US5534371A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Repaired apertured laser metal mask
Assignee: International Business Machines Corp
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Filing: 1995-05-22
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Granted: 1996-07-09
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Expires: 2015-05-22
Abstract
Abstract A repaired laser ablation mask is disclosed capable of withstanding laser fluences in the range from about 200 mJ/cm 2 to at least 500 mJ/cm 2 . The repaired mask comprises a single or multiple layers of apertured metal, such as, aluminum, on a quartz substrate. The laser mask repair technique and structure are also disclosed. The thickness of the metal layer, such as, aluminum layer, is in the range from about 2 microns to about 6 microns. A laser projection etching technique is also disclosed for using the repaired ablation mask.
Inventors
- 👤 Rajesh S. Patel
- 👤 Laertis Economikos
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 17:30
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/72; G03F1/54; G03F1/20; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
113 words
A repaired laser metal mask for use intermediate a U.V. light source, said mask comprising: a substrate of quartz, and at least one layer of apertured metal having a lower surface and an upper surface, wherein said lower surface is in direct contact with said substrate, said layer of apertured metal having at least one defect, wherein at least one layer of metal strip is secured over said at least one defect to at least a portion of said upper surface, such that said at least one layer of metal strip completely covers said at least one defect and prevents the penetration of said U.V. light source through said at least one defect.
Claim 2
Dependent Claim
113 words
A repaired laser metal mask for use intermediate a U.V. light source, said mask comprising: a substrate of quartz, and at least one layer of apertured metal having a lower surface and an upper surface, wherein said lower surface is in direct contact with said substrate, said layer of apertured metal having at least one defect, wherein at least one layer of metal strip is secured over said at least one defect to at least a portion of said upper surface, such that said at least one layer of metal strip completely covers said at least one defect and prevents the penetration of said U.V. light source through said at least one defect.
Claim 3
Dependent Claim
24 words
The repaired mask of claim 1, wherein said U.V. light source is selected from a group consisting of excimer laser or mercury arc lamp.
Claim 4
Dependent Claim
15 words
The repaired mask of claim 1, wherein the area around said defect is site dressed.
Claim 5
Dependent Claim
47 words
The repaired mask of claim 1, wherein at least one material for said at least one layer of apertured metal is selected from a group consisting of aluminum, antimony, bismuth, chromium, cobalt, copper, gold, indium, lead, molybdenum, nickel, palladium, platinum, silver, tin, titanium, tungsten and alloys thereof.
Claim 6
Dependent Claim
47 words
The repaired mask of claim 1, wherein at least one material for said at least one layer of metal strip is selected from a group consisting of aluminum, antimony, bismuth, chromium, cobalt, copper, gold, indium, lead, molybdenum, nickel, palladium, platinum, silver, tin, titanium, tungsten and alloys thereof.
Claim 7
Dependent Claim
30 words
The repaired mask of claim 1, wherein the thickness of said at least one layer of apertured metal is in the range from about 2 microns to about 6 microns.
Claim 8
Dependent Claim
23 words
The repaired mask of claim 1, wherein the average thickness of said at least one layer of apertured metal is about 3 microns.
Claim 9
Dependent Claim
18 words
The repaired mask of claim 1, wherein said substrate of quartz is a U.V. grade synthetic fused silica.
Claim 10
Dependent Claim
29 words
The repaired mask of claim 1, wherein said repaired mask withstands a fluence in the range from about 200 mJ/cm 2 to about at least 500 mJ/cm 2 .
Claim 11
Dependent Claim
36 words
The repaired mask of claim 1, wherein the shape of said metallic portion is selected from a group consisting of a rectangular shape, a circular shape, a polygonal shape, a triangular shape, or any irregular shape.
Claim 12
Dependent Claim
18 words
The repaired mask of claim 1, wherein said metal strip is held in place with a support portion.
Claim 13
Dependent Claim
33 words
The repaired mask of claim 1, wherein said metal strip is held in place with a support portion, and wherein said support portion is selected from a group consisting of polyimide and epoxy.
Claim 14
Dependent Claim
135 words
A repaired laser metal mask for use intermediate an excimer laser providing a fluence in the range from about 200 mJ/cm 2 to at least 500 mJ/cm 2 and a target structure having features to be ablated, said repaired mask comprising: a substrate of quartz, and a single layer of apertured metal having a lower surface and an upper surface, wherein said lower surface is in direct contact with said substrate, said layer of apertured metal having at least one defect, wherein at least one strip of metal is secured over said at least one defect to at least a portion of said upper surface, such that said at least one strip of metal completely covers said at least one defect and prevents the penetration of said excimer laser through said at least one defect.
Claim 15
Dependent Claim
135 words
A repaired laser metal mask for use intermediate an excimer laser providing a fluence in the range from about 200 mJ/cm 2 to at least 500 mJ/cm 2 and a target structure having features to be ablated, said repaired mask comprising: a substrate of quartz, and a single layer of apertured metal having a lower surface and an upper surface, wherein said lower surface is in direct contact with said substrate, said layer of apertured metal having at least one defect, wherein at least one strip of metal is secured over said at least one defect to at least a portion of said upper surface, such that said at least one strip of metal completely covers said at least one defect and prevents the penetration of said excimer laser through said at least one defect.
Claim 16
Dependent Claim
15 words
The repaired mask of claim 13, wherein the area around said defect is site dressed.
Claim 17
Dependent Claim
47 words
The repaired mask of claim 13, wherein at least one material for said at least one layer of apertured metal is selected from a group consisting of aluminum, antimony, bismuth, chromium, cobalt, copper, gold, indium, lead, molybdenum, nickel, palladium, platinum, silver, tin, titanium, tungsten and alloys thereof.
Claim 18
Dependent Claim
48 words
The repaired mask of claim 13, wherein at least one material for said at least one layer of strip of metal is selected from a group consisting of aluminum, antimony, bismuth, chromium, cobalt, copper, gold, indium, lead, molybdenum, nickel, palladium, platinum, silver, tin, titanium, tungsten and alloys thereof.
Claim 19
Dependent Claim
30 words
The repaired mask of claim 13, wherein the thickness of said at least one layer of apertured metal is in the range from about 2 microns to about 6 microns.
Claim 20
Dependent Claim
23 words
The repaired mask of claim 13, wherein the average thickness of said at least one layer of apertured metal is about 3 microns.
Claim 21
Dependent Claim
18 words
The repaired mask of claim 13, wherein said substrate of quartz is a U.V. grade synthetic fused silica.
Claim 22
Dependent Claim
36 words
The repaired mask of claim 13, wherein the shape of said metallic portion is selected from a group consisting of a rectangular shape, a circular shape, a polygonal shape, a triangular shape, or any irregular shape.
Claim 23
Dependent Claim
18 words
The repaired mask of claim 13, wherein said metal strip is held in place with a support portion.
Claim 24
Dependent Claim
33 words
The repaired mask of claim 13, wherein said metal strip is held in place with a support portion, and wherein said support portion is selected from a group consisting of polyimide and epoxy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-09 | 2000-01-08 | 2000-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-09 | 2004-01-08 | 2004-07-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-09 | 2008-01-08 | 2008-07-09 | $7700.00 | Window Closed / Lapsed |