US5536362A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wire interconnect structures for connecting an integrated circuit to a substrate
Assignee: Fujitsu Ltd
•
Filing: 1994-02-16
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Granted: 1996-07-16
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Expires: 2014-02-16
Abstract
Abstract Methods of constructing a wire interconnect structure on a substrate are described. The methods broadly comprise the steps of depositing a spacer layer on a surface of the substrate, depositing a mask layer on the spacer layer, and removing a first portion of the mask layer overlying a desired area on the substrate surface to expose the spacer layer underlying the first portion of the mask layer. The methods further comprise the step of etching the structure such that a first portion of the spacer layer overlaying the desired area is removed and such that a portion of the desired area is exposed, and the step of depositing a first conductive material on the exposed portion of the desired area such that a conductive post is formed on the substrate surface and mounted to the desired area. Some of the disclosed methods comprise additional steps for forming an interconnect structure on the opposite surface of the substrate and providing an electrical interconnect means between the two interconnect structures. Additionally, some of the disclosed methods comprise steps for forming fillets around the conductive post at the substrate surface.
Inventors
- 👤 David G. Love
- 👤 Larry L. Moresco
- 👤 William Tai-Hua Chou
- 👤 David A. Horine
- 👤 Connie M. Wong
- 👤 Solomon I. Beilin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 14:58
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/4007; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H10W72/00; H10W72/01; H10W72/019; H10W72/20; H10W90/00; H10W90/701; H05K1/00; H05K1/02; H05K1/11; H05K1/111; H05K1/112; H05K1/113; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2201/0364; H05K2201/0367; H05K2201/10; H05K2201/10227; H05K2201/10378; H05K2201/10613; H05K2201/10621; H05K2201/10674; H05K2201/20; H05K2201/2081; H05K2203/00; H05K2203/03; H05K2203/0315; H05K2203/07; H05K2203/0703; H05K2203/072; H05K3/22; H05K3/24; H05K3/243; H05K3/30; H05K3/32; H05K3/34; H05K3/341; H05K3/3431; H05K3/3436; H05K3/3465; H05K3/3473; H10W72/012; H10W72/01251; H10W72/01255; H10W72/071; H10W72/072; H10W72/07231; H10W72/07236; H10W72/07251; H10W72/221; H10W72/231; H10W72/234; H10W72/251; H10W72/252; H10W72/281; H10W72/283; H10W72/29; H10W72/90; H10W72/951; H10W95/00
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
122 words
A method of constructing a wire interconnect structure on a substrate, comprising the steps of: depositing a spacer layer on a surface of the substrate; depositing a mask layer on the spacer layer; removing a first portion of said mask layer overlying a desired area on the substrate surface to expose the spacer layer underlying said first portion of said mask layer; etching said structure such that a first portion of said spacer layer overlaying the desired area is removed and such that a portion of the desired area is exposed; and depositing a first conductive material on the exposed portion of the desired area such that a conductive post is formed on the substrate surface and mounted to the desired area.
Claim 2
Independent Claim
122 words
A method of constructing a wire interconnect structure on a substrate, comprising the steps of: depositing a spacer layer on a surface of the substrate; depositing a mask layer on the spacer layer; removing a first portion of said mask layer overlying a desired area on the substrate surface to expose the spacer layer underlying said first portion of said mask layer; etching said structure such that a first portion of said spacer layer overlaying the desired area is removed and such that a portion of the desired area is exposed; and depositing a first conductive material on the exposed portion of the desired area such that a conductive post is formed on the substrate surface and mounted to the desired area.
Claim 3
Dependent Claim
32 words
The method of claim 1 wherein the step of depositing the spacer layer comprises the steps of coating the substrate surface with a polyimide material and of curing the coated polyimide material.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein the step of depositing the mask layer comprises the step of sputtering an aluminum layer.
Claim 5
Dependent Claim
29 words
The method of claim 3 further comprising the step of removing said aluminum layer before the step of depositing the first conductive material to form the wire interconnect structure.
Claim 6
Dependent Claim
23 words
The method of claim 4 further comprising the step of removing said spacer layer after the step of depositing said first conductive material.
Claim 7
Dependent Claim
24 words
The method of claim 5 wherein the step of depositing the first conductive material to form said post comprises the step of depositing copper.
Claim 8
Dependent Claim
13 words
The method of claim 6 wherein the copper is deposited by electroless electroplating.
Claim 9
Dependent Claim
38 words
The method of claim 1 further comprising the steps of removing said mask layer and said spacer layer to expose said post, and depositing a layer of nickel on the exposed portions of said post by electroless deposition.
Claim 10
Dependent Claim
54 words
The method of claim 8 further comprising the step of forming an oxide layer over said nickel layer of said post, said oxide layer extending in the direction of elongation of said post from the bottom end of said post up to a point intermediate between the bottom and top ends of said post.
Claim 11
Dependent Claim
52 words
The method of claim 9 wherein the step of forming said oxide layer comprises the steps of oxidizing the nickel layer on said post, and of etching a portion of said oxide layer extending from the top end surface of said post to said intermediate point with a high-viscosity, low-pH solder flux.
