US5537863A
Expired / Lapsed
US
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Scanning probe microscope having a cantilever used therein
Assignee: Nikon Corp
•
Filing: 1994-07-15
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Granted: 1996-07-23
•
Expires: 2014-07-15
Abstract
Abstract A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a piezoelectric layer and electrodes, and the piezoelectric layer is disposed between these electrodes.
Inventors
- 👤 Takamitsu Fujiu
- 👤 Shunji Watanabe
- 👤 Tatsushi Nomura
- 👤 Toru Fujii
- 👤 Yoshinori Sango
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 20:15
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/04; B; B82; B82Y; B82Y35/00; G01Q10/00; G01Q10/04; G01Q10/045; G01Q60/00; G01Q60/24; G01Q60/38; H; H10; H10N; H10N30/00; H10N30/20; H10N30/204; H10N30/2041; H10N30/2042
Claims Analysis
Total Claims: 69
Claim 1
Independent Claim
79 words
A scanning probe microscope for evaluating a surface of a sample comprising a cantilever for interaction with said surface, said cantilever having a self vibrator for vibrating said cantilever and a self strain detector for detecting a displacement of said cantilever wherein said self vibrator comprises a first layer of piezoelectric crystal, a first electrode and a second electrode formed on said first layer so that said first layer is located between said first electrode and said second electrode.
Claim 2
Dependent Claim
79 words
A scanning probe microscope for evaluating a surface of a sample comprising a cantilever for interaction with said surface, said cantilever having a self vibrator for vibrating said cantilever and a self strain detector for detecting a displacement of said cantilever wherein said self vibrator comprises a first layer of piezoelectric crystal, a first electrode and a second electrode formed on said first layer so that said first layer is located between said first electrode and said second electrode.
Claim 3
Dependent Claim
39 words
A scanning probe microscope according to claim 1, wherein said cantilever has a first portion and a second portion, said cantilever is fixed at said first portion, and said self vibrator is provided at least in said second portion.
Claim 4
Dependent Claim
63 words
A scanning probe microscope according to claim 1, wherein said self strain detector is formed on said self vibrator, said self strain detector comprising: a second layer of a piezoelectric crystal; a third electrode formed on said second layer; and a fourth electrode formed on said second layer so that said second layer is located between said third electrode and said fourth electrode.
Claim 5
Dependent Claim
27 words
A scanning probe microscope according to claim 3, wherein said plate further comprises a first insulator layer disposed between said self vibrator and said self strain detector.
Claim 6
Dependent Claim
29 words
A scanning probe microscope according to claim 1, said scanning probe microscope further comprising: a sample table; and an actuator for moving said cantilever relative to said sample table.
Claim 7
Dependent Claim
48 words
A scanning probe microscope according to claim 3, said scanning probe microscope further comprising a power supply for applying an ac voltage between said first electrode and said second electrode of said vibrator to vibrate said cantilever in the direction of said first electrode to said second electrode.
Claim 8
Dependent Claim
42 words
A scanning probe microscope according to claim 6, said scanning probe microscope further comprising a signal processing unit for processing a signal extracted from said third electrode and said fourth electrode, said signal concerning an amount of the strain of said cantilever.
Claim 9
Dependent Claim
40 words
A scanning probe microscope according to claim 3, wherein said cantilever further comprises a second insulator layer formed on said self strain detector so that said self strain detector is disposed between said self vibrator and said second insulator layer.
Claim 10
Dependent Claim
39 words
A scanning probe microscope according to claim 3, wherein said cantilever further comprises a second insulator layer formed on said self vibrator so that said self vibrator is disposed between said self strain detector and said second insulator layer.
Claim 11
Dependent Claim
36 words
A scanning probe microscope according to claim 3, wherein said first layer or said second layer is made of a material comprising either one of lead titanate zirconate-lanthanum oxide, lead magnesium niobate-lead titanate, and barium titanate.
Claim 12
Dependent Claim
66 words
A scanning probe microscope according to claim 8, wherein said cantilever has a first portion and second portion, said cantilever is fixed at said first portion, said cantilever has a pointed portion made of a material containing silicon dioxide, said pointed portion is formed on said second insulator layer made of a material containing silicon nitride, and said pointed portion is arranged on said second portion.
