US5501998A
Expired / Lapsed
US
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Method for fabricating dynamic random access memory cells having vertical sidewall stacked storage capacitors
Assignee: Industrial Technology Research Institute
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Filing: 1994-04-26
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Granted: 1996-03-26
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Expires: 2014-04-26
Abstract
Abstract A new method for fabricating a microminiature capacitor, on a dynamic random access memory (DRAM) cell, using a single masking level was accomplished. The method involves opening the self-aligned node contact and the area for the bottom electrode of the capacitor, at the same time, using one masking level. The planarization of a low flow temperature glass (BPSG) and an etch back technique is used to define the bottom electrode of the capacitor, which is self-aligned to the etched opening. The resulting capacitor has vertical side walls on the perimeter of the capacitor plate, which increases its area without increasing the lateral area on the DRAM cell. Using one masking level for the fabrication of the capacitor, also eliminates the need to add additional space for the tolerance of a second mask.
Inventors
- 👤 Chung-Zen Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 10:29
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/31; H10B12/318; H10B12/01; H10B12/02; H10B12/03; H10B12/033
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
252 words
A method for fabricating a capacitor on a semiconductor substrate having a device region formed therein comprising the steps of: depositing a first insulating layer on said substrate; depositing a second insulating layer on said first insulating layer forming a diffusion barrier and etch stop layer on said substrate; and depositing a third insulating layer composed of borophosphosilicate glass on said second insulating layer and planarizing said third insulating layer; forming openings through said third, second and first insulating layers to said device region in said substrate; depositing a first polysilicon layer over said substrate and said openings to thereby form a bottom capacitor electrode and making electrical contact to the said device region therein; depositing and planarizing a fourth insulating layer over said first polysilicon layer and planarizing said fourth insulating layer by thermal anneal; and etching back said fourth insulating layer until said first polysilicon layer is exposed in areas external to said openings; etching back said first polysilicon layer in areas external to said openings to complete and isolate said bottom capacitor electrodes over and aligned to said openings; etching completely said third and fourth insulating layers to expose top and sides of said bottom capacitor electrodes and exposing said second insulation layer elsewhere outside the bottom capacitor electrode on said substrate; forming a dielectric layer on surfaces of said isolated bottom capacitor electrodes; and depositing a second polysilicon layer on said dielectric layer, and on said second insulating layer elsewhere on said substrate forming a top capacitor electrode.
Claim 2
Independent Claim
252 words
A method for fabricating a capacitor on a semiconductor substrate having a device region formed therein comprising the steps of: depositing a first insulating layer on said substrate; depositing a second insulating layer on said first insulating layer forming a diffusion barrier and etch stop layer on said substrate; and depositing a third insulating layer composed of borophosphosilicate glass on said second insulating layer and planarizing said third insulating layer; forming openings through said third, second and first insulating layers to said device region in said substrate; depositing a first polysilicon layer over said substrate and said openings to thereby form a bottom capacitor electrode and making electrical contact to the said device region therein; depositing and planarizing a fourth insulating layer over said first polysilicon layer and planarizing said fourth insulating layer by thermal anneal; and etching back said fourth insulating layer until said first polysilicon layer is exposed in areas external to said openings; etching back said first polysilicon layer in areas external to said openings to complete and isolate said bottom capacitor electrodes over and aligned to said openings; etching completely said third and fourth insulating layers to expose top and sides of said bottom capacitor electrodes and exposing said second insulation layer elsewhere outside the bottom capacitor electrode on said substrate; forming a dielectric layer on surfaces of said isolated bottom capacitor electrodes; and depositing a second polysilicon layer on said dielectric layer, and on said second insulating layer elsewhere on said substrate forming a top capacitor electrode.
Claim 3
Dependent Claim
33 words
The method of claim 1, wherein said first insulating layer is composed of silicon dioxide formed from chemical vapor deposition in tetraethoxysilane (TEOS) and having a thickness from about 300 to 800 Angstroms.
Claim 4
Dependent Claim
25 words
The method of claim 1, wherein said second insulating layer is composed of silicon nitride having a thickness range from about 300 to 800 Angstroms.
Claim 5
Dependent Claim
29 words
The method of claim 1, wherein said third insulating layer is composed of a borophosphosilicate glass (BPSG) having a thickness in the range of about 5000 to 7000 Angstroms.
Claim 6
Dependent Claim
31 words
The method of claim 4, wherein said borophosphosilicate glass is planarized by thermal annealing in the temperature range of about 850° to 900° C. for a time of about 30 minutes.
Claim 7
Dependent Claim
52 words
The method of claim 1, wherein said openings forming step comprises the steps of photoresist masking and anisotropic etching said third insulating layer selectively to said second insulating layer, etching in phosphoric acid said second insulating layer to said first insulating layer, and anisotropically etching said first insulating layer to said substrate.
