Patent US5522131A successfully refreshed from Google Patents.
US5522131A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrostatic chuck having a grooved surface
Assignee: Applied Materials Inc
•
Filing: 1995-02-21
•
Granted: 1996-06-04
•
Expires: 2015-02-21
Abstract
Abstract An electrostatic chuck (113) having grooves (130, 132, 134) to uniformly distribute a heat transfer medium, e.g., a gas, and a method of fabricating such an electrostatic chuck. Specifically, a grooved layer (112) is formed upon a surface (110) of a conventional chuck body (111). Typically, a conventional chuck body contains a substrate (100) having one or more electrodes (104, 106) deposited thereupon and a first layer (108), typically formed of an insulating material, disposed over the electrodes and a surface of the substrate which supports the electrodes. A second layer (112), typically formed of an insulating material, is formed by screen printing a paste of insulating material over a surface of the first layer. The paste is applied in a pattern which includes at least one gap. After curing the paste into a hard layer, the second layer contains the gap or gaps defined by the screen pattern. The combination of the surface of the first layer and the gaps in the second layer define a grooved surface pattern. The second layer supports a workpiece (122) during subsequent workpiece processing. A hole (216) through the substrate and the first layer provides a portal through which a gas can be pumped into the grooves. With this arrangement, the medium promotes substantially uniform heat exchange between the workpiece and the electrostatic chuck.
Inventors
- 👤 Robert J. Steger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 08:52
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; Y; Y10; Y10T; Y10T279/00; Y10T279/23; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
68 words
A method of fabricating an electrostatic chuck for retaining a workpiece, wherein said chuck contains a grooved surface, said method comprising the steps of: forming, upon a surface of a chuck body, a layer of an insulating material in a predetermined pattern having a lateral gap; hardening the layer to form an insulating layer having a groove defined by said gap and said surface of said chuck body.
Claim 2
Independent Claim
68 words
A method of fabricating an electrostatic chuck for retaining a workpiece, wherein said chuck contains a grooved surface, said method comprising the steps of: forming, upon a surface of a chuck body, a layer of an insulating material in a predetermined pattern having a lateral gap; hardening the layer to form an insulating layer having a groove defined by said gap and said surface of said chuck body.
Claim 3
Dependent Claim
46 words
The method of claim 1 wherein said forming step further comprises the steps of screen printing said layer to form a pattern of lateral gaps and curing said layer to form a pattern of grooves defined by said gaps and said surface of said chuck body.
Claim 4
Dependent Claim
32 words
The method of claim 2 further comprising the step of providing a passageway through said chuck body to said grooves such that a heat transfer medium can be pumped into said grooves.
Claim 5
Dependent Claim
49 words
The method of claim 3 wherein said chuck body comprises a substrate having a surface that supports an electrode and a dielectric layer disposed upon said electrode and said surface, said dielectric layer having a surface facing away from said electrode that is the surface of the chuck body.
Claim 6
Independent Claim
100 words
A method of fabricating an electrostatic chuck for retaining a workpiece, wherein said chuck has a grooved surface, said method comprising the steps of: depositing an electrode upon a surface of a substrate; forming a first layer of a first insulating material over said electrode and said substrate surface, wherein said first layer has a surface; and forming, upon said surface of said first layer, a second layer of a second insulating material in a predetermined pattern having a lateral gap in said second layer, thereby forming a groove defined by said gap and said surface of said first layer.
Claim 7
Independent Claim
100 words
A method of fabricating an electrostatic chuck for retaining a workpiece, wherein said chuck has a grooved surface, said method comprising the steps of: depositing an electrode upon a surface of a substrate; forming a first layer of a first insulating material over said electrode and said substrate surface, wherein said first layer has a surface; and forming, upon said surface of said first layer, a second layer of a second insulating material in a predetermined pattern having a lateral gap in said second layer, thereby forming a groove defined by said gap and said surface of said first layer.
Claim 8
Dependent Claim
39 words
The method of claim 5 further comprising the step of providing a passageway through said substrate and said first layer to said gap in said second layer such that a heat transfer medium can be pumped into said groove.
Claim 9
Dependent Claim
49 words
The method of claim 5 wherein said second layer forming step further comprises the steps of screen printing said second layer to form a pattern of gaps and curing said second layer to form a pattern of grooves defined by said gaps and said surface of said first layer.
Claim 10
Dependent Claim
16 words
The method of claim 5 wherein said first and second insulating materials are the same material.
Claim 11
Dependent Claim
15 words
The method of claim 5 wherein said first and second insulating materials are different materials.
Claim 12
Independent Claim
87 words
A method of fabricating an electrostatic chuck for retaining a workpiece, wherein said chuck contains a grooved surface, said method comprising the steps of: forming a first layer of first insulating material upon a surface of a chuck body; forming, upon a surface of said first layer, a second layer of second insulating material in a predetermined pattern having a lateral gap in said second layer; and said gap defines sides of a groove and said surface of said first layer defines a bottom of said groove.