Claim 13
Dependent Claim
66 words
A scanning probe microscope according to claim 9, wherein said cantilever has a first portion and second portion, said cantilever is fixed at said first portion said cantilever has a pointed portion made of a material containing silicon dioxide, said pointed portion is formed on said second insulator layer made of a material containing silicon nitride, and said pointed portion is arranged on said second portion.
Claim 14
Dependent Claim
38 words
A scanning probe microscope according to claim 4, wherein said cantilever further comprises a first buffer layer disposed between said first insulator layer and said second layer, wherein said second layer is made of a material containing lead.
Claim 15
Dependent Claim
16 words
A scanning probe microscope according to claim 13, wherein said first insulator layer is silicon nitride.
Claim 16
Dependent Claim
29 words
A scanning probe microscope according to claim 13, wherein said first buffer layer is made of a material containing either one of aluminum oxide, magnesium oxide, and chromium oxide.
Claim 17
Dependent Claim
38 words
A scanning probe microscope according to claim 13, wherein said cantilever further comprises a second buffer layer disposed between said first layer and said first insulator layer, wherein said first layer is made of a material containing lead.
Claim 18
Dependent Claim
16 words
A scanning probe microscope according to claim 16, wherein said first insulator layer is silicon nitride.
Claim 19
Dependent Claim
29 words
A scanning probe microscope according to claim 17, wherein said second buffer layer is made of a material containing either one of aluminum oxide, magnesium oxide, and chromium oxide.
Claim 20
Dependent Claim
19 words
A scanning probe microscope according to claim 4, wherein said first electrode is made of a material containing platinum.
Claim 21
Dependent Claim
62 words
A scanning probe microscope according to claim 8, wherein said cantilever further comprises a silicon layer formed on said self strain detector so that said self strain detector is disposed between said self vibrator and said second insulator layer, said fourth electrode is disposed between said second layer and silicon layer, and said fourth electrode is made of the material containing platinum.
Claim 22
Dependent Claim
19 words
A scanning probe microscope according to claim 20, wherein fourth electrode is made of the material further containing titanium.
Claim 23
Dependent Claim
19 words
A scanning probe microscope according to claim 20, wherein fourth electrode is made of the material further containing tantalum.
Claim 24
Dependent Claim
36 words
A scanning probe microscope according to claim 1, wherein said cantilever further comprises an insulator layer formed on said first electrode so that said first electrode is disposed between said first layer and said insulator layer.
Claim 25
Dependent Claim
66 words
A scanning probe microscope according to claim 23, said scanning probe microscope further comprising: a third electrode formed on said first layer; a power supply for applying an ac voltage between said first electrode and said second electrode; and a signal processing unit for processing a signal concerning an amount of the strain of said cantilever and extracted from said second electrode and said third electrode.
Claim 26
Dependent Claim
69 words
A scanning probe microscope according to claim 23, wherein said cantilever further comprises a silicon layer so that said first electrode is disposed between said first layer and said silicon layer, and said first electrode comprises: first metal layer made of a material containing titanium being in contact with said silicon layer; and a second metal layer made of a material containing platinum formed on said first metal layer.
Claim 27
Dependent Claim
69 words
A scanning probe microscope according to claim 23, wherein said cantilever further comprises a silicon layer so that said first electrode is disposed between said first layer and said silicon layer, and said first electrode comprises: first metal layer made of a material containing tantalum being in contact with said silicon layer; and a second metal layer made of a material containing platinum formed on said first metal layer.
Claim 28
Dependent Claim
50 words
A scanning probe microscope according to claim 1, wherein said plate comprises a fourth electrode formed on said first layer so that said first layer is disposed between said first electrode and said fourth electrode and that said second electrode is disposed between said third electrode and said fourth electrode.
Claim 29
Dependent Claim
43 words
A scanning probe microscope according to claim 27, wherein said second electrode, said third electrode, and said fourth electrode are formed on a same plane but said second electrode, said first electrode, and said third electrode are not formed on a same plane.
