US4747678A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical relay system with magnification
Assignee: SVG LITHOGRAPHY Inc A CORP OF
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Filing: 1986-12-17
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Granted: 1988-05-31
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Expires: 2006-12-17
Abstract
Abstract There is disclosed a ring field relay optical system incorporating concave spherical mirrors and including magnification achieved, at least partially, by a convex spherical mirror. In further modifications, aberrations introduced by the convex mirror are controlled by lens groups formed from fused silica. The system is usable from the visible through the deep ultraviolet portion of the spectrum.
Inventors
- 👤 David R. Shafer
- 👤 Abe Offner
- 👤 Rama Singh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 14:42
CPC Classifications
G; G02; G02B; G02B27/00; G02B17/00; G02B17/08; G02B17/0836; G02B17/0844; G02B13/00; G02B13/22; G02B17/02; G02B17/06; G02B17/0647; G02B17/0657; G02B17/0892; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70225; G03F7/70233
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
141 words
An optical system for forming a magnified image of an object within an annular ring field concentric with the optical axis of the system, comprising: first, second, and third concave spherical mirrors, a convex spherical mirror providing substantially all of the magnification in the system, each of said mirrors having its center of curvature on the optical axis of the system, said first concave mirror being disposed to receive light from an object area, said convex mirror being disposed to receive light from said first concave mirror, said second concave mirror being disposed to receive light from said convex mirror, and said third concave mirror being disposed to receive light from said second concave mirror and focus it at a final image area, said second concave mirror focusing light at an intermediate image area between said second and third concave mirrors.
Claim 2
Dependent Claim
141 words
An optical system for forming a magnified image of an object within an annular ring field concentric with the optical axis of the system, comprising: first, second, and third concave spherical mirrors, a convex spherical mirror providing substantially all of the magnification in the system, each of said mirrors having its center of curvature on the optical axis of the system, said first concave mirror being disposed to receive light from an object area, said convex mirror being disposed to receive light from said first concave mirror, said second concave mirror being disposed to receive light from said convex mirror, and said third concave mirror being disposed to receive light from said second concave mirror and focus it at a final image area, said second concave mirror focusing light at an intermediate image area between said second and third concave mirrors.
Claim 3
Dependent Claim
15 words
The optical system of claim 1 wherein all the concave mirrors operate at unit magnification.
Claim 4
Dependent Claim
17 words
The optical system of claim 1 which is substantially telecentric in both the object and image spaces.
Claim 5
Dependent Claim
33 words
The optical system of claim 1 further comprising: a plurality of refractive lens means disposed throughout the optical path of the system for correcting aberrations resulting from the presence of said convex mirror.
Claim 6
Dependent Claim
70 words
The optical system of claim 4 wherein said plurality of lens means comprises: a first lens group positioned between the object and the first concave spherical mirror; a lens group positioned closely adjacent the convex mirror; an intermediate lens group positioned between the second concave spherical mirror and the third concave spherical mirror; and a final lens group positioned between the third concave spherical mirror and the final image area.
Claim 7
Dependent Claim
25 words
The optical system of claim 5 wherein: said final lens group comprises at least one lens means for correcting coma introduced by said convex mirror.
Claim 8
Dependent Claim
35 words
The optical system of claim 6 wherein: said intermediate lens group comprises at least one lens means for correcting longitudinal and lateral color introduced by the coma correcting lens means of said final lens group.
Claim 9
Dependent Claim
21 words
The optical system of claim 7 wherein: said intermediate lens group comprises at least one lens means for correcting Petzval curvature.
Claim 10
Dependent Claim
43 words
The optical system of claim 7 wherein the powers of: (a) the lens means contained within the intermediate lens group for correcting longitudinal and lateral color; and (b) the coma correcting lens means of said final lens group are approximately equal and opposite.
Claim 11
Dependent Claim
21 words
The optical system of claim 9 wherein: said intermediate lens group comprises at least one lens means for correcting Petzval curvature.
Claim 12
Dependent Claim
33 words
The optical system of claim 7 wherein: the intermediate image formed in the system is larger than the final image and the coma correcting lens means of the final lens group introduces magnification.
Claim 13
Dependent Claim
21 words
The optical system of claim 5 wherein the lens group adjacent the convex mirror comprises a thin shell for correcting spherochromatism.
Claim 14
Dependent Claim
16 words
The optical system of claim 5 wherein additional magnification takes place in the final lens group.
Claim 15
Dependent Claim
15 words
The optical system of claim 5 wherein all lens means are of the same material.
Claim 16
Dependent Claim
13 words
The optical system of claim 14 wherein all lens means are fused silica.
Claim 17
Dependent Claim
16 words
The optical system of claim 5 wherein all the concave mirrors operate at substantially unit magnification.
Claim 18
Dependent Claim
17 words
The optical system of claim 5 which is substantially telecentric in both the object and image spaces.
Claim 19
Dependent Claim
30 words
An optical system according to claim 5 in which the final lens group has a focal length substantially smaller than the distance between this group and the third concave mirror.
Claim 20
Dependent Claim
13 words
The optical system of claim 1 wherein said concave mirrors are optically concentric.
Claim 21
Dependent Claim
14 words
The optical system of claim 5 wherein said concave mirrors are nearly optically concentric.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-31 | 1991-11-30 | 1992-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-31 | 1995-11-30 | 1996-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-31 | 1999-11-30 | 2000-05-31 | $7700.00 | Window Closed / Lapsed |