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US5493509A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of and apparatus for generating mask layouts

Assignee: Toshiba Corp
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Filing: 1993-09-02
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Granted: 1996-02-20
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Expires: 2013-09-02
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Abstract

Abstract In graphic data representing a symbolic layout for a semiconductor integrated circuit, a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles are set. First, the graphic data is cut along said first cutting lines to produce a plurality of first segment data items. These first segment data items are each compacted in the direction of the second cutting line. These compacted first segment data items are connected according to the first cutting lines. This connected first segment data is cut along the second cutting lines to produce a plurality of second segment data items. These second segment data items are each compacted in the direction of the first cutting line. These compacted second segment data items are connected to one another to produce a compacted mask layout.

Inventors

  • 👤 Nobu Matsumoto
  • 👤 Shojiro Mori

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 09:10
CPC Classifications
G; G06; G06F; G06F30/00; G06F30/30; G06F30/39; G06F30/398

Claims Analysis

Total Claims: 22
Claim 1
Independent Claim 175 words
A method of generating mask layouts for semiconductor integrated circuits using a design-supporting apparatus, comprising the steps of: reading data representing a symbolic layout for a semiconductor integrated circuit stored in a first memory device and storing the data in a second memory device, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; cutting the data read from said second memory device along said first cutting lines to produce a plurality of first segment data items; compacting these first segment data items in the direction of the second cutting line; connecting these compacted first segment data items according to the first cutting lines; cutting the entire first segment data thus connected along the second cutting lines to produce a plurality of second segment data items; compacting these second segment data items in the direction of the first cutting line; and connecting these compacted second segment data items to each other and storing the resulting data in said first memory device.
Claim 2
Independent Claim 175 words
A method of generating mask layouts for semiconductor integrated circuits using a design-supporting apparatus, comprising the steps of: reading data representing a symbolic layout for a semiconductor integrated circuit stored in a first memory device and storing the data in a second memory device, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; cutting the data read from said second memory device along said first cutting lines to produce a plurality of first segment data items; compacting these first segment data items in the direction of the second cutting line; connecting these compacted first segment data items according to the first cutting lines; cutting the entire first segment data thus connected along the second cutting lines to produce a plurality of second segment data items; compacting these second segment data items in the direction of the first cutting line; and connecting these compacted second segment data items to each other and storing the resulting data in said first memory device.
Claim 3
Dependent Claim 20 words
A method according to claim 1, wherein said first cutting lines are set in the vertical direction of the data.
Claim 4
Dependent Claim 21 words
A method of according to claim 1, wherein said second cutting lines are set in the horizontal direction of the data.
Claim 5
Dependent Claim 16 words
A method of according to claim 1, wherein said first and second cutting lines contain bends.
Claim 6
Dependent Claim 33 words
A method of according to claim 1, wherein said compaction is achieved in parallel by a plurality of processors in a manner that treats a single segment data item as a single job.
Claim 7
Dependent Claim 27 words
A method according to claim 1, wherein each of said compacting steps compacts each of said first and second segment data items by a constraint graph method.
Claim 8
Independent Claim 161 words
A method of generating mask layouts for semiconductor integrated circuits using a design-supporting apparatus, comprising the steps of: reading graphic data representing a symbolic layout for a semiconductor integrated circuit stored in a first memory device and storing the data in a second memory device, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; cutting the data in said second memory device along said first cutting lines to produce a plurality of first segment data items; compacting these first segment data items in the direction of the second cutting line; cutting these compacted first segment data items along the second cutting lines to produce a plurality of second segment data items; compacting these second segment data items in the direction of the first cutting line; and connecting these compacted second segment data items to each other and storing the resulting data in said first memory device.
Claim 9
Independent Claim 161 words
A method of generating mask layouts for semiconductor integrated circuits using a design-supporting apparatus, comprising the steps of: reading graphic data representing a symbolic layout for a semiconductor integrated circuit stored in a first memory device and storing the data in a second memory device, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; cutting the data in said second memory device along said first cutting lines to produce a plurality of first segment data items; compacting these first segment data items in the direction of the second cutting line; cutting these compacted first segment data items along the second cutting lines to produce a plurality of second segment data items; compacting these second segment data items in the direction of the first cutting line; and connecting these compacted second segment data items to each other and storing the resulting data in said first memory device.
Claim 10
Dependent Claim 16 words
A method of according to claim 7, wherein said second cutting lines cut the data horizontally.
Claim 11
Dependent Claim 16 words