Claim 8
Dependent Claim
48 words
The method of claim 1, wherein said bottom capacitor electrode composed of said first polysilicon layer is doped N type impurity having a concentration of between about 5 E 19 to 2 E 20 atoms/cm 3 and having a thickness range from between about 500 to 1000 Angstroms.
Claim 9
Dependent Claim
39 words
The method of claim 1, wherein said fourth insulating layer is composed of borophosphosilicate glass having a thickness range between 3500 to 5000 Angstroms and made planar by annealing in a temperature range from between 850° to 900° C.
Claim 10
Dependent Claim
36 words
The method of claim 1, wherein said etching of said third and fourth insulating layers is an isotropic etching and is performed in a buffered hydrofluoric acid having a concentration of about 0.5 to 1.0 percent.
Claim 11
Dependent Claim
29 words
The method of claim 1, wherein said dielectric layer is a composite silicon oxide/silicon nitride/silicon oxide (ONO) having a thickness in the range from about 30 to 250 Angstroms.
Claim 12
Dependent Claim
49 words
The method of claim 1 wherein said top capacitor electrode layer composed of said second polysilicon layer is doped N-type impurity having a concentration range from about 5 E 19 to 2 E 20 atoms/cm 3 and having a thickness in the range from about 800 to 1000 Angstroms.
Claim 13
Dependent Claim
26 words
The method of claim 1 wherein said bottom capacitor electrode is formed completely from a single polysilicon layer and having vertical wall components which increases capacitance.
Claim 14
Dependent Claim
23 words
The method of claim 1 wherein said device region is a source/drain region and said capacitor is a part of a DRAM cell.
Claim 15
Independent Claim
286 words
A method for fabricating a DRAM cell with a Field Effect Transistor (FET) having a device source/drain and a capacitor formed on and in a semiconductor substrate therein comprising the steps of forming said capacitor by: depositing a first insulating layer on said substrate; depositing a second insulating layer on said first insulating layer forming a diffusion barrier and etch stop layer on said substrate; and depositing a third insulating layer composed of borophosphosilicate glass on said second insulating layer and planarizing said third insulating layer; forming openings through said third, second and first insulating layers to said FET device source/drain on and in said substrate; depositing a first polysilicon layer over said substrate and said openings to thereby form a bottom capacitor electrode and making electrical contact to said FET source/drain therein; depositing and planarizing a fourth insulating layer over said first polysilicon layer and planarizing said fourth insulating layer by thermal anneal; and etching back said fourth insulating layer until said first polysilicon layer is exposed in areas external to said openings; etching back said first polysilicon layer in areas external to said openings to complete and isolate said bottom capacitor electrodes over and aligned to said openings thereby forming completely from a single polysilicon layer vertical wall components which increase capacitance; etching completely said third and fourth insulating layers to expose top and sides of said bottom capacitor electrodes and exposing said second insulation layer elsewhere outside the bottom capacitor electrode on said substrate; forming a dielectric layer on surfaces of said isolated bottom capacitor electrodes; and depositing a second polysilicon layer on said dielectric layer, and on said second insulating layer elsewhere on said substrate and thereby forming a top capacitor electrode.
Claim 16
Independent Claim
286 words
A method for fabricating a DRAM cell with a Field Effect Transistor (FET) having a device source/drain and a capacitor formed on and in a semiconductor substrate therein comprising the steps of forming said capacitor by: depositing a first insulating layer on said substrate; depositing a second insulating layer on said first insulating layer forming a diffusion barrier and etch stop layer on said substrate; and depositing a third insulating layer composed of borophosphosilicate glass on said second insulating layer and planarizing said third insulating layer; forming openings through said third, second and first insulating layers to said FET device source/drain on and in said substrate; depositing a first polysilicon layer over said substrate and said openings to thereby form a bottom capacitor electrode and making electrical contact to said FET source/drain therein; depositing and planarizing a fourth insulating layer over said first polysilicon layer and planarizing said fourth insulating layer by thermal anneal; and etching back said fourth insulating layer until said first polysilicon layer is exposed in areas external to said openings; etching back said first polysilicon layer in areas external to said openings to complete and isolate said bottom capacitor electrodes over and aligned to said openings thereby forming completely from a single polysilicon layer vertical wall components which increase capacitance; etching completely said third and fourth insulating layers to expose top and sides of said bottom capacitor electrodes and exposing said second insulation layer elsewhere outside the bottom capacitor electrode on said substrate; forming a dielectric layer on surfaces of said isolated bottom capacitor electrodes; and depositing a second polysilicon layer on said dielectric layer, and on said second insulating layer elsewhere on said substrate and thereby forming a top capacitor electrode.
Claim 17
Dependent Claim
33 words
The method of claim 14, wherein said first insulating layer is composed of silicon dioxide formed from chemical vapor deposition in tetraethoxysilane (TEOS) and having a thickness from about 300 to 800 Angstroms.
Claim 18
Dependent Claim
25 words
The method of claim 14, wherein said second insulating layer is composed of silicon nitride having a thickness range from about 300 to 800 Angstroms.
