein said first sensor means comprises plural first fingers extending from said backbone and said second sensor means comprises plural fixed second fingers extending from said substrate, said first fingers being movable with said backbone to be relatively movable with respect to said second fingers.

Claim 37

The accelerometer of claim 21, wherein said movable fingers and said fixed fingers are interleaved to provide a single-ended accelerometer.

Claim 38

The accelerometer of claim 21, wherein said movable and fixed fingers are interleaved to provide a differential accelerometer.

Claim 39

The accelerometer of claim 33, further including: a first metal layer on each of said plural first fingers and a second metal layer on each of said plural second fingers, the metal layers on respective first and second fingers being opposed to provide opposite plates of a sensing capacitor; electrical contact pads on said substrate; and metal layers on said substrate connecting said plates to said contact pads to permit connection of said sensing capacitor to sensing circuitry.

Claim 40

The accelerometer of claim 36, wherein each of said plural first fingers integral with said backbone has a high aspect cross-sectional height to width ratio to provide a vertical wall on each finger to receive said metal layer.

Claim 41

The accelerometer of claim 37, wherein said high aspect ratio is at least about 10:1.

Claim 42

The accelerometer of claim 36, wherein said substrate is an integrated circuit wafer, and wherein said contact pads are provided on said wafer for connecting said plates to integrated circuits on said wafer.

Claim 43

The accelerometer of claim 33, wherein said first fingers are fabricated to have less flexibility than said spring in said first direction.

Claim 44

The accelerometer of claim 33, wherein said first fingers have a width of about 1 μm, and an aspect ratio of about 10:1.

Claim 45

The accelerometer of claim 41, wherein said first fingers are single crystal silicon with a conformed layer of metal.

Claim 46

The accelerometer of claim 1, wherein said movable beam, said movable fingers and said spring are single crystal silicon.

Claim 47

A highly sensitive, microelectromechanical force detector having extremely small dimensions fabricated on an integrated circuit wafer containing electrical circuitry connectable to the detector, comprising: a single crystal silicon wafer carrying a pre-existing circuit element; a movable beam fabricated from said single crystal silicon wafer and released from said wafer for motion with respect to said wafer, said beam incorporating an elongated backbone and integral laterally extending first sensor fingers having a high aspect ratio; a cantilevered spring integral with said wafer and supporting said beam for motion, said spring urging said beam toward a rest position; second high aspect ratio sensor fingers integral with said wafer, corresponding first and second fingers having opposed side walls; a conformed electrically conductive layer on said opposed finger side walls to provide capacitive plates; and electrically conductive connectors between said plates and said circuit elements for connecting said plates to circuitry for detecting relative motion between said beam and said wafer.

Claim 48

A highly sensitive, microelectromechanical force detector having extremely small dimensions fabricated on an integrated circuit wafer containing electrical circuitry connectable to the detector, comprising: a single crystal silicon wafer carrying a pre-existing circuit element; a movable beam fabricated from said single crystal silicon wafer and released from said wafer for motion with respect to said wafer, said beam incorporating an elongated backbone and integral laterally extending first sensor fingers having a high aspect ratio; a cantilevered spring integral with said wafer and supporting said beam for motion, said spring urging said beam toward a rest position; second high aspect ratio sensor fingers integral with said wafer, corresponding first and second fingers having opposed side walls; a conformed electrically conductive layer on said opposed finger side walls to provide capacitive plates; and electrically conductive connectors between said plates and said circuit elements for connecting said plates to circuitry for detecting relative motion between said beam and said wafer.

Claim 49

The detector of claim 44, wherein said circuitry includes an active feedback circuit for supplying a feedback voltage for restoring said movable beam to said rest position.

Claim 50

An accelerometer formed by low temperature reactive ion etching comprising: a base comprising single crystal silicon; a proof mass responsive to an applied acceleration vector along an axis of sensitivity, said proof mass formed by defining one or more integral beams from said base by a vertical reactive ion etch followed by an isotropic etch for removing the silicon out from under said one or more beams, thereby releasing them for movement; a mount connecting said one or more integral beams with said base for constraining said proof mass to move along the axis of sensitivity in response to the applied acceleration vector and for restoring said proof mass to an equilibrium position; a transducer for converting the movement of said proof mass to a signal representative of said applied acceleration vector, said transducer formed by providing a layer of conductive material over one or more of said integral beams and over an adjacent corresponding vertical wall of said base so that a parallel plate capacitor is formed between said one or more of said beams and the corresponding adjacent wall of said base, whereby movement of said proof mass relative to said base provides a change in capacitance; and signal conditioning circuitry responsive to said change in capacitance for converting said change in capacitance to a signal representative of said applied acceleration.

