US5223108A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Extended lifetime collimator
Assignee: Tokyo Electron Ltd
•
Filing: 1991-12-30
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Granted: 1993-06-29
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Expires: 2011-12-30
Abstract
Abstract An improved, extended lifetime collimator for cathode sputtering has a plurality of passages which taper longitudinally from a target side of the collimator to a wafer side of the collimator. This longitudinal tapering reduces the adverse effects on collimator useful life and wafer deposition rate which are generally caused by the accumulation of sputtered particles on exposed surfaces on the target side of the collimator. Compared to prior collimators, this collimator may be used to sputter coat a greater number of wafers before replacement or cleaning is necessary, thereby enhancing throughput capability.
Inventors
- 👤 Steven Hurwitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:08
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3447; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
133 words
A sputter coating apparatus comprising: an evacuable chamber; a sputter target mounted in said chamber; a wafer mounted to said chamber opposite said target; and a collimator mounted between said target and said wafer, said collimator being spaced away from the wafer and said collimator having a plurality of passages which extend therethrough, each of said passages having a relatively large transverse cross sectional are entrance on a target side of the collimator and a relatively small transverse cross sectional area exit on a wafer side of the collimator, said passages tapering longitudinally from said relatively large transverse cross sectional area entrance to said relatively small transverse cross sectional area exit, the greatest transverse cross sectional area of each of the passages being smaller than the surface area of deposition on the wafer.
Claim 2
Dependent Claim
133 words
A sputter coating apparatus comprising: an evacuable chamber; a sputter target mounted in said chamber; a wafer mounted to said chamber opposite said target; and a collimator mounted between said target and said wafer, said collimator being spaced away from the wafer and said collimator having a plurality of passages which extend therethrough, each of said passages having a relatively large transverse cross sectional are entrance on a target side of the collimator and a relatively small transverse cross sectional area exit on a wafer side of the collimator, said passages tapering longitudinally from said relatively large transverse cross sectional area entrance to said relatively small transverse cross sectional area exit, the greatest transverse cross sectional area of each of the passages being smaller than the surface area of deposition on the wafer.
Claim 3
Dependent Claim
15 words
The sputter coating apparatus of claim 1 wherein said collimator is of unitary, single-piece construction.
Claim 4
Dependent Claim
26 words
The sputter coating apparatus of claim 2 wherein said collimator is formed of one component selected from the following components: aluminum, copper, stainless steel and titanium.
Claim 5
Dependent Claim
26 words
The sputter coating apparatus of claim 1 wherein said passages are frustoconical in shape, with a circular transverse cross section and a trapezoidal longitudinal cross section.
Claim 6
Dependent Claim
37 words
The sputter coating apparatus of claim 4 wherein, for each said passage, the ratio of the open area at the entrance to the open area at the exit is in the range of about 1.2:1 to 2.0:1.
Claim 7
Dependent Claim
46 words
The sputter coating apparatus of claim 1 wherein said collimator further comprises: at least three parallel plates aligned substantially parallel to said target and said wafer, each said plate having a plurality of throughholes and each said tapered passage defined by a plurality of aligned throughholes.
Claim 8
Dependent Claim
15 words
The sputter coating apparatus of claim 6 wherein each said throughhole is circular in cross-section.
Claim 9
Dependent Claim
37 words
The sputter coating apparatus of claim 7 wherein, for each said passage, the ratio of the open area at the entrance to the open area at the exit is in the range of about 1.2:1 to 2.0:1.
Claim 10
Dependent Claim
116 words
A sputter coating apparatus comprising: an evacuable chamber; a sputter target mounted in said chamber; a water mounted in said chamber opposite said target; and a collimator mounted between said target and said wafer, said collimator being spaced away from the wafer and said collimator having a plurality of open unit cells which permit the passage therethrough of sputtered particles from said target to said wafer, said unit cells being trapezoidal in longitudinal cross section and having a smallest effective transverse cross sectional open area at a wafer end of said collimator, the greatest transverse cross sectional open area of each of the unit cells being smaller than the surface area of deposition on the wafer.
Claim 11
Dependent Claim
116 words
A sputter coating apparatus comprising: an evacuable chamber; a sputter target mounted in said chamber; a water mounted in said chamber opposite said target; and a collimator mounted between said target and said wafer, said collimator being spaced away from the wafer and said collimator having a plurality of open unit cells which permit the passage therethrough of sputtered particles from said target to said wafer, said unit cells being trapezoidal in longitudinal cross section and having a smallest effective transverse cross sectional open area at a wafer end of said collimator, the greatest transverse cross sectional open area of each of the unit cells being smaller than the surface area of deposition on the wafer.
Claim 12
Independent Claim
150 words
A method of sputter coating a wafer comprising the steps of: placing a collimator between a target and a wafer in a sputter coating chamber so that the collimator is spaced from both the target and the wafer, the collimator having a plurality of passages therethrough defined by internal walls, said internal walls having a lesser thickness at a target side of the collimator than at a wafer side of the collimator so that each of said passages tapers inwardly in a longitudinal direction from said target to said wafer, the greatest transverse cross sectional area of each of the passages being less than the surface area of deposition on the wafer; and sputtering particles from said target to said water and intercepting some of said sputtered particles upon contact with said internal walls of said collimator and allowing some of said sputtered particles to pass through said tapered passages.
Claim 13
Independent Claim
150 words
A method of sputter coating a wafer comprising the steps of: placing a collimator between a target and a wafer in a sputter coating chamber so that the collimator is spaced from both the target and the wafer, the collimator having a plurality of passages therethrough defined by internal walls, said internal walls having a lesser thickness at a target side of the collimator than at a wafer side of the collimator so that each of said passages tapers inwardly in a longitudinal direction from said target to said wafer, the greatest transverse cross sectional area of each of the passages being less than the surface area of deposition on the wafer; and sputtering particles from said target to said water and intercepting some of said sputtered particles upon contact with said internal walls of said collimator and allowing some of said sputtered particles to pass through said tapered passages.
Claim 14
Dependent Claim
49 words
The method of claim 10 wherein said placing step further comprises: aligning a plurality of collimator plates in substantially parallel orientation between said target and said wafer, each of said plates having a plurality of holes formed therein, each said tapered passage defined by a plurality of aligned holes.
Claim 15
Dependent Claim
84 words
A wafer processing component for use during sputter coating of a wafer mounted opposite a target in a sputtering chamber comprising: a collimator having a plurality of passages which permit sputtered particles to pass therethrough from the target to the wafer, said passages tapering inwardly continuously in a longitudinal direction from a target side to a wafer side of the collimator, and the greatest transverse cross sectional area of each of the passages being less than the surface area of deposition on the wafer.
Claim 16
Dependent Claim
84 words
A wafer processing component for use during sputter coating of a wafer mounted opposite a target in a sputtering chamber comprising: a collimator having a plurality of passages which permit sputtered particles to pass therethrough from the target to the wafer, said passages tapering inwardly continuously in a longitudinal direction from a target side to a wafer side of the collimator, and the greatest transverse cross sectional area of each of the passages being less than the surface area of deposition on the wafer.
Claim 17
Dependent Claim
38 words
The wafer processing component of claim 12 wherein said passages are circular in transverse cross section and trapezoidal in longitudinal cross section, with the area of said circular cross-section decreasing from said target side to said wafer side.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-28 | 1996-12-28 | 1997-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-28 | 2000-12-28 | 2001-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-28 | 2004-12-28 | 2005-06-29 | $7700.00 | Window Closed / Lapsed |