Patent DE752360C successfully refreshed from Google Patents.
Patent US5508627A successfully refreshed from Google Patents.
US5508627A
Expired / Lapsed
US
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Photon assisted sub-tunneling electrical probe, probe tip, and probing method
Assignee: Individual
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Filing: 1994-05-11
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Granted: 1996-04-16
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Expires: 2014-05-11
Abstract
Abstract An improved non-contact electrical measurement system, method, probe assembly, and probe tip. A probe tip having a photoemissive coating deposited thereon is provided and disposed substantially adjacent a measurement site of a test sample. The photoemissive coating of the probe tip is illuminated by a light source, and electrical measurements are made upon the probe tip to determine the electrical characteristics of the measurement site.
Inventors
- 👤 Joseph M. Patterson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:56
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01R31/311; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/07; G01R1/071; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
70 words
An electrical probe comprising: a probe tip; a photoemissive coating disposed upon said probe tip; a light source for generating photons of a selected wavelength and directing said photons toward said photoemissive coating disposed upon said probe tip; and an electrical sensor electrically coupled to said probe tip for measuring an electrical characteristic of said probe tip when said photons are directed by said light source to said photoemissive coating.
Claim 2
Dependent Claim
70 words
An electrical probe comprising: a probe tip; a photoemissive coating disposed upon said probe tip; a light source for generating photons of a selected wavelength and directing said photons toward said photoemissive coating disposed upon said probe tip; and an electrical sensor electrically coupled to said probe tip for measuring an electrical characteristic of said probe tip when said photons are directed by said light source to said photoemissive coating.
Claim 3
Dependent Claim
18 words
The electrical probe of claim 1 where in said electrical sensor comprises a current to voltage sense amplifier.
Claim 4
Dependent Claim
24 words
The electrical probe of claim 1 wherein said light source comprises a laser which directs a beam of coherent light onto said photoemissive coating.
Claim 5
Dependent Claim
19 words
The electrical probe of claim 3 wherein said coherent light has a frequency within a spectrum of visible light.
Claim 6
Dependent Claim
21 words
The electrical probe of claim 1 wherein said photoemissive coating comprises either Lanthanumhexaboride (LaB 6 ) or Ceriumhexaboride (CeB 6 ).
Claim 7
Dependent Claim
84 words
The electrical probe of claim 1 wherein: said probe tip comprises an optical fiber having a conical tip; said photoemissive coating is deposited upon a distal portion of said conical tip of said optical fiber; a conductive coating is deposited upon a lateral surface portion of said optical fiber, said conductive coating forming an electrical coupling between said photoemissive coating and said current to voltage sense amplifier; and said light source is capable of optically coupling to a proximal end of said optical fiber.
Claim 8
Dependent Claim
88 words
The electrical probe of claim 1 wherein: said probe tip comprises an optical fiber having a tapered distal tip leading to a planar distal surface; said photoemissive coating is deposited upon said planar distal surface of said optical fiber; a conductive coating is deposited upon a lateral surface portion of said optical fiber, said conductive coating forming an electrical coupling between said photoemissive coating and said current to voltage sense amplifier; and said light source is capable of optically coupling to a proximal end of said optical fiber.
Claim 9
Dependent Claim
65 words
A non-contact electrical probe comprising: a probe tip; a photoemissive coating disposed upon said probe tip; a light source for generating photons of a selected wavelength and directing said photons toward said photoemissive coating disposed upon said probe tip; and a voltage sensor coupled to said probe tip for sensing a voltage of said probe tip, when said photons are directed to said photoemissive coating.
Claim 10
Dependent Claim
65 words
A non-contact electrical probe comprising: a probe tip; a photoemissive coating disposed upon said probe tip; a light source for generating photons of a selected wavelength and directing said photons toward said photoemissive coating disposed upon said probe tip; and a voltage sensor coupled to said probe tip for sensing a voltage of said probe tip, when said photons are directed to said photoemissive coating.
Claim 11
Dependent Claim
42 words
The non-contact electrical probe of claim 8 further comprising a current sensor capable of coupling in circuit between said probe tip and a measurement site of a sample for sensing a flow of electrons between said probe tip and said measurement site.
