US5082794A
Expired / Lapsed
US
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Method of fabricating mos transistors using selective polysilicon deposition
Assignee: Motorola Solutions Inc
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Filing: 1990-08-17
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Granted: 1992-01-21
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Expires: 2010-08-17
Abstract
Abstract In forming a lightly-doped drain (LDD) transistor there is first formed a thin polysilicon layer over a gate oxide on an active region. A masking layer is deposited and selectively etched to expose a middle portion of the polysilicon layer. This structure can be used as part of a process which results ina formation of an inverse-T transistor or a conventional LDD structure which is formed by disposable sidewall spacers. The exposed middle portion of the polysilicon layer is used to form a polysilicon gate by selective polysilicon deposition. The exposed middle portion can be implanted through for the channel implant, thus providing self-alignment to the source/drain implants. Sidewall spacers can be formed inside the exposed portion to reduce the channel length. These sidewall spacers can be nitride to provide etching selectivity between the sidewall spacer and the conveniently used low temperature oxide (LTO) mask.
Inventors
- 👤 James R. Pfiester
- 👤 Frank K. Baker
- 👤 Richard D. Sivan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:22
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0225; H10D30/60; H10D30/601; H10D30/605; H10D62/00; H10D62/10; H10D62/17; H10D62/213; H10D62/221; H10D62/235; H10D62/299; H10D62/307; H10D64/00; H10D64/01; H10D64/018; H10D30/0217; Y; Y10; Y10S; Y10S148/00; Y10S148/122
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
182 words
A method for forming a device structure in an active region, comprising: forming an insulator layer over all of the active region; forming a polysilicon layer over the insulator layer and over all of the active region; forming a masking layer over the polysilicon layer to cover all of the active region; etching away an intermediate portion of the masking layer to leave a first portion and a second portion of the polysilicon layer over the active region covered by the masking layer and to expose a third portion of the polysilicon layer over the polysilicon layer between the first and second portions; forming a first sidewall spacer along the first sidewall to cover a fourth portion of the the polysilicon layer in said third portion; forming a second sidewall spacer on the second sidewall to cover a fifth portion of the polysilicon layer, said fourth and fifth portions being separated by a sixth portion of the polysilicon layer; and selectively depositing silicon to form a polysilicon gate on the third portion of the polysilicon layer between the first and second sidewalls.
Claim 2
Independent Claim
182 words
A method for forming a device structure in an active region, comprising: forming an insulator layer over all of the active region; forming a polysilicon layer over the insulator layer and over all of the active region; forming a masking layer over the polysilicon layer to cover all of the active region; etching away an intermediate portion of the masking layer to leave a first portion and a second portion of the polysilicon layer over the active region covered by the masking layer and to expose a third portion of the polysilicon layer over the polysilicon layer between the first and second portions; forming a first sidewall spacer along the first sidewall to cover a fourth portion of the the polysilicon layer in said third portion; forming a second sidewall spacer on the second sidewall to cover a fifth portion of the polysilicon layer, said fourth and fifth portions being separated by a sixth portion of the polysilicon layer; and selectively depositing silicon to form a polysilicon gate on the third portion of the polysilicon layer between the first and second sidewalls.
Claim 3
Dependent Claim
12 words
The method of claim 1 further comprising: etching away the masking layer.
Claim 4
Dependent Claim
26 words
The method of claim 2 further comprising: implanting into the active region using the first and second sidewall spacers and the polysilicon gate as a mask.
Claim 5
Dependent Claim
15 words
The method of claim 3 further comprising: etching away the first and second sidewall spacers.
Claim 6
Dependent Claim
19 words
The method of claim 4 further comprising: implanting into the active region using the polysilicon gate as a mask.
Claim 7
Dependent Claim
56 words
The method of claim 1 further comprising: implanting through the sixth portion of the polysilicon layer, prior to selectively depositing silicon, using the unetched portions of the masking layer and the first and second sidewall spacers as a mask to form a channel region in the active region under the sixth portion of the polysilicon layer.