Claim 30
Dependent Claim
54 words
A scanning probe microscope according to claim 23, wherein said first layer is made of a material containing either one of lead titanate zirconate-lanthanum oxide, lead magnesium niobate-lead titanate, and barium titanate; said insulator layer is silicon nitride; and said insulator is fixed to a pointed portion made of a material containing silicon dioxide.
Claim 31
Dependent Claim
36 words
A scanning probe microscope according to claim 23, said first layer is made of a material containing lead and said cantilever further comprises a first buffer layer disposed between said insulator layer and said first layer.
Claim 32
Dependent Claim
45 words
A scanning probe microscope according to claim 1, said scanning probe microscope further comprising impedance measuring means for measuring an impedance of said first layer, wherein said self vibrator shares said first layer, said first electrode, and said second electrode with said self strain detector.
Claim 33
Dependent Claim
106 words
A scanning probe microscope according to claim 31, said scanning probe microscope further comprising a power supply for applying an ac voltage between said first electrode and said second electrode, wherein a frequency of said ac voltage is close to a resonance frequency of said cantilever to such an extent that the impedance of said first layer changes when said cantilever receives a force, wherein said impedance measuring means comprises a signal processing unit connected to said first electrode and second electrode for processing a signal extracted from said first electrode and said second electrode, said signal concerning an amount of the strain of said cantilever.
Claim 34
Dependent Claim
68 words
A scanning probe microscope according to claim 32, further comprising: an actuator electrically connected to said impedance measuring means, for moving said measured sample in a direction in which said cantilever is displaced with application of said ac voltage; and an actuator controlling means for controlling said actuator so that an impedance measured by said impedance measuring means is kept constant, so as to move said measured sample.
Claim 35
Dependent Claim
19 words
A scanning probe microscope according to claim 33, wherein said first layer constitutes a part of a feedback circuit.
Claim 36
Dependent Claim
106 words
A cantilever having a first end portion having a pointed portion and second end portion, said cantilever comprising a plate which can be deflected in a direction of the thickness thereof and which is located between said first end portion and said second end portion, said plate comprising, for vibrating said plate by itself in the direction of the thickness: first layer made of a piezoelectric crystal; first electrode formed on said first layer wherein said first electrode comprises two separate material layers; and second electrode formed on said first layer so that said first layer is disposed between said first electrode and said second electrode.
Claim 37
Dependent Claim
106 words
A cantilever having a first end portion having a pointed portion and second end portion, said cantilever comprising a plate which can be deflected in a direction of the thickness thereof and which is located between said first end portion and said second end portion, said plate comprising, for vibrating said plate by itself in the direction of the thickness: first layer made of a piezoelectric crystal; first electrode formed on said first layer wherein said first electrode comprises two separate material layers; and second electrode formed on said first layer so that said first layer is disposed between said first electrode and said second electrode.
Claim 38
Dependent Claim
65 words
A cantilever according to claim 35, wherein said plate comprises: a third electrode formed above said second electrode; a second layer located on said third electrode so that said third electrode is disposed between said second layer and said second electrode; and a fourth electrode formed on said second layer so that said second layer is disposed between said third electrode and said fourth electrode.
Claim 39
Dependent Claim
61 words
A cantilever according to claim 36, said cantilever further comprising: a first insulator layer formed on said first electrode so that said first electrode is disposed between said first layer and said first insulator layer; and a first buffer layer disposed between said first insulator layer and said first layer, wherein said first layer is made of a material containing lead.
Claim 40
Dependent Claim
14 words
A cantilever according to claim 37, wherein said first insulator layer is silicon nitride.
Claim 41
Dependent Claim
27 words
A cantilever according to claim 37, wherein said first buffer layer is made of a material containing either one of aluminum oxide, magnesium oxide, and chromium oxide.
Claim 42
Dependent Claim
21 words
A cantilever according to claim 41, wherein one material layer of said first electrode is made of a material containing platinum.
Claim 43
Dependent Claim
68 words
A cantilever according to claim 35, further comprising a silicon layer located on said first electrode so that said first electrode is disposed between said first layer and said silicon layer; wherein said first electrode comprises: a platinum layer formed on said first layer; and a titanium layer located on said platinum layer so that said platinum layer is disposed between said first layer and said titanium layer.