Claim 12
Dependent Claim
25 words
The non-contact electrical probe of claim 8 wherein said light source comprises a laser which directs a beam of coherent light onto said photoemissive coating.
Claim 13
Dependent Claim
22 words
The non-contact electrical probe of claim 8 wherein said photoemissive coating comprises either Lanthanumhexaboride (LaB 6 ) or Ceriumhexaboride (CeB 6 ).
Claim 14
Dependent Claim
74 words
The non-contact electrical probe of claim 8 wherein: said probe tip comprises a sharpened optical fiber; said photoemissive coating is deposited upon a distal tip portion of said sharpened optical fiber; a conductive coating is deposited upon a lateral surface portion of said optical fiber, said conductive coating forming an electrical coupling between said photoemissive coating and said voltage sensor; and said light source is coupled to a proximal end of said optical fiber.
Claim 15
Dependent Claim
17 words
The electrical probe of claim 8 wherein said voltage sensor comprises a current to voltage sense amplifier.
Claim 16
Dependent Claim
121 words
A photon assisted sub-tunneling electrical probe comprising: a probe having a sharpened probe tip; a photoemissive coating deposited upon said sharpened tip of said probe; a source of light for generating photons of a selected wavelength within a visible spectrum and directing said photons toward said photoemissive coating disposed upon said sharpened tip of said probe, said source of light comprising a laser; and a current sensor capable of being connected in circuit between said probe tip and a measurement site for sensing a flow of electrons between said photoemissive coating and said measurement site when said photoemissive coating is illuminated by said laser; and a voltage sensor coupled to said probe tip for sensing a voltage of said probe tip.
Claim 17
Dependent Claim
121 words
A photon assisted sub-tunneling electrical probe comprising: a probe having a sharpened probe tip; a photoemissive coating deposited upon said sharpened tip of said probe; a source of light for generating photons of a selected wavelength within a visible spectrum and directing said photons toward said photoemissive coating disposed upon said sharpened tip of said probe, said source of light comprising a laser; and a current sensor capable of being connected in circuit between said probe tip and a measurement site for sensing a flow of electrons between said photoemissive coating and said measurement site when said photoemissive coating is illuminated by said laser; and a voltage sensor coupled to said probe tip for sensing a voltage of said probe tip.
Claim 18
Dependent Claim
24 words
The photon assisted sub-tunneling electrical probe of claim 14 wherein said photoemissive coating comprises either Lanthanumhexaboride (LaB 6 ) or Ceriumhexaboride (CeB 6 ).
Claim 19
Dependent Claim
87 words
A photon assisted sub-tunneling electrical probe comprising: an optical fiber having a sharpened distal tip; a photoemissive coating disposed upon said sharpened distal tip of said optical fiber; a source of visible light coupled to a proximal end of said optical fiber; a current sensor capable of being connected in circuit between said photoemissive coating and a measurement site for sensing a flow of electrons between said photoemissive coating and said measurement site when said photoemissive coating is illuminated by light generated by said visible light source.
Claim 20
Dependent Claim
87 words
A photon assisted sub-tunneling electrical probe comprising: an optical fiber having a sharpened distal tip; a photoemissive coating disposed upon said sharpened distal tip of said optical fiber; a source of visible light coupled to a proximal end of said optical fiber; a current sensor capable of being connected in circuit between said photoemissive coating and a measurement site for sensing a flow of electrons between said photoemissive coating and said measurement site when said photoemissive coating is illuminated by light generated by said visible light source.
Claim 21
Dependent Claim
27 words
The photon assisted sub-tunneling electrical probe of claim 16 further comprising a voltage sensor coupled to said photoemissive coating for sensing a voltage of said photoemissive coating.
Claim 22
Dependent Claim
24 words
The photon assisted sub-tunneling electrical probe of claim 16 wherein said photoemissive coating comprises either Lanthanumhexaboride (LaB 6 ) or Ceriumhexaboride (CeB 6 ).
Claim 23
Dependent Claim
36 words
The photon assisted sub-tunneling electrical probe of claim 17 wherein a conductive coating is deposited upon a lateral surface of said optical fiber and provides an electrical connection between said photoemissive coating and said voltage sensor.
