US5504431A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for and method of evaluating semiconductor integrated circuit
Assignee: Panasonic Holdings Corp
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Filing: 1992-12-04
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Granted: 1996-04-02
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Expires: 2012-12-04
Abstract
Abstract A luminescence amount detecting part detects a weak optical radiation which a transistor in a semiconductor integrated circuit emits owing to a hot carrier effect. An output thereof is image-processed by an image processing part. An information storage part stores information on a transistor width and information on a switching frequency at an execution of a test pattern into each transistor. A switching time calculating part evaluates a switching time of the transistor from respective outputs of the image processing part and the information storage part to output a result. Thus the switching time can be evaluated easily without a electron beam tester whose operation is complicated. A delay time can be evaluated by detecting a luminescence amount which changes depending on a gate voltage, instead of measuring a gate voltage.
Inventors
- 👤 Toshinori Maeda
- 👤 Yukiharu Uraoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 11:17
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/27; G01R31/275; G01R31/28; G01R31/302; G01R31/308; G01R31/311
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
116 words
A device for evaluating a property of a semiconductor integrated circuit in which a transistor is arranged, comprising: luminescence amount detecting means for detecting a weak optical radiation which the transistor in the semiconductor integrated circuit emits owing to a hot carrier effect; expected value memory means for memorizing as an expected value a luminescence amount of a reference semiconductor integrated circuit detected by the luminescence amount detecting means; and judging means, which receives an output of the luminescence amount detecting means, for judging acceptance or rejection of the transistor by comparing a luminescence amount of the transistor to be evaluated with the expected value of the luminescence amount memorized in the expected value memorizing means.
Claim 2
Independent Claim
116 words
A device for evaluating a property of a semiconductor integrated circuit in which a transistor is arranged, comprising: luminescence amount detecting means for detecting a weak optical radiation which the transistor in the semiconductor integrated circuit emits owing to a hot carrier effect; expected value memory means for memorizing as an expected value a luminescence amount of a reference semiconductor integrated circuit detected by the luminescence amount detecting means; and judging means, which receives an output of the luminescence amount detecting means, for judging acceptance or rejection of the transistor by comparing a luminescence amount of the transistor to be evaluated with the expected value of the luminescence amount memorized in the expected value memorizing means.
Claim 3
Dependent Claim
80 words
The device for evaluating a semiconductor integrated circuit according to claim 1, further comprising: image processing means which receives an output of the luminescence amount detecting means, and samples out each luminescence amount of the radiation observed in the transistor in a field of vision to output the luminescence amount of each transistor, wherein the expected value memory means and the judging means receive an output of the image processing means, instead of that of the luminescence amount detecting means.
Claim 4
Independent Claim
125 words
A device for evaluating a property of a semiconductor integrated circuit in which a transistor is arranged, comprising: luminescence amount detecting means for detecting a weak optical radiation which said transistor in said semiconductor integrated circuit emits owing to a hot carrier effect; expected value memory means for memorizing an expected value of said property of said transistor in said semiconductor; processing means for processing the actual value of said property of said transistor in said semiconductor on the basis of a luminescence amount detected by said luminescence amount detecting means; and judging means for determining acceptance or rejection of said transistor on the basis of said expected value memorized by said expected value memory means and said actual value processed by said processing means.
Claim 5
Independent Claim
125 words
A device for evaluating a property of a semiconductor integrated circuit in which a transistor is arranged, comprising: luminescence amount detecting means for detecting a weak optical radiation which said transistor in said semiconductor integrated circuit emits owing to a hot carrier effect; expected value memory means for memorizing an expected value of said property of said transistor in said semiconductor; processing means for processing the actual value of said property of said transistor in said semiconductor on the basis of a luminescence amount detected by said luminescence amount detecting means; and judging means for determining acceptance or rejection of said transistor on the basis of said expected value memorized by said expected value memory means and said actual value processed by said processing means.
References Cited (Backward Citations)
US3302109A
Cited
US4389669A
Cited
US4680635A
Cited
JPS63119541A
Cited
US4755874A
Cited
US4811090A
Cited
US5030829A
Cited
US5012100A
Cited
US5006717A
Cited
US5136373A
Cited
US4972258A
Cited
US5270655A
Cited
JPH0479345A
Cited
US5032727A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-02 | 1999-10-02 | 2000-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-02 | 2003-10-02 | 2004-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-02 | 2007-10-02 | 2008-04-02 | $7700.00 | Window Closed / Lapsed |