Deep ultraviolet optical imaging system for microlithography and/or microfabrication

Claim 2

A high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, surface cleaning, microstructuring, pattern micro imaging, or surface modification, said delivery system comprising a deep UV radiation source for generating a beam of deep ulraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path, said homogenizing optical system including a binary optic plate with a first set of regions of normal transmission and a second set of regions where the UV radiation undergoes a 180° phase shift upon transmission; and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least 0.3 and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure.

Claim 3

The system of claim 1 wherein all of the refractive elements in said second optical system are in said modular assembly.

Claim 4

The system of claim 1 wherein all of the refractive elements in said second optical system are of fused silica.

Claim 5

The system of claim 1 wherein said deep UV radiation source is a laser of wavelength in the 150-250 nanometer range.

Claim 6

The system of claim 1 wherein said binary optic plate has first and second sets of triangular regions arranged in a hexagonal checkerboard pattern.

Claim 7

The system of claim 1 wherein said large area mirror structure includes a first mirror with a convex spherical surface that is disposed on the system axis and obscures a portion of said beam path and a second mirror of concave spherical configuration with an aperture portion disposed on said beam path for passing a beam of radiation to said first mirror.

Claim 8

The system of claim 6 wherein said modular compensation assembly provides field flattening improvement of at least five times and includes a field flattening lens with curvature of at least five times the curvature of said convex mirror.

Claim 9

A high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, surface cleaning, microstructuring, pattern microimaging, or surface modification, said delivery system comprising a deep UV radiation source for generating a beam of deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least 0.3 and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure, said modular compensation assembly being removable and having a cluster of four refractive elements designed for a particular wavelength.

Claim 10

A high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, surface cleaning, microstructuring, pattern microimaging, or surface modification, said delivery system comprising a deep UV radiation source for generating a beam of deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least 0.3 and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure, said modular compensation assembly being removable and having a cluster of four refractive elements designed for a particular wavelength.

Claim 11

A high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, surface cleaning, microstructuring, pattern microimaging, or surface modification, said delivery system comprising a deep UV radiation source for generating a beam of deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least 0.3 and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure, said modular compensation assembly including a series of elements with the following dimensional values: ______________________________________ Radius Spacing (Millimeters) (Millimeters) ______________________________________ 69.21 4.86 27.82 3.47 28.40 9.00 69.00 0.50 17.00 12.66 6.54 5.66 208.12 6.39 -70.54 3.10 ______________________________________

Claim 12

A high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, surface cleaning, microstructuring, pattern microimaging, or surface modification, said delivery system comprising a deep UV radiation source for generating a beam of deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least 0.3 and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure, said modular compensation assembly including a series of elements with the following dimensional values: ______________________________________ Radius Spacing (Millimeters) (Millimeters) ______________________________________ 69.21 4.86 27.82 3.47 28.40 9.00 69.00 0.50 17.00 12.66 6.54 5.66 208.12 6.39 -70.54 3.10 ______________________________________

Claim 13

A high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, surface cleaning, microstructuring, pattern microimaging, or surface modification, said delivery system comprising a deep UV radiation source for generating a beam of deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; said first optical system including a diverging lens and a converging lens to provide a shaped collimated beam of radiation for application to a fused silica plate member that has an array of first and second patterns that are offset from one another for enhancing pupil illumination, and subsequent to said plate member on the beam path a condenser lens for focusing the radiation passed by said plate in an image plane, and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least 0.3 and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure.

Claim 14

A high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, surface cleaning, microstructuring, pattern microimaging, or surface modification, said delivery system comprising a deep UV radiation source for generating a beam of deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; said first optical system including a diverging lens and a converging lens to provide a shaped collimated beam of radiation for application to a fused silica plate member that has an array of first and second patterns that are offset from one another for enhancing pupil illumination, and subsequent to said plate member on the beam path a condenser lens for focusing the radiation passed by said plate in an image plane, and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least 0.3 and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure.

Claim 15

The system of claim 10 wherein said system is a microlithography system with a numerical aperture of at least 0.5.

Claim 16

The system of claim 10 and further including optics for allowing an operator to view the imaging process at a visible wavelength while substrate processing at a submicron wavelength is in progress.

Claim 17

Deep ultraviolet optical imaging system comprising: a reflective imaging system comprising first and second spherical mirrors, at least fifty percent of the magnification or imaging power on the fast speed end of the system being provided by said mirrors, and field flattening and aberration correcting structure including an array of lens elements, said array of lens elements all being formed from the same refractive material type and providing a focal point outside of said array of lens elements, comprising a first lens element disposed at a first predetermined position along an optical path of said imaging system for providing optical aberration compensation, a second lens element disposed at a second predetermined position along said optical path subsequent to said first lens element for providing field flattening compensation, a third lens element for providing supplemental optical aberration compensation and a fourth lens element for providing supplemental field flattening compensation.