Claim 13
Independent Claim
87 words
A method of fabricating an electrostatic chuck for retaining a workpiece, wherein said chuck contains a grooved surface, said method comprising the steps of: forming a first layer of first insulating material upon a surface of a chuck body; forming, upon a surface of said first layer, a second layer of second insulating material in a predetermined pattern having a lateral gap in said second layer; and said gap defines sides of a groove and said surface of said first layer defines a bottom of said groove.
Claim 14
Dependent Claim
27 words
The method of claim 10 wherein said step for forming said first layer further comprises the step of screen printing said first layer onto said chuck body.
Claim 15
Dependent Claim
27 words
The method of claim 10 wherein said step for forming said second layer further comprises the step of screen printing said second layer onto said first layer.
Claim 16
Dependent Claim
36 words
The method of claim 10 further comprising the step of providing a passageway through said chuck body and said first layer to said groove such that a heat transfer medium can be pumped into said groove.
Claim 17
Dependent Claim
16 words
The method of claim 10 wherein said first and second insulating materials are the same material.
Claim 18
Dependent Claim
15 words
The method of claim 10 wherein said first and second insulating materials are different materials.
Claim 19
Dependent Claim
31 words
The method of claim 10 wherein said chuck body comprises a substrate having a surface that supports an electrode, said surface and said electrode form the surface of the chuck body.
Claim 20
Dependent Claim
74 words
An electrostatic chuck for retaining a workpiece comprising: a chuck body having a surface; a layer of an insulating material disposed over said surface of said chuck body; and said layer having a lateral gap in a surface of said layer such that said gap defines sides of a groove and said surface of said chuck body defines a bottom of said groove, said surface of said layer is adapted to support said workpiece.
Claim 21
Dependent Claim
74 words
An electrostatic chuck for retaining a workpiece comprising: a chuck body having a surface; a layer of an insulating material disposed over said surface of said chuck body; and said layer having a lateral gap in a surface of said layer such that said gap defines sides of a groove and said surface of said chuck body defines a bottom of said groove, said surface of said layer is adapted to support said workpiece.
Claim 22
Dependent Claim
29 words
The electrostatic chuck of claim 17 further comprising a passageway through said chuck body to said groove such that a heat transfer medium can be pumped into said groove.
Claim 23
Dependent Claim
29 words
The electrostatic chuck of claim 18 further comprising a passageway through said chuck body to said groove such that a heat transfer medium can be provided to said groove.
Claim 24
Dependent Claim
25 words
The electrostatic chuck of claim 19 wherein said layer defines a plurality of grooves arranged in a pattern to uniformly distribute said heat transfer medium.
Claim 25
Dependent Claim
99 words
An electrostatic chuck for retaining a workpiece comprising: a substrate; an electrode disposed upon a surface of said substrate; a first layer of a first insulating material disposed over said electrode and said surface of said substrate; a second layer of a second insulating material disposed over a surface of said first layer; and said second layer having a lateral gap in a surface of said second layer such that said gap defines sides of a groove and said surface of said first layer defines a bottom of said groove, said second layer is adapted to support said workpiece.
Claim 26
Dependent Claim
99 words
An electrostatic chuck for retaining a workpiece comprising: a substrate; an electrode disposed upon a surface of said substrate; a first layer of a first insulating material disposed over said electrode and said surface of said substrate; a second layer of a second insulating material disposed over a surface of said first layer; and said second layer having a lateral gap in a surface of said second layer such that said gap defines sides of a groove and said surface of said first layer defines a bottom of said groove, said second layer is adapted to support said workpiece.
Claim 27
Dependent Claim
17 words
The electrostatic chuck of claim 21 wherein said first and second insulating materials are the same material.
Claim 28
Dependent Claim
16 words
The electrostatic chuck of claim 21 wherein said first and second insulating materials are different materials.
Claim 29
Dependent Claim
32 words
The electrostatic chuck of claim 21 further comprising a passageway through said substrate and said first layer to said groove such that a heat transfer medium can be pumped into said groove.
Claim 30
Dependent Claim
32 words
The electrostatic chuck of claim 21 further comprising a passageway through said substrate and said first layer to said groove such that a heat transfer medium can be provided to said groove.
Claim 31
Dependent Claim
28 words
The electrostatic chuck of claim 25 wherein said first and second layers define a plurality of grooves arranged in a pattern to uniformly distribute said heat transfer medium.
References Cited (Backward Citations)
US4184188A
Cited
GB2050064A
Cited
US4384918A
Cited
US4603466A
Cited
JPS60261377A
Cited
JPS615684A
Cited
US4665468A
Cited
JPS62157752A
Cited
US4771730A
Cited
JPS63194345A
Cited
JPH01241839A
Cited
EP0397315A2
Cited
EP0452222A1
Cited
JPH04147642A
Cited
JPH05152425A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-04 | 1999-12-04 | 2000-06-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-04 | 2003-12-04 | 2004-06-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-04 | 2007-12-04 | 2008-06-04 | $7700.00 | Window Closed / Lapsed |