Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
170 words
A bubbler for use in a metal organic chemical vapor phase deposition system, said bubbler comprising: a sealed container comprising a slanted wall having an inverted cone-shaped cross section; solid metal organic source material disposed in the sealed container; a heat bath surrounding the sealed container; a carrying gas inlet disposed adjacent the top of the inverted cone-shaped container disposed so that carrying gas is injected in a tangential direction relative to the solid source material, and wherein a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules thereof, pushing the source material against the wall of the bubbler to promote heat flow from the heat bath to sustain high rate sublimation; and a gas outlet disposed adjacent the bottom of the inverted cone-shaped container; whereby once source material lining the slanted wall is removed, gravitational forces cause the source material to refill empty spaces, reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler.
Claim 2
Dependent Claim
170 words
A bubbler for use in a metal organic chemical vapor phase deposition system, said bubbler comprising: a sealed container comprising a slanted wall having an inverted cone-shaped cross section; solid metal organic source material disposed in the sealed container; a heat bath surrounding the sealed container; a carrying gas inlet disposed adjacent the top of the inverted cone-shaped container disposed so that carrying gas is injected in a tangential direction relative to the solid source material, and wherein a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules thereof, pushing the source material against the wall of the bubbler to promote heat flow from the heat bath to sustain high rate sublimation; and a gas outlet disposed adjacent the bottom of the inverted cone-shaped container; whereby once source material lining the slanted wall is removed, gravitational forces cause the source material to refill empty spaces, reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler.
Claim 3
Dependent Claim
21 words
The bubbler of claim 1 wherein the inverted cone-shaped container has a base angle of from approximately ten to forty-five degrees.
Claim 4
Dependent Claim
13 words
The bubbler of claim 1 wherein the solid source material comprises trimethyl indium.
Claim 5
Dependent Claim
11 words
The bubbler of claim 1 wherein the carrying gas comprises hydrogen.
Claim 6
Independent Claim
172 words
A method of producing a carrying gas saturated with source material that is injected into an epitaxial reactor, said method comprising the steps of: providing a sealed container comprising a slanted side wall having an inverted cone-shaped cross section; disposing solid metal organic source material in the sealed container; heating the sealed container; injecting a carrying gas into the inverted cone-shaped container adjacent the top thereof so that carrying gas is injected in a tangential direction relative to the solid source material, and wherein a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules thereof, pushing the source material against the wall of the bubbler to promote heat flow from the heat bath to sustain high rate sublimation; and removing saturated carrying gas from a gas outlet disposed adjacent the bottom of the inverted cone-shaped container; whereby gravitational forces cause source material to refill empty spaces, thus reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler.
Claim 7
Independent Claim
172 words
A method of producing a carrying gas saturated with source material that is injected into an epitaxial reactor, said method comprising the steps of: providing a sealed container comprising a slanted side wall having an inverted cone-shaped cross section; disposing solid metal organic source material in the sealed container; heating the sealed container; injecting a carrying gas into the inverted cone-shaped container adjacent the top thereof so that carrying gas is injected in a tangential direction relative to the solid source material, and wherein a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules thereof, pushing the source material against the wall of the bubbler to promote heat flow from the heat bath to sustain high rate sublimation; and removing saturated carrying gas from a gas outlet disposed adjacent the bottom of the inverted cone-shaped container; whereby gravitational forces cause source material to refill empty spaces, thus reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler.
Claim 8
Dependent Claim
32 words
The method of claim 5 wherein the step of providing a sealed container comprises the step of providing a sealed container having a base angle of from approximately ten to forty-five degrees.
Claim 9
Dependent Claim
30 words
The method of claim 5 wherein the step of disposing solid metal organic source material in the sealed container comprises the step of disposing trimethyl indium in the sealed container.
Claim 10
Dependent Claim
27 words
The method of claim 5 wherein the step of injecting a carrying gas into the inverted cone-shaped container comprises the step of injecting hydrogen into the container.