Claim 12
Dependent Claim
108 words
The method of claim 1 further comprising the step of forming a solder fillet around the periphery of said bottom surface of said post next to said substrate surface, said step including the steps of: depositing, before the step of depositing said spacer layer, a body of solder on said desired area and in close proximity to where said post is to be formed; removing said spacer and mask layers after the step of depositing said first conductive material to form said post; and heating said body of solder causing it to flow around the periphery of said bottom surface of said post next to said substrate surface.
Claim 13
Dependent Claim
46 words
The method of claim 1 wherein the step of etching said structure to remove said first portion of said spacer layer comprises the step of reactive ion etching said structure, and wherein said mask layer is more resistant to reactive ion etching than said spacer layer.
Claim 14
Independent Claim
229 words
A method of constructing a wire interconnect structure on a substrate having a first surface and a second surface, comprising the steps of: forming an electrically conductive path from a first area on the first surface of the substrate to a second area on the second surface of the substrate; depositing a spacer layer on each of the first and second surfaces of the substrate; depositing a mask layer on each of said spacer layers; removing a first portion of said mask layer overlying said first area on the first surface to expose the spacer layer underlying said first portion, and removing a second portion of said mask layer overlaying said second area on the second surface to expose the spacer layer underlying said second portion; etching said structure such that a first portion of said spacer layer overlaying said first area is removed, such that a second portion of said spacer layer overlaying said second area is removed, and such that portions of said first and second areas are exposed; and depositing a conductive material on said exposed portions of said first and second areas such that a first conductive post is formed on the first surface of the substrate and mounted to said first area, and such that a second conductive post is formed on the second surface of the substrate and mounted to said second area.
Claim 15
Independent Claim
229 words
A method of constructing a wire interconnect structure on a substrate having a first surface and a second surface, comprising the steps of: forming an electrically conductive path from a first area on the first surface of the substrate to a second area on the second surface of the substrate; depositing a spacer layer on each of the first and second surfaces of the substrate; depositing a mask layer on each of said spacer layers; removing a first portion of said mask layer overlying said first area on the first surface to expose the spacer layer underlying said first portion, and removing a second portion of said mask layer overlaying said second area on the second surface to expose the spacer layer underlying said second portion; etching said structure such that a first portion of said spacer layer overlaying said first area is removed, such that a second portion of said spacer layer overlaying said second area is removed, and such that portions of said first and second areas are exposed; and depositing a conductive material on said exposed portions of said first and second areas such that a first conductive post is formed on the first surface of the substrate and mounted to said first area, and such that a second conductive post is formed on the second surface of the substrate and mounted to said second area.
Claim 16
Dependent Claim
75 words
The method of claim 13 wherein the step of forming an electrically conductive path from said first and second areas comprises the steps of forming a hole from said first area to said second area through the substrate such that the hole has an end at each of said first and second areas, and depositing a conductive material within said through hole such that a conductive path is formed between the ends of said hole.
Claim 17
Dependent Claim
36 words
The method of claim 13 wherein the step of depositing the spacer layer comprises the steps of coating each of the first and second surfaces with a polyimide material and of curing the coated polyimide material.
Claim 18
Dependent Claim
21 words
The method of claim 13 wherein the step of depositing the mask layer comprises the step of sputtering an aluminum layer.
Claim 19
Dependent Claim
28 words
The method of claim 16 further comprising the step of removing said aluminum layer before the step of depositing the conductive material to form the wire interconnect structure.
Claim 20
Dependent Claim
22 words
The method of claim 13 further comprising the step of removing said spacer layer after the step of depositing said conductive material.
Claim 21
Dependent Claim
26 words
The method of claim 13 wherein the step of depositing the conductive material to form said first and second posts comprises the step of depositing copper.
Claim 22
Dependent Claim
13 words
The method of claim 19 wherein the copper is deposited by electroless electroplating.
Claim 23
Dependent Claim
44 words
The method of claim 13 further comprising the steps of removing said mask layer and said spacer layer to expose said first and second posts, and depositing a layer of nickel on the exposed portions of said first and second posts by electroless deposition.
Claim 24
Dependent Claim
56 words
The method of claim 21 further comprising the step of forming an oxide layer over said nickel layer of one of said posts, said oxide layer extending in the direction of elongation of said post from the bottom end of said post up to a point intermediate between the bottom and top ends of said post.
Claim 25
Dependent Claim
52 words
The method of claim 22 wherein the step of forming said oxide layer comprises the steps of oxidizing the nickel layer on said post, and of etching a portion of said oxide layer extending from the top end surface of said post to said intermediate point with a high-viscosity, low-pH solder flux.
Claim 26
Dependent Claim
110 words
The method of claim 19 further comprising the step of forming a solder fillet around the periphery of said bottom surface of said first post next to said first surface, said step including the steps of: depositing, before the step of depositing said spacer layer, a body of solder on said first area and in close proximity to where said first post is to be formed; removing said spacer and mask layers after the step of depositing said conductive material to form said posts; and heating said body of solder causing it to flow around the periphery of said bottom surface of said first post next to said first surface.
Claim 27
Dependent Claim
44 words
The method of claim 13 wherein said mask layer is more resistant to reactive ion etching than said spacer layer, and wherein the step of etching said structure to remove portions of said spacer layer comprises the step of reactive ion etching said structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-16 | 2000-01-15 | 2000-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-16 | 2004-01-15 | 2004-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-16 | 2008-01-15 | 2008-07-16 | $7700.00 | Window Closed / Lapsed |