US4755874A
Expired / Lapsed
US
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Emission microscopy system
Assignee: Barnes Engineering Co
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Filing: 1987-08-31
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Granted: 1988-07-05
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Expires: 2007-08-31
Abstract
Abstract An optical emission microscopy system with a macro optic system having a high numerical aperture for obtaining global views of an integrated circuit Device Under Test (DUT). The DUT is subjected to illumination and stimulation conditions, and images are obtained to form a "global difference" image in which defects, wherever located in the chip, can be discerned by the system operator. The operator can select apparent "defect bright spots" to be further inspected, and zoom in with the higher magnification micro optics system to repeat the image formation steps. "Difference images" are processed to further eliminate noise spots using an improved two-stage filtering operation. The system may be operated under manual or automatic control, and may be interfaced to various data input, storage, and output devices as desired.
Inventors
- 👤 Paul Esrig
- 👤 Eliezer Rosengaus
- 👤 Ezra Van Gelder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 23:16
CPC Classifications
G; G06; G06T; G06T7/00; G06T7/0002; G06T7/0004; G06T7/001; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G01N21/95607; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01N2021/95638; G01N21/62; G01N21/66; G06T2207/00; G06T2207/10; G06T2207/10056; G06T2207/20; G06T2207/20036; G06T2207/30; G06T2207/30108; G06T2207/30148
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
139 words
Emission microscopy means for detecting light emitted from defects in dielectric layers of integrated circuit devices in response to test vector signals applied to the input and output terminals of the integrated circuit device, comprising: mounting means for holding the device under test to be inspected; optical means including macro optic means having a high numerical aperture for obtaining global optical images of said device under test and including micro optic means for alternatively obtaining micro optical images of sub-areas of said device under test; primary camera means for converting said optical images into analog electronic signals, said camera means including light intensifier means and being capable of integrating the analog electronic signals; video image signal processing means for processing said analog electronic signals; and video image display means for displaying signals processed by said video image processing means.
Claim 2
Dependent Claim
139 words
Emission microscopy means for detecting light emitted from defects in dielectric layers of integrated circuit devices in response to test vector signals applied to the input and output terminals of the integrated circuit device, comprising: mounting means for holding the device under test to be inspected; optical means including macro optic means having a high numerical aperture for obtaining global optical images of said device under test and including micro optic means for alternatively obtaining micro optical images of sub-areas of said device under test; primary camera means for converting said optical images into analog electronic signals, said camera means including light intensifier means and being capable of integrating the analog electronic signals; video image signal processing means for processing said analog electronic signals; and video image display means for displaying signals processed by said video image processing means.
Claim 3
Dependent Claim
18 words
Apparatus as in claim 1 wherein said macro optic means has a numerical aperture of at least 0.025.
Claim 4
Dependent Claim
25 words
Apparatus as in claim 2 further including illumination means for illuminating said device under test at light intensity levels automatically controlled by said computer means.
Claim 5
Dependent Claim
24 words
Apparatus as in claim 2 wherein operations of said system are controlled by said image processing means under the control of mouse input means.
Claim 6
Dependent Claim
12 words
Apparatus as in claim 2 wherein said display means includes storage means.
Claim 7
Dependent Claim
32 words
Apparatus as in claim 5 wherein said storage means includes means of providing a previously verified good integrated circuit image by said display means and comparison with said displayed processed difference image.
Claim 8
Dependent Claim
14 words
Apparatus as in claim 5 wherein said storage means includes floppy disk storage means.
Claim 9
Dependent Claim
14 words
Apparatus as in claim 5 wherein said storage means includes video image printer means.
Claim 10
Dependent Claim
29 words
Apparatus as in claim 2 wherein said mounting means and said optical means are moveable with respect to each other automatically under programmed control by said signal processing means.
Claim 11
Dependent Claim
41 words
Apparatus as in claim 9 wherein said mounting means includes wafer chuck means, probe means, and wherein both said mounting means and said optical means are moveable with respect to each other automatically under programmed control by said signal processing means.
Claim 12
Dependent Claim
34 words
Apparatus as in claim 9 wherein said mounting means includes a socket adaptor module with local switches and auxillary signal input means for applying selected test vector voltages to said input and output terminals.
Claim 13
Dependent Claim
40 words
Apparatus as in claim 11 wherein said mounting means includes means to mount a second device under test adjacent the first mentioned device under test, and said module includes means for applying test vectors to said second device under test.
Claim 14
Dependent Claim
25 words
Apparatus as in claim 9 further including auxillary camera means for providing a display image to supplement the image provided by said primary camera means.