Claim 8
Dependent Claim
52 words
The method of claim 6 further comprising: etching away the masking layer; implanting into the active region using the first and second sidewall spacers and the polysilicon gate as a mask; etching away the first and second sidewall spacers; and implanting into the active region using the polysilicon gate as a mask.
Claim 9
Independent Claim
157 words
A method for forming a device structure in an active region, comprising: forming an insulator layer over all of the active region; forming a polysilicon layer over the insulator layer and over all of the active region; forming a masking layer over the polysilicon layer to cover all of the active region; etching away an intermediate portion of the masking layer to leave a first portion and a second portion of the polysilicon layer over the active region covered by the masking layer and to expose a third portion of the polysilicon layer over the polysilicon layer between the first and second portions; implanting through the third portion of the polysilicon layer using the unetched portions of the masking layer as a mask to form a channel region in the active region under the third portion of the polysilicon layer; and selectively depositing polysilicon on the third portion of the polysilicon layer to provide a polysilicon gate.
Claim 10
Independent Claim
157 words
A method for forming a device structure in an active region, comprising: forming an insulator layer over all of the active region; forming a polysilicon layer over the insulator layer and over all of the active region; forming a masking layer over the polysilicon layer to cover all of the active region; etching away an intermediate portion of the masking layer to leave a first portion and a second portion of the polysilicon layer over the active region covered by the masking layer and to expose a third portion of the polysilicon layer over the polysilicon layer between the first and second portions; implanting through the third portion of the polysilicon layer using the unetched portions of the masking layer as a mask to form a channel region in the active region under the third portion of the polysilicon layer; and selectively depositing polysilicon on the third portion of the polysilicon layer to provide a polysilicon gate.
Claim 11
Dependent Claim
11 words
The method of claim 8 further comprising: removing the masking layer.
Claim 12
Dependent Claim
174 words
The method of claim 9 further comprising: implanting through the first and second portions of the polysilicon layer using the polysilicon gate as a mask to form a drain region in the active region under the first portion of the polysilicon layer and a source region in the active region under the second portion of the polysilicon layer; forming a first sidewall spacer on the polysilicon layer, along a first side of the polysilicon gate, and over a first portion of the source region to leave a second portion of the source region uncovered by the first sidewall spacer; forming a second sidewall spacer on the polysilicon layer, along a second side of the polysilicon gate, and over a first portion of the drain region to leave a second portion of the drain region uncovered by the second sidewall spacer; and implanting into the second portion of the source region and the second portion of the drain region using the first sidewall spacer, the second sidewall spacer, and the polysilicon gate as a mask.
Claim 13
Dependent Claim
233 words
The method of claim 9 further comprising: forming a first sidewall spacer on the polysilicon layer, along a first side of the polysilicon gate, and over a fourth portion of the polysilicon layer which is in the first portion of the polysilicon layer leaving a fifth portion of the polysilicon layer which is in the first portion of the polysilicon layer uncovered by the first sidewall spacer; forming a second sidewall spacer on the polysilicon layer, along a second side of the polysilicon gate, and over a sixth portion of the polysilicon layer which is in the second portion of the polysilicon layer leaving a seventh portion of the polysilicon layer which is in the second portion of the polysilicon layer uncovered by the second sidewall spacer; implanting through the fifth and seventh portions of the polysilicon layer using the polysilicon gate and the first and second sidewall spacers as a mask to form a first heavily-doped region under the fifth portion of the polysilicon layer and a second heavily-doped region under the seventh portion of the polysilicon layer; etching away the first and second sidewall spacer; and implanting through the first and second portions of the polysilicon layer using the polysilicon gate as a mask to form a first lightly-doped region under the fourth portion of the polysilicon layer and a second lightly-doped region under the sixth portion of the polysilicon layer.