A method of according to claim 7, wherein said first and second cutting lines contain bends.
Claim 12
Dependent Claim 33 words
A method of according to claim 7, wherein said compaction is achieved in parallel by a plurality of processors in a manner that treats a single segment data item as a single job.
Claim 13
Dependent Claim 15 words
A method according to claim 7, wherein said first cutting lines cut the data vertically.
Claim 14
Independent Claim 177 words
An apparatus for generating mask layouts for semiconductor integrated circuits, comprising: first memory means for storing data representing a symbolic layout for a semiconductor integrated circuit, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; first generating means for reading said data from said first memory means and cutting the data along said first cutting lines to produce a plurality of first segment data items; first compacting means for compacting said first segment data in the direction of the second cutting line; first connecting means for connecting the first segment data items compacted by said compacting means according to the first cutting lines; second generating means for cutting the connected first segment data along the second cutting lines to produce a plurality of second segment data items; second compacting means for compacting said second segment data items in the direction of the first cutting line; and second connecting means for connecting the second segment data items compacted by said second compacting means.
Claim 15
Independent Claim 177 words
An apparatus for generating mask layouts for semiconductor integrated circuits, comprising: first memory means for storing data representing a symbolic layout for a semiconductor integrated circuit, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; first generating means for reading said data from said first memory means and cutting the data along said first cutting lines to produce a plurality of first segment data items; first compacting means for compacting said first segment data in the direction of the second cutting line; first connecting means for connecting the first segment data items compacted by said compacting means according to the first cutting lines; second generating means for cutting the connected first segment data along the second cutting lines to produce a plurality of second segment data items; second compacting means for compacting said second segment data items in the direction of the first cutting line; and second connecting means for connecting the second segment data items compacted by said second compacting means.
Claim 16
Dependent Claim 31 words
An apparatus according to claim 12, wherein each of said first and second compacting means is equipped to compact said first and second segment data items using a constraint graph method.
Claim 17
Dependent Claim 15 words
An apparatus according to claim 12, wherein said first and second cutting lines contain bends.
Claim 18
Dependent Claim 39 words
An apparatus according to claim 12, wherein said first and second compacting means have each a plurality of processors and each processor performs parallel processing in a manner that treats a single segment data item as a single job.
Claim 19
Dependent Claim 20 words
An apparatus according to claim 12, wherein said first cutting lines are set in the vertical direction of the data.
Claim 20
Dependent Claim 20 words
An apparatus according to claim 12, wherein said second cutting lines are set in the horizontal direction of the data.
Claim 21
Independent Claim 198 words
A method of generating mask layouts for semiconductor integrated circuits using a design-supporting apparatus, comprising the steps of: reading data representing a symbolic layout for a semiconductor integrated circuit stored in a first memory device and storing the data in a second memory device, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; cutting the data read from said second memory device along said first cutting lines to produce a plurality of first segment data items, each of said first segment data items being partitioned from each other; compacting these first segment data items in a direction of the second cutting lines; connecting these compacted first segment data items according to the first cutting lines; cutting the entire first segment data thus connected along the second cutting lines to produce a plurality of second segment data items, each of said second segment data items being partitioned from each other; compacting these second segment data items in a direction of the first cutting lines; and connecting these compacted second segment data items to each other and storing resulting data in said first memory device.
Claim 22
Independent Claim 198 words
A method of generating mask layouts for semiconductor integrated circuits using a design-supporting apparatus, comprising the steps of: reading data representing a symbolic layout for a semiconductor integrated circuit stored in a first memory device and storing the data in a second memory device, the data containing a plurality of first cutting lines and a plurality of second cutting lines crossing the first cutting lines at right angles; cutting the data read from said second memory device along said first cutting lines to produce a plurality of first segment data items, each of said first segment data items being partitioned from each other; compacting these first segment data items in a direction of the second cutting lines; connecting these compacted first segment data items according to the first cutting lines; cutting the entire first segment data thus connected along the second cutting lines to produce a plurality of second segment data items, each of said second segment data items being partitioned from each other; compacting these second segment data items in a direction of the first cutting lines; and connecting these compacted second segment data items to each other and storing resulting data in said first memory device.

References Cited (Backward Citations)

US5079717A Cited
US5267177A Cited
US5369596A Cited
US5303161A Cited
US5381343A Cited
US5353235A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-02-19 1999-08-21 2000-02-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-02-19 2003-08-21 2004-02-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-02-19 2007-08-21 2008-02-20 $7700.00 Window Closed / Lapsed

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