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US5505833A
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Method for depositing a layer on a substrate wafer with a sputtering process
Assignee: Qimonda AG
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Filing: 1994-07-11
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Granted: 1996-04-09
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Expires: 2014-07-11
Abstract
Abstract A method for depositing a layer on a substrate is disclosed wherein a collimator having cylindrical holes is employed to reduce the lateral component of a particle flux. The cylindrical holes are aligned to be perpendicular to a substrate wafer and have a variety of radii such that the hole radii are smaller in regions having a higher vertical component of particle flux than in regions which have a lower vertical component of the particle flux.
Inventors
- 👤 Christoph Werner
- 👤 Alfred Kersch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:39
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
122 words
A method for depositing a layer on a substrate wafer with a sputtering process, the substrate wafer having a surface and being located within a sputter reactor having a central axis, a target and a collimator, the collimator having a plurality of cylindrical holes each having a radius and an axis and said collimator being located between the substrate wafer and the target, said method comprising the steps of: disposing at least one occlusion web between a pair of adjacent cylindrical holes; aligning the axes of the cylindrical holes of the collimator substantially perpendicularly to the surface of the substrate wafer; and generating a particle flux having a vertical and a lateral component, and screening the lateral component by the cylindrical holes.
Claim 2
Independent Claim
122 words
A method for depositing a layer on a substrate wafer with a sputtering process, the substrate wafer having a surface and being located within a sputter reactor having a central axis, a target and a collimator, the collimator having a plurality of cylindrical holes each having a radius and an axis and said collimator being located between the substrate wafer and the target, said method comprising the steps of: disposing at least one occlusion web between a pair of adjacent cylindrical holes; aligning the axes of the cylindrical holes of the collimator substantially perpendicularly to the surface of the substrate wafer; and generating a particle flux having a vertical and a lateral component, and screening the lateral component by the cylindrical holes.
Claim 3
Dependent Claim
61 words
The method for depositing a layer on a substrate of claim 1, comprising the additional step of distributing the cylindrical holes in said collimator having respective radii of different sizes with cylindrical holes having smaller radii in areas of the sputter reactor where the vertical particle flux component is higher than in areas where the vertical particle flux component is lower.
Claim 4
Dependent Claim
32 words
The method for depositing a layer on a substrate of claim 1, comprising the additional step of positioning the center of the substrate wafer along the central axis of the sputter reactor.
Claim 5
Dependent Claim
49 words
The method for depositing a layer on a substrate of claim 1, comprising the additional step of distributing the cylindrical holes in said collimator with the radii of the cylindrical holes decreasing from the central axis of the sputter reactor to a location of maximum sputtering at the target.
Claim 6
Dependent Claim
29 words
The method for depositing a layer on a substrate of claim 1, comprising the additional step of providing the cylindrical holes having respectively identical radii outside the wafer edge.
Claim 7
Dependent Claim
152 words
The method for depositing a layer on a substrate of claim 1, comprising the additional step of distributing in said collimator the cylindrical holes with radii r(x) according to the following distribution as a function of the distance x from the central axis of the sputter reactor: ##EQU2## where r m =the minimum hole radius; x m =the distance from the central axis of the sputtering reactor to the location of maximum sputtering rate at the target; x 1 =the distance from the central axis of the sputter reactor to the edge of the substrate wafer; a 0 =the lowering factor of the sputtering rate at the central axis of the reactor relative to the maximum sputtering rate at the location x m ; a 1 =the lowering factor of the sputtering rate at the edge of the substrate wafer relative to the maximum sputtering rate at the location x m .
Claim 8
Dependent Claim
39 words
The method for depositing a layer on a substrate of claim 6, comprising the additional step of determining x m , a 0 and a 1 by measuring an erosion profile of the target after a selected service time.
Claim 9
Dependent Claim
32 words
The method for depositing a layer on a substrate of claim 6, comprising the additional steps of selecting a 0 between 0.1 and 0.7; and selecting a 1 between 0.1 and 0.7.
Claim 10
Dependent Claim
35 words
The method for depositing a layer on a substrate of claim 1, comprising the additional step of projecting the occlusion web beyond the collimator in a plane perpendicular to the cylinder axis of the holes.
Claim 11
Dependent Claim
31 words
The method for depositing a layer on a substrate of claim 1, comprising the additional step of annularly surrounding the cylindrical holes of the collimator by a plurality of occlusion webs.
Claim 12
Dependent Claim
43 words
The method of depositing a layer on a substrate wafer of claim 1, wherein the substrate further comprises a plurality of small structures on a surface and wherein the step of generating a particle flux comprises filling the small structures with the layer.
Claim 13
Independent Claim
124 words
A method for depositing a layer on a substrate wafer with a sputtering process, the substrate wafer having a surface and being located within a sputter reactor having a central axis, a target and a collimator, the collimator having a plurality of cylindrical holes, each having an axis with a distance between adjacent holes, at least one occlusion web being positioned between a pair of adjacent cylindrical holes, and said collimator being located between the substrate wafer and the target, comprising the steps of: aligning the axis of the cylindrical holes of the collimator substantially perpendicularly to the surface of the substrate wafer; and generating a particle flux having a vertical and a lateral component, and screening the lateral component by the cylindrical holes.
Claim 14
Independent Claim
124 words
A method for depositing a layer on a substrate wafer with a sputtering process, the substrate wafer having a surface and being located within a sputter reactor having a central axis, a target and a collimator, the collimator having a plurality of cylindrical holes, each having an axis with a distance between adjacent holes, at least one occlusion web being positioned between a pair of adjacent cylindrical holes, and said collimator being located between the substrate wafer and the target, comprising the steps of: aligning the axis of the cylindrical holes of the collimator substantially perpendicularly to the surface of the substrate wafer; and generating a particle flux having a vertical and a lateral component, and screening the lateral component by the cylindrical holes.
Claim 15
Dependent Claim
53 words
The method for depositing a layer on a substrate of claim 12, distributing said cylindrical holes in said collimator with the distance between adjacent cylindrical holes being greater in areas of the sputter reactor where the vertical particle flux component is higher than in areas where the vertical particle flux component is lower.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-09 | 1999-10-09 | 2000-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-09 | 2003-10-09 | 2004-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-09 | 2007-10-09 | 2008-04-09 | $7700.00 | Window Closed / Lapsed |