Method of making metal oxide semiconductor transistors

Claim 1

A method of making metal oxide semiconductor transistor comprising the steps of: growing a first oxide film on a silicon substrate having a first conductivity type; depositing a nitride film thickly on the first oxide film; etching the nitride film together with the first oxide film to form an opening region; depositing a first polysilicon film thinly on the whole surface of the silicon substrate; forming sidewall spacers in the opening region to expose a portion of the first polysilicon film formed on the silicon substrate and the first polysilicon film formed on the nitride film; performing a thermal oxidation process to the first polysilicon film exposed on the silicon substrate and the polysilicon film exposed on the nitride film using the sidewall spacers as an oxidation mask to form a thick field oxide film and a thin second oxide film, respectively; removing the sidewall spacers to expose the remaining first polysilicon film covered by the sidewall spacers; oxidizing said remaining first polysilicon film to form a third oxide film; implanting a second conductivity type of impurity-ions and a first conductivity type of impurity ions into the silicon substrate in this order using the thick field oxide film as an ion-implantation mask, to form the second conductivity type low concentration source region and drain region and the first conductivity type impurity region enclosing the low concentration source region and drain region; removing the third oxide film and the field oxide film such that the silicon substrate has a recessed surface in the opening region and also removing the second oxide film to expose the nitride film; forming a fourth oxide film for a gate oxide film on the recessed surface of the silicon substrate; forming a polysilicon film for a gate electrode on the fourth oxide film to fill a portion of the opening region with the polysilicon film; forming a thick oxide film on the second polysilicon film and then etching back to fill the opening region completely; removing the exposed nitride film to expose the first oxide film; and implanting a second conductivity type of impurity-ions into the silicon substrate via the exposed first oxide film using the second polysilicon film as a mask, to form a high concentration source region and drain region.

Claim 2

A method of making metal oxide semiconductor transistor comprising the steps of: growing a first oxide film on a silicon substrate having a first conductivity type; depositing a nitride film thickly on the first oxide film; etching the nitride film together with the first oxide film to form an opening region; depositing a first polysilicon film thinly on the whole surface of the silicon substrate; forming sidewall spacers in the opening region to expose a portion of the first polysilicon film formed on the silicon substrate and the first polysilicon film formed on the nitride film; performing a thermal oxidation process to the first polysilicon film exposed on the silicon substrate and the polysilicon film exposed on the nitride film using the sidewall spacers as an oxidation mask to form a thick field oxide film and a thin second oxide film, respectively; removing the sidewall spacers to expose the remaining first polysilicon film covered by the sidewall spacers; oxidizing said remaining first polysilicon film to form a third oxide film; implanting a second conductivity type of impurity-ions and a first conductivity type of impurity ions into the silicon substrate in this order using the thick field oxide film as an ion-implantation mask, to form the second conductivity type low concentration source region and drain region and the first conductivity type impurity region enclosing the low concentration source region and drain region; removing the third oxide film and the field oxide film such that the silicon substrate has a recessed surface in the opening region and also removing the second oxide film to expose the nitride film; forming a fourth oxide film for a gate oxide film on the recessed surface of the silicon substrate; forming a polysilicon film for a gate electrode on the fourth oxide film to fill a portion of the opening region with the polysilicon film; forming a thick oxide film on the second polysilicon film and then etching back to fill the opening region completely; removing the exposed nitride film to expose the first oxide film; and implanting a second conductivity type of impurity-ions into the silicon substrate via the exposed first oxide film using the second polysilicon film as a mask, to form a high concentration source region and drain region.

Claim 8

A method of making a metal oxide semiconductor transistor comprising the steps of: growing a first oxide film on a silicon substrate having a first conductivity type; depositing a nitride film thickly on the first oxide film; etching the nitride film together with the first oxide film to form an opening region; depositing a first polysilicon film thinly on the whole surface of the silicon substrate; forming sidewall spacers in the opening region to expose a portion of the first polysilicon film formed on the silicon substrate and the first polysilicon film formed on the nitride film; implanting the first conductivity type of impurity-ions into the silicon substrate via the opening region to form an impurity region having a first conductivity type; performing a thermal oxidation process to the first polysilicon film exposed on the silicon substrate and the first polysilicon film exposed on the nitride film to form a thick field oxide film and a second thin oxide film, respectively; removing the sidewall spacers to expose the remaining portion of the first polysilicon film; oxidizing the remaining portion of the first polysilicon film to form a third oxide film; implanting second conductivity type of impurity-ions into the silicon substrate to form a low concentration source region and a drain region; removing the third oxide film and the field oxide film such that the silicon substrate has a recessed surface in the opening region and also removing the second oxide film to expose the nitride film; forming a fourth oxide film for a gate oxide film on the recessed surface of silicon substrate with a thinner thickness than that of the first oxide film; forming and then etching back a polysilicon film for a gate electrode on the fourth oxide film to fill a portion of the opening region with the polysilicon film; forming a thick fifth oxide film on the second polysilicon film to fill the opening region completely; removing the exposed nitride film to expose the first oxide film; and implanting the second conductivity type of impurity-ions into the silicon substrate via the exposed first oxide film using the second polysilicon film as a mask, to form a high concentration source region and drain region.

Claim 9

A method of making a metal oxide semiconductor transistor comprising the steps of: growing a first oxide film on a silicon substrate having a first conductivity type; depositing a nitride film thickly on the first oxide film; etching the nitride film together with the first oxide film to form an opening region; depositing a first polysilicon film thinly on the whole surface of the silicon substrate; forming sidewall spacers in the opening region to expose a portion of the first polysilicon film formed on the silicon substrate and the first polysilicon film formed on the nitride film; implanting the first conductivity type of impurity-ions into the silicon substrate via the opening region to form an impurity region having a first conductivity type; performing a thermal oxidation process to the first polysilicon film exposed on the silicon substrate and the first polysilicon film exposed on the nitride film to form a thick field oxide film and a second thin oxide film, respectively; removing the sidewall spacers to expose the remaining portion of the first polysilicon film; oxidizing the remaining portion of the first polysilicon film to form a third oxide film; implanting second conductivity type of impurity-ions into the silicon substrate to form a low concentration source region and a drain region; removing the third oxide film and the field oxide film such that the silicon substrate has a recessed surface in the opening region and also removing the second oxide film to expose the nitride film; forming a fourth oxide film for a gate oxide film on the recessed surface of silicon substrate with a thinner thickness than that of the first oxide film; forming and then etching back a polysilicon film for a gate electrode on the fourth oxide film to fill a portion of the opening region with the polysilicon film; forming a thick fifth oxide film on the second polysilicon film to fill the opening region completely; removing the exposed nitride film to expose the first oxide film; and implanting the second conductivity type of impurity-ions into the silicon substrate via the exposed first oxide film using the second polysilicon film as a mask, to form a high concentration source region and drain region.