US5536683A
Expired / Lapsed
US
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Method for interconnecting semiconductor devices
Assignee: United Microelectronics Corp
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Filing: 1995-06-15
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Granted: 1996-07-16
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Expires: 2015-06-15
Abstract
Abstract A method for forming an interconnect structure within a semiconductor device. An isolation region which defines an active region is formed upon a semiconductor substrate. A gate electrode is formed upon the active region and an interconnect is formed partially upon the active region and partially upon the isolation region. A low dose ion implant is then provided into the active region not covered by the gate or the interconnect. A pair of insulator spacers are then formed at opposite edges of the gate. A source/drain electrode is then formed within the active region between the gate electrode and the interconnect, and a second source/drain electrode is formed within the active region between the isolation region and the gate. Finally, a metal silicide layer is formed bridging adjoining surfaces of the interconnect and the first source/drain electrode. In a second embodiment, the source/drain electrodes are formed after the metal silicide layer.
Inventors
- 👤 Jeng Ping Lin
- 👤 Sun-Chieh Chien
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 05:07
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/066; H10W20/0698
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
149 words
A method for forming an interconnect structure within an integrated circuit device comprising: forming an isolation region upon a semiconductor substrate which defines an active region within the semiconductor substrate; forming a gate oxide upon the active region; forming a gale electrode upon the gate oxide, and an interconnect partially upon the gate oxide and partially upon the isolation region; providing an ion implant into the active region at areas not covered by the gate electrode and the interconnect; forming a pair ok insulator spacers upon the active region at a pair of opposite edges of the gate electrode; forming a first source/drain electrode within the active region between the interconnect and the gate electrode, and a second source/drain electrode within the active region between the isolation region and the gate electrode; forming a metal silicide layer bridging the adjoining surfaces of the interconnect and the first source/drain electrode.
Claim 2
Independent Claim
149 words
A method for forming an interconnect structure within an integrated circuit device comprising: forming an isolation region upon a semiconductor substrate which defines an active region within the semiconductor substrate; forming a gate oxide upon the active region; forming a gale electrode upon the gate oxide, and an interconnect partially upon the gate oxide and partially upon the isolation region; providing an ion implant into the active region at areas not covered by the gate electrode and the interconnect; forming a pair ok insulator spacers upon the active region at a pair of opposite edges of the gate electrode; forming a first source/drain electrode within the active region between the interconnect and the gate electrode, and a second source/drain electrode within the active region between the isolation region and the gate electrode; forming a metal silicide layer bridging the adjoining surfaces of the interconnect and the first source/drain electrode.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein the gate electrode and the interconnect are formed simultaneously from patterning of a polysilicon layer.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein the gate electrode and the interconnect are formed simultaneously from patterning of a polycide layer.
Claim 5
Dependent Claim
13 words
The method of claim 1 wherein the implant is a phosphorus ion implant.
Claim 6
Dependent Claim
34 words
The method of claim 4 wherein the phosphorus ion implant is undertaken at about 1E13 to about 5E13 ions per square centimeter implantation dose and about 30 to about 60 keV ion implantation energy.
Claim 7
Dependent Claim
23 words
The method of claim 1 wherein the first source/drain electrode and the second source/drain electrode are formed simultaneously through an arsenic ion implant.
Claim 8
Dependent Claim
33 words
The method of claim 6 wherein the arsenic ion implant is undertaken at about 1E15 to about 5E15 ions per square centimeter dose and about 40 to about 80 keV ion implantation energy.
Claim 9
Dependent Claim
26 words
The method of claim 1 wherein the metal silicide layer is formed from heat treatment of a refractory metal layer formed non-selectively over the semiconductor substrate.
Claim 10
Dependent Claim
28 words
The method of claim 8 wherein the refractory metal layer is formed from a metal chosen from the group or metals consisting of titanium, cobalt, tungsten and tantalum.
Claim 11
Dependent Claim
14 words
The method of claim 9 wherein the refractory metal layer is formed from titanium.