Claim 15
Dependent Claim
41 words
Apparatus as in claim 9 wherein said micro optic means includes a plurality of lenses means having magnification powers in the range between 10 and 100 times, and is engageable in the optical axis of said primary camera by the computer.
Claim 16
Dependent Claim
33 words
Apparatus as in claim 9 wherein said mounting means includes stimulator module means for programmably applying selected test vectors to I/O terminals of a device under test inserted into said socket adaptor module.
Claim 17
Dependent Claim
28 words
Apparatus as in claim 15 further including CAD interface means for said image signal processing means to access IC composite layout images from a computer aided design system.
Claim 18
Dependent Claim
25 words
Apparatus as in claim 15 including ATE interface means for connecting said stimulator module to receive test vectors provided from an automatic test equipment system.
Claim 19
Dependent Claim
29 words
Apparatus as in claim 17 wherein said stimulator module is programmable to apply selected test vectors in a selected order through said stimulator module to a device under test.
Claim 20
Independent Claim
236 words
A method of detecting light emitted from defects in dielectrics located at unknown coordinates in an integrated circuit device comprising the steps of: obtaining a reference image of said device; forming a background image of collectable noise; applying electrical voltages to selected terminals of the integrated circuit device so as to cause light to be emitted at the locations of defects contained therein; forming an emitted light image of said integrated circuit including the light emitted from defects contained therein; forming a difference light image of said integrated circuit by subtracting said background image from said emitted image; processing said difference image to remove noise and to produce a processed macro difference image; superimposing said processed macro difference image onto said reflected image to form a superimposed image; identifying defect bright spots on said superimposed image; compiling a list of coordinates of said bright spots; replacing said macro lens with a micro lens; moving the axis of said micro lens over a first set of coordinates from said list; forming a difference image of the local area in a window around said set of coordinates; processing said difference image to remove noise and to produce a processed micro difference image; superimposing said processed difference image over said micro reflected image; and comparing said superimposed image to a reference image of said integrated circuit to locate coordinates of said defect, more precisely relative to said integrated circuit.
Claim 21
Independent Claim
236 words
A method of detecting light emitted from defects in dielectrics located at unknown coordinates in an integrated circuit device comprising the steps of: obtaining a reference image of said device; forming a background image of collectable noise; applying electrical voltages to selected terminals of the integrated circuit device so as to cause light to be emitted at the locations of defects contained therein; forming an emitted light image of said integrated circuit including the light emitted from defects contained therein; forming a difference light image of said integrated circuit by subtracting said background image from said emitted image; processing said difference image to remove noise and to produce a processed macro difference image; superimposing said processed macro difference image onto said reflected image to form a superimposed image; identifying defect bright spots on said superimposed image; compiling a list of coordinates of said bright spots; replacing said macro lens with a micro lens; moving the axis of said micro lens over a first set of coordinates from said list; forming a difference image of the local area in a window around said set of coordinates; processing said difference image to remove noise and to produce a processed micro difference image; superimposing said processed difference image over said micro reflected image; and comparing said superimposed image to a reference image of said integrated circuit to locate coordinates of said defect, more precisely relative to said integrated circuit.
Claim 22
Dependent Claim
30 words
A method as in claim 19 wherein said step of obtaining a reference image includes illuminating said integrated circuit; and forming a reflected light image of said illuminated integrated circuit.
Claim 23
Dependent Claim
22 words
A method as in claim 19 wherein said step of processing includes filtering said image by spatial characteristics discrimination such as "erosion".
Claim 24
Dependent Claim
19 words
A method as in claim 19 wherein said step of processing includes performing context discrimination on said difference image.
Claim 25
Dependent Claim
19 words
A method as in claim 19 wherein said step of processing includes the step of painting said difference image.
Claim 26
Dependent Claim
14 words
A method as in claim 23 including the step of annotating said difference image.
Claim 27
Dependent Claim
15 words
A method as in claim 19 wherein said step of processing is programmably automatically performed.
Claim 28
Dependent Claim
17 words
A method as in claim 25 wherein said processing can be done with selectable gray level sensitivity.
Claim 29
Dependent Claim
15 words
A method as in claim 26 wherein said processing is done with selectable confidence levels.
References Cited (Backward Citations)
US4389669A
Cited
US4680635A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-05 | 1992-01-04 | 1992-07-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-05 | 1996-01-04 | 1996-07-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-05 | 2000-01-04 | 2000-07-05 | $7700.00 | Window Closed / Lapsed |