Claim 44
Dependent Claim
68 words
A cantilever according to claim 35, further comprising a silicon layer located on said first electrode so that said first electrode is disposed between said first layer and said silicon layer; wherein said first electrode comprises: a platinum layer formed on said first layer; and a tantalum layer located on said platinum layer so that said platinum layer is disposed between said first layer and said tantalum layer.
Claim 45
Dependent Claim
13 words
A cantilever according to claim 35, wherein said first layer is crystallographically oriented.
Claim 46
Dependent Claim
84 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between said first end portion and said second end portion, wherein said plate comprises: a first layer made of piezoelectric crystal; a first electrode for vibrating said plate, being attached to said first layer; and a second electrode for detecting a strain of said plate, being attached to said first layer.
Claim 47
Dependent Claim
84 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between said first end portion and said second end portion, wherein said plate comprises: a first layer made of piezoelectric crystal; a first electrode for vibrating said plate, being attached to said first layer; and a second electrode for detecting a strain of said plate, being attached to said first layer.
Claim 48
Dependent Claim
54 words
A cantilever according to claim 44, wherein an ac voltage is applied to said first electrode for vibrating the cantilever, and wherein an induced voltage due to an piezoelectric effect of said first layer is produced by the deflection of said plate, whereby said strain of said plate is detected by said second electrode.
Claim 49
Dependent Claim
95 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between the said first end portion and said second end portion, wherein said plate comprises: a first layer made of piezoelectric crystal, said first layer being comprised of material containing lead; a first insulator layer; a first electrode disposed between said first layer and said first insulator layer; and a buffer layer disposed between said first insulator layer and said first layer.
Claim 50
Dependent Claim
95 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between the said first end portion and said second end portion, wherein said plate comprises: a first layer made of piezoelectric crystal, said first layer being comprised of material containing lead; a first insulator layer; a first electrode disposed between said first layer and said first insulator layer; and a buffer layer disposed between said first insulator layer and said first layer.
Claim 51
Dependent Claim
14 words
A cantilever according to claim 46, wherein said first insulator layer is silicon nitride.
Claim 52
Dependent Claim
29 words
A cantilever according to claim 46, wherein said first buffer layer is comprised of a material selected from the group consisting of aluminum oxide, magnesium oxide, and chromium oxide.
Claim 53
Dependent Claim
17 words
A cantilever according to claim 46, wherein said first electrode is comprised of a material containing platinum.
Claim 54
Dependent Claim
80 words
A cantilever having a probe which is brought closer to a measured sample, said cantilever comprising: a first layer made of piezoelectric crystal containing lead, wherein said first layer can be deflected in a direction of the thickness thereof, and wherein said first layer is attached to said probe; a first insulator layer; a first electrode disposed between said first layer and said first insulator layer; and a buffer layer disposed between said first insulator layer and said first layer.
Claim 55
Dependent Claim
80 words
A cantilever having a probe which is brought closer to a measured sample, said cantilever comprising: a first layer made of piezoelectric crystal containing lead, wherein said first layer can be deflected in a direction of the thickness thereof, and wherein said first layer is attached to said probe; a first insulator layer; a first electrode disposed between said first layer and said first insulator layer; and a buffer layer disposed between said first insulator layer and said first layer.
Claim 56
Dependent Claim
48 words
A cantilever according to claim 50, wherein said first insulator layer is silicon nitride; said first buffer layer is comprised of a material selected from the group consisting of aluminum oxide, magnesium oxide, and chromium oxide; and wherein said first electrode is comprised of a material containing platinum.
Claim 57
Dependent Claim
93 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between the said first end portion and said second end portion, wherein said plate comprises: a silicon layer; a piezoelectric crystal layer; and a first electrode located between said piezoelectric crystal layer and said silicon layer, having a first layer comprised of titanium, and a second layer comprised of platinum, and a second electrode formed on said piezoelectric crystal layer.