Claim 19
Dependent Claim
29 words
The method of claim 14, wherein said third insulating layer is composed of a borophosphosilicate glass (BPSG) having a thickness in the range of about 5000 to 7000 Angstroms.
Claim 20
Dependent Claim
31 words
The method of claim 17, wherein said borophosphosilicate glass is planarized by thermal annealing in the temperature range of about 850 to 900° C. for a time of about 30 minutes.
Claim 21
Dependent Claim
52 words
The method of claim 14, wherein said openings forming step comprises the steps of photoresist masking and anisotropic etching said third insulating layer selectively to said second insulating layer, etching in phosphoric acid said second insulating layer to said first insulating layer, and anisotropically etching said first insulating layer to said substrate.
Claim 22
Dependent Claim
48 words
The method of claim 14, wherein said bottom capacitor electrode composed of said first polysilicon layer is doped with N type impurity having a concentration of between 5 E 19 to 2 E 20 atoms/cm 3 and having a thickness range from between about 500 to 1000 Angstroms.
Claim 23
Dependent Claim
39 words
The method of claim 14, wherein said fourth insulating layer is composed of borophosphosilicate glass having a thickness range between 3500 to 5000 Angstroms and made planar by annealing in a temperature range from between 850° to 900° C.
Claim 24
Dependent Claim
36 words
The method of claim 14, wherein said etching of said third and fourth insulating layers is an isotropic etching and is performed in a buffered hydrofluoric acid having a concentration of about 0.5 to 1.0 percent.
Claim 25
Dependent Claim
29 words
The method of claim 14, wherein said dielectric layer is a composite silicon oxide/silicon nitride/silicon oxide (ONO) having a thickness in the range from about 30 to 250 Angstroms.
Claim 26
Dependent Claim
50 words
The method of claim 14 wherein said top capacitor electrode layer composed of said second polysilicon layer is doped with N-type impurity having the concentration range from about 5 E 19 to 2 E 20 atoms/cm 3 and having a thickness in the range from about 800 to 1000 Angstroms.
Claim 27
Independent Claim
263 words
A method for fabricating a capacitor on a semiconductor substrate having a device region formed therein comprising the steps of: depositing a first insulating layer on said substrate; depositing a second insulating layer on said first insulating layer forming a diffusion barrier and etch stop layer on said substrate; and depositing a third insulating layer composed of borophosphosilicate glass on said second insulating layer, and planarizing said third insulating layer; forming openings through said third, second and first insulating layers to said device region in said substrate; depositing a first polysilicon layer over said substrate and said openings to thereby form a bottom capacitor electrode and making electrical contact to the said device region therein; depositing and planarizing a fourth insulating layer composed of borophosphosilicate glass over said first polysilicon layer and planarizing said fourth insulating layer by thermal annealing at a temperature between 850° to 900° C.; etching back said fourth insulating layer until said first polysilicon layer is exposed in areas external to said openings; etching back said first polysilicon layer in areas external to said openings to complete and isolate said bottom capacitor electrodes over and aligned to said openings; etching completely said third and fourth insulating layers to expose top and sides of said bottom capacitor electrodes and exposing said second insulation layer elsewhere outside the bottom capacitor electrode on said substrate; forming a dielectric layer on surfaces of said isolated bottom capacitor electrodes; and depositing a second polysilicon layer on said dielectric layer, and on said second insulating layer elsewhere on said substrate forming a top capacitor electrode.
Claim 28
Independent Claim
263 words
A method for fabricating a capacitor on a semiconductor substrate having a device region formed therein comprising the steps of: depositing a first insulating layer on said substrate; depositing a second insulating layer on said first insulating layer forming a diffusion barrier and etch stop layer on said substrate; and depositing a third insulating layer composed of borophosphosilicate glass on said second insulating layer, and planarizing said third insulating layer; forming openings through said third, second and first insulating layers to said device region in said substrate; depositing a first polysilicon layer over said substrate and said openings to thereby form a bottom capacitor electrode and making electrical contact to the said device region therein; depositing and planarizing a fourth insulating layer composed of borophosphosilicate glass over said first polysilicon layer and planarizing said fourth insulating layer by thermal annealing at a temperature between 850° to 900° C.; etching back said fourth insulating layer until said first polysilicon layer is exposed in areas external to said openings; etching back said first polysilicon layer in areas external to said openings to complete and isolate said bottom capacitor electrodes over and aligned to said openings; etching completely said third and fourth insulating layers to expose top and sides of said bottom capacitor electrodes and exposing said second insulation layer elsewhere outside the bottom capacitor electrode on said substrate; forming a dielectric layer on surfaces of said isolated bottom capacitor electrodes; and depositing a second polysilicon layer on said dielectric layer, and on said second insulating layer elsewhere on said substrate forming a top capacitor electrode.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-26 | 1999-09-25 | 2000-03-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-26 | 2003-09-25 | 2004-03-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-26 | 2007-09-25 | 2008-03-26 | $7700.00 | Window Closed / Lapsed |