Claim 12
Dependent Claim
33 words
The method of claim 1 further comprising forming a metal silicide layer on the surface of the gate electrode and forming a metal silicide layer on the surface of the second source/drain electrode.
Claim 13
Dependent Claim
16 words
The method of claim 1 wherein the pair of insulator spacers is formed from silicon oxide.
Claim 14
Dependent Claim
16 words
The method or claim 1 wherein the pair of insulator spacers is formed from silicon nitride.
Claim 15
Dependent Claim
18 words
The method of claim 1 wherein the source/drain electrodes are formed after the metal silicide layer is formed.
Claim 16
Independent Claim
185 words
A method for forming an interconnect structure within an integrated circuit device comprising: forming an Isolation region upon a semiconductor substrate which defines an active region within the semiconductor substrate; forming a gate oxide over the active region; forming a gate electrode upon the gate oxide, and an interconnect partially upon the gate oxide and partially upon the isolation region; providing an ion implant into the active region at areas not covered by the gate electrode and the interconnect; forming an insulating layer over the semiconductor substrate, the insulating layer having an opening formed therethrough exposing a portion of the interconnect and an adjoining portion of the active region; forming a metal silicide layer bridging the adjoining surfaces of the interconnect and the active region exposed through the opening in the insulating layer; etching the insulating layer to leave remaining a pair of insulator spacers at opposite edges of the gate; and forming a first source/drain electrode within the active region between the interconnect and the gale electrode, and a second source/drain electrode within the active region between the isolation region and the gate electrode.
Claim 17
Independent Claim
185 words
A method for forming an interconnect structure within an integrated circuit device comprising: forming an Isolation region upon a semiconductor substrate which defines an active region within the semiconductor substrate; forming a gate oxide over the active region; forming a gate electrode upon the gate oxide, and an interconnect partially upon the gate oxide and partially upon the isolation region; providing an ion implant into the active region at areas not covered by the gate electrode and the interconnect; forming an insulating layer over the semiconductor substrate, the insulating layer having an opening formed therethrough exposing a portion of the interconnect and an adjoining portion of the active region; forming a metal silicide layer bridging the adjoining surfaces of the interconnect and the active region exposed through the opening in the insulating layer; etching the insulating layer to leave remaining a pair of insulator spacers at opposite edges of the gate; and forming a first source/drain electrode within the active region between the interconnect and the gale electrode, and a second source/drain electrode within the active region between the isolation region and the gate electrode.
Claim 18
Dependent Claim
36 words
The method of claim 15 wherein the ion implant is a phosphorus ion implant provided at about 1E13 to about 5E13 ions per square centimeter dose and about 30 to about 60 KeV ion implantation energy.
Claim 19
Dependent Claim
26 words
The method of claim 15 wherein the metal silicide layer is formed from heat treatment of a refractory metal layer formed non-selectively over the semiconductor substrate.
Claim 20
Dependent Claim
27 words
The method of claim 17 wherein the refractory metal layer formed from a metal chosen from the group of metals consisting of titanium, cobalt, tungsten and tantalum.
Claim 21
Dependent Claim
14 words
The method of claim 18 wherein the refractory metal layer is formed from titanium.
Claim 22
Dependent Claim
44 words
The method of claim 15 wherein the first source/drain electrode and the second source/drain electrode are formed simultaneously through an arsenic ion implant at about 1E15 to about 5E15 ions per square centimeter dose and about 40 to about 80 keV ion implantation energy.
Claim 23
Dependent Claim
14 words
The method of claim 15 wherein the insulating layer is formed from silicon oxide.
Claim 24
Dependent Claim
14 words
The method of claim 15 wherein the insulating layer is formed from silicon nitride.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-16 | 2000-01-15 | 2000-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-16 | 2004-01-15 | 2004-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-16 | 2008-01-15 | 2008-07-16 | $7700.00 | Window Closed / Lapsed |