Claim 58
Dependent Claim
93 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between the said first end portion and said second end portion, wherein said plate comprises: a silicon layer; a piezoelectric crystal layer; and a first electrode located between said piezoelectric crystal layer and said silicon layer, having a first layer comprised of titanium, and a second layer comprised of platinum, and a second electrode formed on said piezoelectric crystal layer.
Claim 59
Dependent Claim
33 words
A cantilever according to claim 52, wherein said first layer is in contact with said silicon layer; and wherein said second layer is disposed between said piezoelectric crystal layer and said first layer.
Claim 60
Dependent Claim
88 words
A cantilever having a probe which is brought closer to a measured sample, said cantilever comprising: a silicon layer; a piezoelectric crystal layer containing lead, wherein said piezoelectric crystal layer can be deflected in a direction of the thickness thereof, and wherein said piezoelectric crystal layer is attached to said probe; a first electrode located between said piezoelectric crystal layer and said silicon layer, having a first layer comprised of titanium, and a second layer comprised of platinum, and a second electrode formed on said piezoelectric crystal layer.
Claim 61
Dependent Claim
88 words
A cantilever having a probe which is brought closer to a measured sample, said cantilever comprising: a silicon layer; a piezoelectric crystal layer containing lead, wherein said piezoelectric crystal layer can be deflected in a direction of the thickness thereof, and wherein said piezoelectric crystal layer is attached to said probe; a first electrode located between said piezoelectric crystal layer and said silicon layer, having a first layer comprised of titanium, and a second layer comprised of platinum, and a second electrode formed on said piezoelectric crystal layer.
Claim 62
Dependent Claim
33 words
A cantilever according to claim 54, wherein said first layer is in contact with said silicon layer; and wherein said second layer is disposed between said piezoelectric crystal layer and said first layer.
Claim 63
Dependent Claim
93 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between the said first end portion and said second end portion, wherein said plate comprises: a silicon layer; a piezoelectric crystal layer; and a first electrode located between said piezoelectric crystal layer and said silicon layer, having a first layer comprised of tantalum, and a second layer comprised of platinum, and a second electrode formed on said piezoelectric crystal layer.
Claim 64
Dependent Claim
93 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between the said first end portion and said second end portion, wherein said plate comprises: a silicon layer; a piezoelectric crystal layer; and a first electrode located between said piezoelectric crystal layer and said silicon layer, having a first layer comprised of tantalum, and a second layer comprised of platinum, and a second electrode formed on said piezoelectric crystal layer.
Claim 65
Dependent Claim
33 words
A cantilever according to claim 56, wherein said first layer is in contact with said silicon layer; and wherein said second layer is disposed between said piezoelectric crystal layer and said first layer.
Claim 66
Dependent Claim
78 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between said first end portion and said second end portion, where said plate comprises: a first layer made of piezoelectric crystal, wherein said first layer is crystallographically oriented; a first electrode attached to said first layer; and a second electrode attached to said first layer.
Claim 67
Dependent Claim
78 words
A cantilever having a first end portion having a pointed portion, a second end portion, and a plate which can be deflected in a direction of the thickness thereof and which is located between said first end portion and said second end portion, where said plate comprises: a first layer made of piezoelectric crystal, wherein said first layer is crystallographically oriented; a first electrode attached to said first layer; and a second electrode attached to said first layer.
Claim 68
Dependent Claim
71 words
A cantilever having a probe which is brought closer to a measured sample, said cantilever comprising: a first layer made of piezoelectric crystal, wherein said first layer can be deflected in a direction of the thickness thereof, wherein said first layer is attached to said probe, and wherein said first layer is crystallographically oriented; a first electrode attached to said first layer; and a second electrode attached to said first layer.
Claim 69
Dependent Claim
71 words
A cantilever having a probe which is brought closer to a measured sample, said cantilever comprising: a first layer made of piezoelectric crystal, wherein said first layer can be deflected in a direction of the thickness thereof, wherein said first layer is attached to said probe, and wherein said first layer is crystallographically oriented; a first electrode attached to said first layer; and a second electrode attached to said first layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-23 | 2000-01-22 | 2000-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-23 | 2004-01-22 | 2004-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-23 | 2008-01-22 | 2008-07-23 | $7700.00 | Window Closed / Lapsed |