Claim 24
Dependent Claim
18 words
The photon assisted sub-tunneling electrical probe of claim 19 wherein said conductive coating is comprised of gold (Au).
Claim 25
Independent Claim
105 words
A method for measuring a voltage at a selected location on a semiconductor device, said method comprising the steps of: providing an electrical probe comprising a probe tip; a photoemissive coating disposed upon said probe tip; a light source for generating photons of a selected wavelength and directing said photons toward said photoemissive coating disposed upon said probe tip; and an electrical sensor electrically coupled to said probe tip; positioning said electrical probe at a distance between 0.1 and 1.0 microns from said selected location; illuminating said photoemissive coating with said photons generated by said light source; and sensing a voltage of said probe tip.
Claim 26
Independent Claim
105 words
A method for measuring a voltage at a selected location on a semiconductor device, said method comprising the steps of: providing an electrical probe comprising a probe tip; a photoemissive coating disposed upon said probe tip; a light source for generating photons of a selected wavelength and directing said photons toward said photoemissive coating disposed upon said probe tip; and an electrical sensor electrically coupled to said probe tip; positioning said electrical probe at a distance between 0.1 and 1.0 microns from said selected location; illuminating said photoemissive coating with said photons generated by said light source; and sensing a voltage of said probe tip.
Claim 27
Dependent Claim
56 words
The method of claim 21 wherein said probe tip comprises a distal tip of an optical fiber; a conductive coating is deposited on a lateral surface of said optical fiber providing an electrical circuit between said photoemissive coating and electrical sensor; and said light source is optically coupled to a proximal end of said optical fiber.
Claim 28
Independent Claim
68 words
A method of electrical measurement comprising the steps of: positioning a photoemissive substance at a location sufficiently adjacent a measurement site to allow sub-tunneling of electrons between said photoemissive substance and said measurement site; illuminating said photoemissive substance with photons of light; and determining a voltage of said measurement site by measuring an electrical characteristic of said photoemissive substance when said photoemissive substance is illuminated by said photons.
Claim 29
Independent Claim
68 words
A method of electrical measurement comprising the steps of: positioning a photoemissive substance at a location sufficiently adjacent a measurement site to allow sub-tunneling of electrons between said photoemissive substance and said measurement site; illuminating said photoemissive substance with photons of light; and determining a voltage of said measurement site by measuring an electrical characteristic of said photoemissive substance when said photoemissive substance is illuminated by said photons.
Claim 30
Dependent Claim
56 words
The method of claim 23 wherein said determining step comprises the steps of: measuring a net flow of electrons between said photoemissive substance and said measurement site; and measuring a voltage of a conductor electrically coupled to said photoemissive coating when said net flow of electrons between said photoemissive substance and said measurement site is null.
Claim 31
Dependent Claim
20 words
The method of claim 23 wherein said photoemissive substance comprises either Lanthanumhexaboride (LaB 6 ) or Ceriumhexaboride (CeB 6 ).
Claim 32
Dependent Claim
17 words
The method of claim 23 wherein said light has a wavelength within a spectrum of visible light.
Claim 33
Independent Claim
57 words
A method for providing free electrons at a measurement site of a sample, said method comprising the steps of: positioning a photoemissive substance at a location sufficiently adjacent said measurement site to allow sub-tunneling of electrons between said photoemissive substance and said measurement site; and illuminating said photoemissive substance with photons of light having a preselected frequency.
Claim 34
Independent Claim
57 words
A method for providing free electrons at a measurement site of a sample, said method comprising the steps of: positioning a photoemissive substance at a location sufficiently adjacent said measurement site to allow sub-tunneling of electrons between said photoemissive substance and said measurement site; and illuminating said photoemissive substance with photons of light having a preselected frequency.
Claim 35
Dependent Claim
34 words
The method of claim 27 wherein said photoemissive substance is either Lanthanumhexaboride (LaB 6 ) or Ceriumhexaboride (CeB 6 ), and said photons of light have a frequency within a spectrum of visible light.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-16 | 1999-10-16 | 2000-04-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-16 | 2003-10-16 | 2004-04-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-16 | 2007-10-16 | 2008-04-16 | $7700.00 | Window Closed / Lapsed |