Claim 51

An accelerometer formed by low temperature reactive ion etching comprising: a base comprising single crystal silicon; a proof mass responsive to an applied acceleration vector along an axis of sensitivity, said proof mass formed by defining one or more integral beams from said base by a vertical reactive ion etch followed by an isotropic etch for removing the silicon out from under said one or more beams, thereby releasing them for movement; a mount connecting said one or more integral beams with said base for constraining said proof mass to move along the axis of sensitivity in response to the applied acceleration vector and for restoring said proof mass to an equilibrium position; a transducer for converting the movement of said proof mass to a signal representative of said applied acceleration vector, said transducer formed by providing a layer of conductive material over one or more of said integral beams and over an adjacent corresponding vertical wall of said base so that a parallel plate capacitor is formed between said one or more of said beams and the corresponding adjacent wall of said base, whereby movement of said proof mass relative to said base provides a change in capacitance; and signal conditioning circuitry responsive to said change in capacitance for converting said change in capacitance to a signal representative of said applied acceleration.

Claim 52

An accelerometer comprising: a wafer of single crystal silicon having a major face; a proof mass formed by defining a selected region in said major face and etching vertically downwardly using a low temperature reactive ion etch, and undercutting a portion of the wafer underlying the proof mass with an isotropic release etch for releasing said proof mass to move in response to an applied acceleration vector along an axis of sensitivity, said proof mass characterized by a major surface having a high aspect ratio formed by said vertical reactive ion etch; and a transducer for converting movement of the proof mass in response to an applied acceleration vector and for producing an output signal representative of the magnitude of said acceleration vector.

Claim 53

An accelerometer comprising: a wafer of single crystal silicon having a major face; a proof mass formed by defining a selected region in said major face and etching vertically downwardly using a low temperature reactive ion etch, and undercutting a portion of the wafer underlying the proof mass with an isotropic release etch for releasing said proof mass to move in response to an applied acceleration vector along an axis of sensitivity, said proof mass characterized by a major surface having a high aspect ratio formed by said vertical reactive ion etch; and a transducer for converting movement of the proof mass in response to an applied acceleration vector and for producing an output signal representative of the magnitude of said acceleration vector.

Claim 54

An apparatus as in claim 47, further comprising a spring means for connecting the proof mass to the wafer for returning the proof mass to an equilibrium condition.

Claim 55

An apparatus according to claim 47, wherein said transducer is formed by providing a layer of conductive material over said high aspect ratio surface of said proof mass and over an adjacent side wall of said wafer to thereby provide adjacent capacitor plates characterized by a large surface area for maximizing a capacitance developed between said plates.

Claim 56

An apparatus according to claim 47 wherein the major surface of the proof mass is characterized by a high aspect ratio having a range of from 5:1 to 20:1.

Claim 57

An accelerometer comprising: a wafer comprising single crystal silicon; a proof mass for moving along an axis of sensitivity in response to an applied input acceleration vector, said proof mass formed by a vertical reactive ion etch of said wafer to form one or more beams with vertical side walls, each beam side wall disposed adjacent to a corresponding vertical wall of the wafer, said beams being undercut with an isotropic etch to release a sufficient portion of the beam from the wafer for movement in the axis of sensitivity in response to said applied input acceleration vector; a transducer formed by coating the vertical side wall of said one or more beams and the adjacent corresponding vertical wall of said wafer with a conductive material to provide adjacent capacitor plates for producing a differential capacitance upon relative motion of the proof mass in response to an applied acceleration vector; and wherein the one or more beams of the proof mass are characterized by high aspect ratio surfaces exhibiting stiffness and insensitivity to acceleration vectors which are not parallel to the axis of sensitivity.

Claim 58

An accelerometer comprising: a wafer comprising single crystal silicon; a proof mass for moving along an axis of sensitivity in response to an applied input acceleration vector, said proof mass formed by a vertical reactive ion etch of said wafer to form one or more beams with vertical side walls, each beam side wall disposed adjacent to a corresponding vertical wall of the wafer, said beams being undercut with an isotropic etch to release a sufficient portion of the beam from the wafer for movement in the axis of sensitivity in response to said applied input acceleration vector; a transducer formed by coating the vertical side wall of said one or more beams and the adjacent corresponding vertical wall of said wafer with a conductive material to provide adjacent capacitor plates for producing a differential capacitance upon relative motion of the proof mass in response to an applied acceleration vector; and wherein the one or more beams of the proof mass are characterized by high aspect ratio surfaces exhibiting stiffness and insensitivity to acceleration vectors which are not parallel to the axis of sensitivity.

Claim 59

An accelerometer according to claim 51 further comprising a return spring coupled between said proof mass and said wafer, said return spring biased to constrain the movement of the proof mass to respond to an input acceleration vector of a predetermined threshold and for returning the proof mass to equilibrium.