Claim 18

Deep ultraviolet optical imaging system comprising: a reflective imaging system comprising first and second spherical mirrors, at least fifty percent of the magnification or imaging power on the fast speed end of the system being provided by said mirrors, and field flattening and aberration correcting structure including an array of lens elements, said array of lens elements all being formed from the same refractive material type and providing a focal point outside of said array of lens elements, comprising a first lens element disposed at a first predetermined position along an optical path of said imaging system for providing optical aberration compensation, a second lens element disposed at a second predetermined position along said optical path subsequent to said first lens element for providing field flattening compensation, a third lens element for providing supplemental optical aberration compensation and a fourth lens element for providing supplemental field flattening compensation.

Claim 19

The system of claim 13 wherein said same refractive material type is fused silica.

Claim 20

The system of claim 13 and further including binary optical illuminator structure disposed along said optical path of said system for producing illumination for the refractive and reflective components of said imaging system.

Claim 21

Deep ultraviolet optical imaging system comprising: a reflective imaging system comprising first and second spherical mirrors, at least fifty percent of the magnification or imaging power on the fast speed end of the system being provided by said mirrors, and field flattening and aberration correcting structure including an array of lens elements, said array of lens elements all being formed from the same refractive material type and providing a focal point outside of said array of lens elements, comprising a first lens element disposed at a first predetermined position along an optical path of said imaging system for providing optical aberration compensation, a second lens element disposed at a second predetermined position along said optical path subsequent to said first lens element for providing field flattening compensation, and binary optical illuminator structure disposed along said optical path of said system for producing illumination for the refractive and reflective components of said imaging system, said binary optical illuminator comprising a sheet of fused silica with a pattern of uniformly offset regions etched on its surface to provide a multiplicity of diffracted radiation beams.

Claim 22

Deep ultraviolet optical imaging system comprising: a reflective imaging system comprising first and second spherical mirrors, at least fifty percent of the magnification or imaging power on the fast speed end of the system being provided by said mirrors, and field flattening and aberration correcting structure including an array of lens elements, said array of lens elements all being formed from the same refractive material type and providing a focal point outside of said array of lens elements, comprising a first lens element disposed at a first predetermined position along an optical path of said imaging system for providing optical aberration compensation, a second lens element disposed at a second predetermined position along said optical path subsequent to said first lens element for providing field flattening compensation, and binary optical illuminator structure disposed along said optical path of said system for producing illumination for the refractive and reflective components of said imaging system, said binary optical illuminator comprising a sheet of fused silica with a pattern of uniformly offset regions etched on its surface to provide a multiplicity of diffracted radiation beams.

Claim 23

A modular compensation assembly of refractive elements for use in a high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, or surface cleaning, microstructuring, pattern microimaging, surface modification, said delivery system comprising a deep UV radiation source for generating a beam of narrow wavelength deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least of 0.3, and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure, said modular compensation assembly having the following dimensional values: ______________________________________ Radius Spacing (Millimeters) (Millimeters) ______________________________________ 69.21 4.86 27.82 3.47 28.40 9.00 69.00 0.50 17.00 12.66 6.54 5.66 208.12 6.39 -70.54 3.10 ______________________________________

Claim 24

A modular compensation assembly of refractive elements for use in a high resolution, deep UV beam delivery system for exposing a surface, directly or through a mask, for purposes such as photolithography, or surface cleaning, microstructuring, pattern microimaging, surface modification, said delivery system comprising a deep UV radiation source for generating a beam of narrow wavelength deep ultraviolet radiation along a path, a first optical system in said path for homogenizing and shaping the deep UV energy in said path; and a second optical system in said path for directing radiation energy onto the surface of a substrate to be processed, said second optical system including large area mirror structure having a numerical aperture of at least of 0.3, and a modular compensation assembly of refractive elements disposed between said large area mirror structure and said substrate and corresponding to the wavelength of said radiation source for compensating (reducing) image curvature introduced into the system by said large area mirror structure, said modular compensation assembly having the following dimensional values: ______________________________________ Radius Spacing (Millimeters) (Millimeters) ______________________________________ 69.21 4.86 27.82 3.47 28.40 9.00 69.00 0.50 17.00 12.66 6.54 5.66 208.12 6.39 -70.54 3.10 ______________________________________

Claim 25

The assembly of claim 17 wherein all of the refractive elements in said modular compensation assembly are of fused silica.

Claim 26

The assembly of claim 17 wherein said modular compensation assembly provides field flattening improvement of at least five times and includes a field flattening lens with curvature of at least five times the curvature of said convex mirror.