Patent US5539240A successfully refreshed from Google Patents.
US5539240A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Planarized semiconductor structure with subminimum features
Assignee: International Business Machines Corp
•
Filing: 1995-06-06
•
Granted: 1996-07-23
•
Expires: 2015-06-06
Abstract
Abstract Improved, planarized semiconductor structures are described which are prepared by a method involving the creation of a series of subminimum (i.e., 50 to 500 angstroms thick) polysilicon pillars extending vertically upward from the base of a wide trench and depositing a conductor material by chemical vapor deposition over the pillars; the pillars prevent the formation of a depression within the trench when planarized.
Inventors
- 👤 John E. Cronin
- 👤 Howard S. Landis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:10
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/692; H10P95/00; H10P95/06; H10P95/062; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/945
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
92 words
A planarized semiconductor structure comprising: a recessed area within the structure, having a surface adjacent said recessed area; a plurality of pillars formed within said recessed area; a planarized layer of fill which comprises a conductor material or a semiconductor material, deposited over said pillars and said recessed area, wherein a second surface of said planarized layer of fill is substantially planar with said surface of said semiconductor structure, and wherein the grain boundaries of the material forming the pillars is distinct from the grain boundaries of the conductor or semiconductor material.
Claim 2
Dependent Claim
92 words
A planarized semiconductor structure comprising: a recessed area within the structure, having a surface adjacent said recessed area; a plurality of pillars formed within said recessed area; a planarized layer of fill which comprises a conductor material or a semiconductor material, deposited over said pillars and said recessed area, wherein a second surface of said planarized layer of fill is substantially planar with said surface of said semiconductor structure, and wherein the grain boundaries of the material forming the pillars is distinct from the grain boundaries of the conductor or semiconductor material.
Claim 3
Dependent Claim
14 words
The planarized semiconductor structure of claim 1, wherein said conductor material comprises a metal.
Claim 4
Dependent Claim
19 words
The planarized semiconductor structure of claim 2, wherein the conductor material for the fill layer comprises a metal silicide.
Claim 5
Dependent Claim
21 words
The planarized semiconductor structure of claim 1 wherein the density of said pillars comprises one to ten pillars per square micron.
Claim 6
Dependent Claim
13 words
The planarized semiconductor structure of claim 1 wherein said pillars are randomly placed.
Claim 7
Dependent Claim
14 words
The planarized semiconductor structure of claim 1 wherein said recessed area comprises a trench.
Claim 8
Dependent Claim
17 words
The planarized semiconductor of claim 1, wherein the pillars are formed of a material comprising a conductor.
Claim 9
Dependent Claim
18 words
The planarized semiconductor structure of claim 7, wherein the conductor used to form the pillars comprises a metal.
Claim 10
Dependent Claim
17 words
The planarized semiconductor structure of claim 1, wherein the pillars are form of a material comprising polysilicon.
Claim 11
Dependent Claim
13 words
The planarized semiconductor structure of claim 1 wherein said pillars are non-randomly placed.
References Cited (Backward Citations)
EP0001100A2
Cited
US4139442A
Cited
US4493740A
Cited
EP0083510A2
Cited
EP0180222A2
Cited
US4887144A
Cited
US4944836A
Cited
WO1987003139A2
Cited
GB2189493A
Cited
EP0271346A2
Cited
US5094973A
Cited
US4982266A
Cited
JPH03167874A
Cited
US5191509A
Cited
US5204280A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-23 | 2000-01-22 | 2000-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-23 | 2004-01-22 | 2004-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-23 | 2008-01-22 | 2008-07-23 | $7700.00 | Window Closed / Lapsed |