Claim 14
Independent Claim
120 words
A method for forming a device structure in an active region, comprising: forming an insulator layer over all of the active region; forming a polysilicon layer over the insulator layer and over all of the active region; forming a masking layer over the polysilicon layer to cover all of the active region; etching away an intermediate portion of the masking layer to leave a first portion and a second portion of the polysilicon layer over the active region covered by the masking layer and to expose a third portion of the polysilicon layer over the polysilicon layer between the first and second portions; and selectively depositing polysilicon on the third portion of the polysilicon layer to provide a polysilicon gate.
Claim 15
Independent Claim
120 words
A method for forming a device structure in an active region, comprising: forming an insulator layer over all of the active region; forming a polysilicon layer over the insulator layer and over all of the active region; forming a masking layer over the polysilicon layer to cover all of the active region; etching away an intermediate portion of the masking layer to leave a first portion and a second portion of the polysilicon layer over the active region covered by the masking layer and to expose a third portion of the polysilicon layer over the polysilicon layer between the first and second portions; and selectively depositing polysilicon on the third portion of the polysilicon layer to provide a polysilicon gate.
Claim 16
Dependent Claim
11 words
The method of claim 12 further comprising: removing the masking layer.
Claim 17
Dependent Claim
58 words
The method of claim 13 further comprising: implanting through the first and second portions of the polysilicon layer using the polysilicon gate as a mask to form a drain region in the active region under the first portion of the polysilicon layer and a source region in the active region under the second portion of the polysilicon layer.
Claim 18
Dependent Claim
90 words
The method of claim 14 further comprising: forming a first sidewall spacer on the polysilicon layer, along a first side of the polysilicon gate, and over a first portion of the source region to leave a second portion of the source region uncovered by the first sidewall spacer; and forming a second sidewall spacer on the polysilicon layer, along a second side of the polysilicon gate, and over a first portion of the drain region to leave a second portion of the drain region uncovered by the second sidewall spacer.
Claim 19
Dependent Claim
40 words
The method of claim 15 further comprising: implanting into the second portion of the source region and the second portion of the drain region using the first sidewall spacer, the second sidewall spacer, and the polysilicon gate as a mask.
Claim 20
Dependent Claim
48 words
The method of claim 16 further comprising: etching away portions of the polysilicon layer which are over the second portion of the source region and the second portion of the drain region using the first sidewall spacer, the second sidewall spacer, and the polysilicon gate as a mask.
Claim 21
Dependent Claim
128 words
The method of claim 13 further comprising: forming a first sidewall spacer on the polysilicon layer, along a first side of the polysilicon gate, and over a fourth portion of the polysilicon layer which is in the first portion of the polysilicon layer leaving a fifth portion of the polysilicon layer which is in the first portion of the polysilicon layer uncovered by the first sidewall spacer; and forming a second sidewall spacer on the polysilicon layer, along a second side of the polysilicon gate, and over a sixth portion of the polysilicon layer which is in the second portion of the polysilicon layer leaving a seventh portion of the polysilicon layer which is in the second portion of the polysilicon layer uncovered by the second sidewall spacer.
Claim 22
Dependent Claim
59 words
The method of claim 18 further comprising: implanting through the fifth and seventh portions of the polysilicon layer using the polysilicon gate and the first and second sidewall spacers as a mask to form a first heavily-doped region under the fifth portion of the polysilicon layer and a second heavily-doped region under the seventh portion of the polysilicon layer.
Claim 23
Dependent Claim
61 words
The method of claim 19 further comprising: etching away the first and second sidewall spacer; and implanting through the first and second portions of the polysilicon layer using the polysilicon gate as a mask to form a first lightly-doped region under the fourth portion of the polysilicon layer and a second lightly-doped region under the sixth portion of the polysilicon layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-20 | 1995-07-22 | 1996-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-20 | 1999-07-22 | 2000-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-20 | 2003-07-22 | 2004-01-21 | $7700.00 | Window Closed / Lapsed |